Reducing speckle in an excimer light source

• US 10,451,890 B2
• Filed: 01/16/2017
• Issued: 10/22/2019
• Est. Priority Date: 01/16/2017
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV), Cymer Incorporated (ASML Holding NV)
• Original Assignee: Cymer Incorporated (ASML Holding NV)
• Inventors: op 't Root, Wilhelmus Patrick Elisabeth Maria, Duffey, Thomas Patrick, Godfried, Herman Philip, Everts, Frank, Thornes, Joshua Jon, King, Brian Edward
• Primary Examiner(s): Alexander, William R
• Application Number:
  US15/407,153
• Publication Number:
  US 20180203248A1
• Time in Patent Office: 1,009 Days
• Field of Search: 359237-239, 359257, 359264, 359278, 359279, 359285, 359559, 356 51, 356308, 356309, 356451, 356456, 356479, 356480, 356496, 356497, 250372, 250373, 372 21, 372 22, 372 25, 372 26, 372 29016, 372 29021, 372 29023, 372 30, 372102
• CPC Class Codes: G01J 11/00 Measuring the characteristics of individual optical pulses or of optical pulse trains
• CPC Class Codes: G01J 2009/0211 for measuring coherence
• CPC Class Codes: G01J 3/027 Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 9/02 by interferometric methods using interferometers for measuring optically the linear dimensions of objects G01B9/02
• CPC Class Codes: G02B 19/0095 for use with ultraviolet radiation
• CPC Class Codes: G02B 27/48 Laser speckle optics
• CPC Class Codes: G02F 1/0121 Operation of devices; Circuit arrangements, not otherwise provided for in this subclass
• CPC Class Codes: G02F 2203/18 adaptive optics, e.g. wavefront correction
• CPC Class Codes: G03F 7/70008 Production of exposure light, i.e. light sources
• CPC Class Codes: G03F 7/70025 by lasers
• CPC Class Codes: G03F 7/70041 by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control
• CPC Class Codes: G03F 7/7055 Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
• CPC Class Codes: G03F 7/70583 Speckle reduction, e.g. coherence control or amplitude/wavefront splitting
• CPC Class Codes: H01S 3/0057 Temporal shaping, e.g. pulse compression, frequency chirping soliton generation and propagation G02F1/3513, H01S3/063 and H01S3/108
• CPC Class Codes: H01S 3/0085 Modulating the output, i.e. the laser beam is modulated outside the laser cavity
• CPC Class Codes: H01S 3/225 comprising an excimer or exciplex
• CPC Class Codes: H01S 4/00 Devices using stimulated emission of electromagnetic radiation in wave ranges other than those covered by groups H01S1/00, H01S3/00 or H01S5/00, e.g. phonon masers, X-ray lasers or gamma-ray lasers

Abstract

A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

Claims

1. A method comprising:

producing a light beam made up of pulses having a wavelength in a deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration;

for each pulse in a plurality of pulses in the light beam, modulating an optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse;

forming a light beam of pulses at least from the produced modified pulses; and

directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

2. The method of claim 1, wherein producing the light beam made up of pulses comprises:

producing a seed light beam made up of pulses; and

producing a light beam made up of amplified pulses by optically amplifying the pulses of the seed light beam by repeatedly passing the pulses of the seed light beam through a resonator.

3. The method of claim 2, wherein modulating the optical phase over the pulse duration of the pulse comprises modulating the optical phase over a pulse duration of an amplified pulse to produce the modified pulse.

4. The method of claim 2, wherein:

modulating the optical phase over the pulse duration of the pulse comprises modulating the optical phase over a pulse duration of a pulse of the seed light beam to produce the modified pulse; and

producing the light beam made up of amplified pulses comprises optically amplifying the modified pulses.

5. The method of claim 4, wherein directing the light beam of pulses formed from the modified pulses toward the substrate comprises directing the light beam made up of amplified pulses toward the substrate.

6. The method of claim 1, further comprising reducing a bandwidth of a pulse of the light beam before modulating the optical phase over the pulse duration of that pulse to produce the modified pulse,

wherein modulating the optical phase over the pulse duration of the pulse causes the bandwidth of the pulse to increase but remain within a range of a target bandwidth.

7. The method of claim 1, wherein modulating the optical phase over the pulse duration of a pulse to produce the modified pulse comprises convoluting the spectrum of an electric field of the pulse by a Fourier transform relating to modulating the optical phase over the pulse duration of the pulse.

