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Sensors, methods of making and devices

  • US 10,451,590 B2
  • Filed: 12/04/2017
  • Issued: 10/22/2019
  • Est. Priority Date: 05/23/2013
  • Status: Active Grant
First Claim
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1. An assembly comprising:

  • at least one active sensor and at least one reference sensor, wherein each of the active sensor and the reference sensor comprises;

    at least a first resonator, the at least first resonator having a first surface and an opposing second surface and the first resonator comprising;

    a bottom electrode;

    a piezoelectric layer; and

    a top electrode,wherein the piezoelectric layer is positioned between the bottom electrode and the top electro;

    a metal oxide layer positioned on at least the second surface of the first and second resonator of both the at least one active and at least one reference sensors, the metal oxide layer having a thickness from about 10 Å

    to about 500 Å and

    the metal oxide layer comprising oxygen atoms;

    a coupling layer, the coupling layer comprising silicon atoms, the silicon atoms of the silane layer bound to oxygen atoms in the metal oxide layer;

    thickness from about 10 Å

    to about 500 Å and

    the metal oxide layer comprising oxygen atoms;

    a coupling layer, the coupling layer comprising silicon atoms, the silicon atoms of the coupling layer bound to oxygen atoms in the metal oxide layer;

    a molecular recognition component layer, the molecular recognition component of the molecular recognition component layer bound to the coupling layer over the at least one active sensor; and

    a reference binding material layer, the reference binding material of the reference binding material layer bound to the coupling layer over the at least one reference sensor,wherein the reference binding material is different than the molecular recognition component.

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