Anisotropic piezoelectric device, system, and method

• US 10,454,019 B2
• Filed: 09/29/2016
• Issued: 10/22/2019
• Est. Priority Date: 09/29/2016
• Status: Active Grant

• Current Assignee: The Boeing Co.
• Original Assignee: The Boeing Co.
• Inventors: Humfeld, Keith D., Safai, Morteza
• Primary Examiner(s): Gordon, Bryan P
• Application Number:
  US15/280,096
• Publication Number:
  US 20180090669A1
• Time in Patent Office: 1,118 Days
• CPC Class Codes: B82B 3/0004 Apparatus specially adapted for the manufacture or treatment of nanostructural devices or systems or methods for manufacturing the same
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 32/162 characterised by catalysts
• CPC Class Codes: C23C 16/0281 of metallic sub-layers C23C16/029 takes precedence
• CPC Class Codes: C23C 16/507 using external electrodes, e.g. in tunnel type reactors
• CPC Class Codes: H01J 37/32568 Relative arrangement or disposition of electrodes; moving means
• CPC Class Codes: H01J 37/32587 Triode systems
• CPC Class Codes: H10N 30/074 by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
• CPC Class Codes: H10N 30/076 by vapour phase deposition
• CPC Class Codes: H10N 30/857 Macromolecular compositions

Abstract

A micro electromechanical (mem) device includes a first electrode, a second electrode, and a shaped carbon nanotube with a first end and a second end. The first end of the shaped carbon nanotube is conductively connected to the first electrode and the second end is conductively connected to the second electrode. A system for making the device includes a plurality of electrodes placed outside the growth region of a furnace to produce a controlled, time-varying electric field. A controller for the system is connected to a power supply to deliver controlled voltages to the electrodes to produce the electric field. A mixture of gases is passed through the furnace with the temperature raised to cause chemical vapor deposition (CVD) of carbon on a catalyst. The sequentially time-varying electric field parameterizes a growing nanotube into a predetermined shape.

Claims

1. A micro electromechanical (mem) device comprising:

a first substrate;

a second substrate separate from the first substrate;

a first electrode attached to the first substrate;

a second electrode attached to the second substrate; and

a shaped carbon nanotube with a first end and a second end;

wherein the first end is conductively connected to the first electrode and the second end is conductively connected to the second electrode and wherein the shaped carbon nanotube is disposed between the first substrate and the second substrate and the second substrate is movable relative to the first substrate.

2. The mem device of claim 1 further comprising:

a power supply connected to the first electrode and the second electrode, the power supply configurable to deliver an electrical current through the first electrode, the shaped carbon nanotube and the second electrode over a range of voltage and frequency; and

a controller connected to the power supply to configure and control the power supply;

wherein the first electrode is rigidly attached to the first substrate and the second electrode is flexibly attached to the second substrate so that the second substrate is movable relative to the first substrate.

3. The mem device of claim 1 further comprising:

a power supply connected to the first electrode and the second electrode;

a controller connected to the power supply; and

a sensor connected to the first electrode and the second electrode, the sensor being configured to detect an electrical current between the first electrode and the second electrode over a predetermined range of voltage and frequency;

wherein the first electrode is rigidly attached to the first substrate and the second electrode is flexibly attached to the second substrate.

4. The mem device of claim 1 wherein the shaped carbon nanotube has a shape comprising a spiral.

5. The mem device of claim 4 wherein the shaped carbon nanotube comprises a plurality of shaped carbon nanotubes connected in parallel between the first electrode and the second electrode.

6. The mem device of claim 4 wherein the shaped carbon nanotube comprises a plurality of shaped carbon nanotubes connected in series between the first electrode and the second electrode.

7. The mem device of claim 1, wherein the first electrode comprises a conductive path formed in or on the first substrate and the second electrode comprises a conductive path formed in or on the second substrate.