8. The method of claim 1, wherein modulating the optical phase over the pulse duration of a pulse to produce the modified pulse thereby reduces a dynamic speckle contrast of the light beam of pulses directed toward the substrate.

9. The method of claim 1, further comprising increasing a duration of the pulses in the light beam directed toward the substrate,

wherein increasing the duration of the pulses in the light beam directed toward the substrate comprises:

splitting the amplitude of each pulse of the light beam into split portions,

introducing temporal delays among these split portions to produce temporally-delayed portions of the pulse, and

then recombining these temporally-delayed portions of the pulse to provide a temporally stretched pulse of the light beam.

10. The method of claim 9, wherein modulating the optical phase over the pulse duration of a pulse to produce the modified pulse comprises modulating the optical phase over the pulse duration of one or more split portions of the pulse.

11. The method of claim 1, wherein modulating the optical phase over the pulse duration of the pulse causes a bandwidth of the pulse of the light beam to increase.

12. The method of claim 1, further comprising selecting a range of frequencies at which the optical phase over the pulse duration of the pulse is modulated, wherein selecting the frequency range comprises:

determining a target frequency range that would produce a target bandwidth of the modified pulse; and

maintaining the frequency range within the determined target frequency range to thereby maintain the bandwidth of the modified pulse within a range of the target bandwidth.

13. The method of claim 12, further comprising measuring a bandwidth of the pulse prior to modulating the optical phase over the pulse duration of the pulse to determine whether the modified pulse would have a bandwidth that is within a range of the target bandwidth.

14. The method of claim 12, further comprising measuring a bandwidth of the modified pulse prior to modulating the optical phase over the pulse duration of the next pulse to determine whether the modified pulse has a bandwidth that is within a range of the target bandwidth.

15. The method of claim 14, further comprising calculating the target bandwidth for a particular next pulse based on the measured bandwidth of a plurality of previously-modified pulses.

16. The method of claim 12, wherein selecting the frequency range at which the optical phase over the pulse duration of a pulse is modulated comprises selecting the frequency range at which the optical phase over the pulse duration of a pulse is modulated for each pulse in the light beam.

17. The method of claim 1, wherein modulating the optical phase over the pulse duration of the pulse to produce the modified pulse comprises modulating a refractive index of a material through which the pulse is directed.

18. The method of claim 1, further comprising adjusting a bandwidth of the pulse that is directed toward the substrate by adjusting a rate at which the optical phase is modulated.

19. The method of claim 1, wherein modulating the optical phase over the pulse duration of the pulse to produce the modified pulse having the second temporal coherence defined by the second temporal coherence length that is less than the first temporal coherence length of the pulse for each pulse in the plurality of pulses in the light beam comprises modulating the optical phase over the pulse duration of the pulse to produce the modified pulse having the second temporal coherence defined by the second temporal coherence length that is less than the first temporal coherence length of the pulse for each pulse in the light beam.

20. The method of claim 1, further comprising:

estimating a bandwidth of the modified pulse;

determining whether the estimated bandwidth is within a range of a target bandwidth; and

if it is determined that the estimated bandwidth is outside the range of a target bandwidth, then adjusting a frequency range at which the optical phase is modulated to thereby adjust a bandwidth of the next modified pulse.

21. The method of claim 1, wherein modulating the optical phase over the pulse duration of a pulse comprises randomizing the optical phase over the pulse duration of the pulse.

22. The method of claim 1, wherein the optical pulse is associated with a waveform, the waveform being represented by points in time, and modulating the optical phase over the pulse duration of a pulse comprises applying a different temporal delay to different points of the waveform.

23. The method of claim 22, wherein applying a different temporal delay to different points of the waveform comprises passing the optical pulse through a medium and varying an index of refraction of the medium as the pulse passes through the medium.

24. The method of claim 1, wherein an amplitude of the modulation varies randomly over the pulse duration of the pulse.

25. The method of claim 1, wherein an amplitude of the modulation varies in a manner that reduces one or more of dynamic speckle and bandwidth of the light beam of pulses directed toward the substrate.

26. The method of claim 1, wherein each pulse has a first spatial coherence defined by a first spatial coherence length, the method further comprising reducing a spatial coherence of the pulse as it is being modulated such that the modified pulse has a second spatial coherence defined by a second spatial coherence length that is less than the first spatial coherence length of the pulse.

