Ion filter and method of manufacturing ion filter
First Claim
1. An ion filter used for a gas detector that comprises a gas electron multiplier, the ion filter comprising:
- an insulating substrate;
a first patterned conductive layer formed on one main surface of the insulating substrate; and
a second patterned conductive layer formed on another main surface of the insulating substrate, whereinthe ion filter has a plurality of through-holes formed along a thickness direction of the insulating substrate on which the first patterned conductive layer and the second patterned conductive layer are formed,the one main surface of the insulating substrate is disposed on an upstream side in a movement direction of electrons in the gas detector,the other main surface of the insulating substrate is disposed on a downstream side in the movement direction of the electrons in the gas detector, andthe first patterned conductive layer has a line width thicker than a line width of the second patterned conductive layer.
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Abstract
An ion filter is used for a gas detector including a gas electron multiplier. The ion filter includes: an insulating substrate; a first patterned conductive layer on one main surface of the insulating substrate; and a second patterned conductive layer on another main surface of the insulating substrate. The ion filter has a plurality of through-holes formed along a thickness direction of the insulating substrate on which the first patterned conductive layer and the second patterned conductive layer are formed. The one main surface of the insulating substrate is disposed on an upstream side in a movement direction of electrons in the gas detector. The other main surface of the insulating substrate is disposed on a downstream side in the movement direction of the electrons in the gas detector. The first patterned conductive layer has a line width thicker than a line width of the second patterned conductive layer.
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Citations
9 Claims
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1. An ion filter used for a gas detector that comprises a gas electron multiplier, the ion filter comprising:
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an insulating substrate; a first patterned conductive layer formed on one main surface of the insulating substrate; and a second patterned conductive layer formed on another main surface of the insulating substrate, wherein the ion filter has a plurality of through-holes formed along a thickness direction of the insulating substrate on which the first patterned conductive layer and the second patterned conductive layer are formed, the one main surface of the insulating substrate is disposed on an upstream side in a movement direction of electrons in the gas detector, the other main surface of the insulating substrate is disposed on a downstream side in the movement direction of the electrons in the gas detector, and the first patterned conductive layer has a line width thicker than a line width of the second patterned conductive layer. - View Dependent Claims (2, 3, 4, 5, 7, 8, 9)
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6. A method of manufacturing an ion filter, the method comprising:
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forming a first conductive layer on one main surface of an insulating substrate and a second conductive layer on another main surface of the insulating substrate; making an etching liquid act on a second predetermined region of the second conductive layer to remove the second predetermined region thereby to form a second patterned conductive layer having a predetermined second line width; irradiating a formation region of the second patterned conductive layer and an outside region of an end part of the second patterned conductive layer with laser from the other main surface side; and making an etching liquid act on the first conductive layer at least from the other main surface side thereby to remove a first predetermined region to form a first patterned conductive layer having a predetermined first line width thicker than the second line width and remove the first conductive layer in the outside region of the end part.
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Specification