8. The mem device of claim 1, further comprising:

a third substrate;

a third electrode attached to the third substrate; and

wherein the shaped carbon nanotube comprises a first shaped carbon nanotube conductively connected between the first electrode and the second electrode and a second shaped carbon nanotube conductively connected between the second electrode and the third electrode.

9. The mem device of claim 8, wherein the mem device is configured for active noise cancellation.

10. The mem device of claim 1, further comprising:

a third substrate;

a third electrode attached to the third substrate; and

wherein the shaped carbon nanotube comprises a first plurality of shaped carbon nanotubes conductively connected in series between the first electrode and the second electrode and a second plurality of shaped carbon nanotube conductively connected in series between the second electrode and the third electrode.

11. The mem device of claim 1, wherein the shaped carbon nanotube comprises:

a first plurality of shaped carbon nanotubes conductively connected in series between the first electrode and the second electrode; and

a second plurality of shaped carbon nanotubes conductively connected in series between the first electrode and the second electrode, wherein the first plurality of shaped carbon nanotubes is connected in parallel with the second plurality of shaped carbon nanotubes between the first substrate and the second substrate.

12. The mem device of claim 11, further comprising:

a power supply connected to the first electrode and the second electrode; and

a controller connected to the power supply, wherein the controller is configured to receive vibration information from a vibration sensor and apply a current to the mem device to perform active vibration cancellation.

13. The mem device of claim 11, further comprising:

a power supply connected to the first electrode and the second electrode;

a controller connected to the power supply; and

a sensor connected to the first electrode and the second electrode, the sensor being configured to detect an electrical current between the first electrode and the second electrode over a predetermined range of voltage and frequency;

wherein the first electrode is rigidly attached to the first substrate and the second electrode is flexibly attached to the second substrate so that the second substrate is movable relative to the first substrate.

14. The mem device of claim 1, wherein the shaped carbon nanotube is grown from one or more catalyst particles in a furnace, the furnace comprising a growth region for carbon nanotubes and the furnace being configured to permit establishment of a controlled, time-varying electric field within the growth region.

15. The mem device of claim 1, wherein the mem device is produced by a system, the system comprising:

a furnace including a growth region for carbon nanotubes, the furnace being configured to permit establishment of a controlled, time-varying electric field within the growth region;

a plurality of electrodes placed outside the growth region to produce the controlled, time-varying electric field;

a power supply connected to the plurality of electrodes; and

a controller connected to the power supply to control the power supply to deliver controlled voltages to the electrodes to cause the electrodes to produce the controlled time-varying electric field.

16. The mem device of claim 15, wherein the plurality of electrodes further comprises three electrode pairs positioned and aligned to produce the time-varying electric field comprising three independent, orthogonal, time-varying electric fields.

17. The mem device of claim 16, wherein the furnace is configured to allow passage of gasses into and out of the growth region to enable chemical vapor deposition (CVD) growth of the carbon nanotubes.

18. The mem device of claim 17, wherein the furnace comprises a tube furnace.

19. The mem device of claim 18, wherein the three electrode pairs further comprise:

a first electrode pair further comprising two electrodes parallel to an axis of the tube furnace and centered above and below the growth region;

a second electrode pair further comprising two electrodes parallel to each other placed in front of and in back of the growth region, between the two electrodes of the first electrode pair, and at an angle relative to the axis of the tube furnace; and

a third electrode pair further comprising two electrodes parallel to each other placed in front of and in back of the growth region, between the two electrodes of the first electrode pair, at an angle relative to the axis of the tube furnace, and at an angle relative to the two electrodes of the second electrode pair.

20. The mem device of claim 19, wherein a mixture of gases is passed through the furnace, the mixture of gases is tailored to cause chemical vapor deposition (CVD) of carbon on a catalyst.

21. The mem device of claim 20, wherein a time-varying electric field is controlled within the growth region to parameterize a growing nanotube into a predetermined shape.

22. The mem device of claim 21, wherein the predetermined shape comprises a spiral.