Fine-scale interconnect with micro-air bridge

• US 10,453,778 B1
• Filed: 08/09/2017
• Issued: 10/22/2019
• Est. Priority Date: 08/09/2017
• Status: Active Grant

• Current Assignee: META Platforms Technologies LLC (Meta Platforms, Inc. (f/k/a Facebook, Inc.))
• Original Assignee: Facebook Technologies, LLC (Meta Platforms, Inc. (f/k/a Facebook, Inc.))
• Inventors: Holmes, Stephen John
• Primary Examiner(s): Luu, Chuong A
• Application Number:
  US15/673,267
• Time in Patent Office: 804 Days
• Field of Search: 257 93
• CPC Class Codes: H01L 21/76885 By forming conductive members before deposition of protective insulating material, e.g. pillars, studs
• CPC Class Codes: H01L 23/4821 Bridge structure with air gap
• CPC Class Codes: H01L 23/5221 Crossover interconnections
• CPC Class Codes: H01L 27/156 two-dimensional arrays
• CPC Class Codes: H01L 2933/0066 relating to arrangements for conducting electric current to or from the semiconductor body
• CPC Class Codes: H01L 33/62 Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls

Abstract

Structures of and methods for fabricating fine-scale interconnects are disclosed. A “mushroom”-type structure with a narrow stalk supporting a wider cap can be used for fine-scale interconnects with widths on the scale of hundreds of nanometers that have low resistivity. Micro-air bridges can be introduced by omitting the stalk in sections of the interconnect, allowing the interconnect to bridge over obstacles.

Claims

1. An interconnect on a substrate comprising:

a first section comprising a first stalk segment on the substrate and a first cap segment coupled to a distal end of the first stalk segment, away from the substrate, the first stalk segment having a first width and the first cap segment having a second width, the first width narrower than the second width along a lateral direction parallel to a surface of the substrate;

a second section comprising a second cap segment laterally displaced from the first cap segment along the lateral direction and connected to the first cap segment at a first end of the second cap segment; and

a third section comprising a second stalk segment on the substrate and a third cap segment coupled to a distal end of the second stalk segment, away from the substrate, one end of the third cap segment laterally displaced from the second cap segment along the lateral direction and connected to a second end of the second cap segment, the second stalk segment having the first width and the third cap segment having the second width;

wherein the second cap segment is suspended between the first cap segment and the third cap segment with a layer of air separating the second cap segment from the substrate.

2. The interconnect of claim 1, wherein the first stalk segment is connected to a first electrical contact and unconnected to a second electrical contact, and the third stalk segment is connected to the second electrical contact and unconnected to the first electrical contact.

3. The interconnect of claim 2, wherein the first electrical contact and the second electrical contact are connected to a light-emitting diode.

4. The interconnect of claim 1, wherein the second section of the interconnect passes over an electrical contact on the substrate, the interconnect electrically isolated from the electrical contact.

5. The interconnect of claim 4, wherein a layer of air exists between the electrical contact and the interconnect.

9. The interconnect of claim 1, wherein the second cap is displaced from the substrate by a first distance and wherein the first and the third caps are displaced from the substrate by a second distance less than the first distance.

10. The interconnect of claim 1, further comprising an obstacle element coupled to the substrate, the obstacle element passing through the layer of air between the second cap segment and the substrate without physically contacting the second cap segment.

11. The interconnect of claim 1, wherein each of the first cap segment and the third cap segment has a base surface proximal to the substrate and a distal surface that is distal to the substrate, wherein the base surface is wider than the distal surface for each of the first cap segment and the third cap segment.

6. A circuit comprising:

a first electrical contact on a substrate;

a second electrical contact on the substrate;

a third electrical contact on the substrate between the first electrical contact and the second electrical contact; and

an interconnect connecting the first electrical contact and the second electrical contact and electrically isolated from the third electrical contact, the interconnect comprising;

a first section comprising a first stalk segment on the substrate and a first cap segment coupled to a distal end of the first stalk segment, away from the substrate, the first stalk segment having a first width and the first cap segment having a second width, the first width narrower than the second width along a lateral direction parallel to a surface of the substrate;

a second section comprising a second cap segment laterally displaced from the first cap segment along the lateral direction and connected to the first cap segment at a first end of the second cap segment, the second section overlapping the third electrical contact; and

a third section comprising a second stalk segment on the substrate and a third cap segment coupled to a distal end the second stalk segment, one end of the third cap segment laterally displaced from the second cap segment along the lateral direction and connected to a second end of the second cap segment, the second stalk segment having the first width and the third cap segment having the second width,

wherein the second cap segment is suspended between the first cap segment and the third cap segment with a layer of air separating the second cap segment from the third electrical contact and the substrate.

7. The circuit of claim 6, wherein the first electrical contact and the second electrical contact are connected to a first light-emitting diode.

8. The circuit of claim 7, wherein the third electrical contact is connected to a second light-emitting diode that is controlled independently from the first light-emitting diode.

12. The circuit of claim 6, wherein the second cap is displaced from the substrate by a first distance and wherein the first and the third caps are displaced from the substrate by a second distance less than the first distance, and wherein the circuit further comprises an obstacle element coupled to the third electrical contact, the obstacle element passing into the layer of air between the substrate and the second cap segment without physically contacting the second cap segment.

13. The circuit of claim 6, wherein each of the first cap segment and the third cap segment has a base surface proximal to the substrate and a distal surface that is distal to the substrate, wherein the base surface is wider than the distal surface for each of the first cap segment and the third cap segment.