27. An apparatus comprising:

a light source configured to produce a light beam made up of pulses having a wavelength in a deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration;

a phase modulator system in a path of the light beam of pulses, configured to, for each pulse in a plurality of pulses in the light beam, modulate an optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length;

a measurement apparatus configured to measure a characteristic of a test pulse, wherein the test pulse is either a pulse having the first temporal coherence or the modified pulse having the second temporal coherence; and

a control system in communication with the measurement apparatus and the phase modulator system, the control system configured to;

receive the measured characteristic of the test pulse from the measurement apparatus;

determine whether a bandwidth of the modified pulse is within a range of a target bandwidth based on the received measured characteristic; and

if it is determined that the bandwidth of the modified pulse is outside the range of the target bandwidth, then adjust a frequency at which the optical phase over the pulse duration of the pulse that produces the modified pulse is modulated.

28. The apparatus of claim 27, further comprising a beam directing apparatus in the path of a light beam of pulses formed from the modified pulses, the beam directing apparatus configured to direct the light beam of pulses formed from the modified pulses toward a substrate within a lithography exposure apparatus;

wherein the phase modulator system is within the lithography exposure apparatus.

29. The apparatus of claim 28, wherein the phase modulator system includes a two-dimensional array of phase modulators positioned within a beam homogenizer.

30. The apparatus of claim 29, wherein the two-dimensional array of phase modulators is also configured to, for each pulse, reduce a spatial coherence of the pulse so that the modified pulse has a second spatial coherence that is less than the spatial coherence of the pulse.

31. The apparatus of claim 27, wherein the light source comprises:

a first stage light source configured to produce a seed light beam made up of pulses and including a spectral tuning apparatus for tuning one or more spectral features of the seed light beam, and

a second stage optical amplifier having a resonator with a gain medium, the optical amplifier configured to receive the pulses of the seed light beam and produce a light beam made up of amplified pulses.

32. The apparatus of claim 31, wherein the first stage light source configured to produce the seed light beam made up of pulses includes a solid state gain medium.

33. The apparatus of claim 31, wherein the phase modulator system is between the first stage light source and the second stage optical amplifier.

34. The apparatus of claim 27, wherein the test pulse is a modified pulse.

35. The apparatus of claim 27, wherein the control system is also in communication with the light source, and the control system is configured to, if it is determined that the bandwidth of the modified pulse falls outside the target bandwidth range, send a signal to the light source to adjust a bandwidth of the pulses.

36. The apparatus of claim 27, wherein the characteristic of the test pulse that is measured by the measurement apparatus is a bandwidth of the test pulse.

37. The apparatus of claim 27, further comprising an optical temporal pulse stretcher configured to increase a duration of the modified pulses.

38. The apparatus of claim 37, wherein the optical temporal pulse stretcher is a passive optical element.

39. The apparatus of claim 27, wherein:

the phase modulator system includes a Pockels cell including a medium through which the light beam of pulses passes; and

modulating the optical phase over the pulse duration of the pulse comprises modulating an index of refraction of the medium of the Pockels cell.

40. The apparatus of claim 27, wherein the phase modulator system includes a single phase modulator.

41. The apparatus of claim 27, wherein the phase modulator system is configured to, for each pulse in the light beam, modulate the optical phase over the pulse duration of the pulse to produce the modified pulse having the second temporal coherence defined by the second temporal coherence length that is less than the first temporal coherence length.

42. An apparatus comprising:

a phase modulator system in a path of a light beam of pulses having a wavelength in a deep ultraviolet range, the phase modulator system is configured to, for each pulse in a plurality of pulses of the light beam, modulate an optical phase over a pulse duration of the pulse to produce a modified pulse having a second temporal coherence length that is less than a first temporal coherence length of the pulse before it has been modulated;

a measurement apparatus configured to measure a characteristic of a test pulse, wherein the test pulse is either a pulse having the first temporal coherence or the modified pulse having the second temporal coherence; and

a control system in communication with the measurement apparatus and the phase modulator system, the control system configured to;

receive the measured characteristic of the test pulse from the measurement apparatus;

determine whether a bandwidth of the modified pulse is within a range of a target bandwidth based on the received measured characteristic; and

if it is determined that the bandwidth of the modified pulse is outside the range of the target bandwidth, then adjust a frequency at which the optical phase over the pulse duration of the pulse that produces the modified pulse is modulated.