Semiconductor device and method of manufacturing same

• US 10,454,059 B2
• Filed: 11/28/2017
• Issued: 10/22/2019
• Est. Priority Date: 04/24/2002
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Seo, Satoshi, Kuwabara, Hideaki
• Primary Examiner(s): Trinh, Hoa B
• Application Number:
  US15/824,644
• Publication Number:
  US 20180145275A1
• Time in Patent Office: 693 Days
• CPC Class Codes: G01J 1/4228 arrangements with two or more detectors, e.g. for sensitivity compensation
• CPC Class Codes: H01L 25/167 comprising optoelectronic devices, e.g. LED, photodiodes
• CPC Class Codes: H01L 33/0041 characterised by field-effect operation
• CPC Class Codes: H10K 2102/3026 Top emission
• CPC Class Codes: H10K 50/81 Anodes
• CPC Class Codes: H10K 50/813 characterised by their shape
• CPC Class Codes: H10K 50/818 Reflective anodes, e.g. ITO combined with thick metallic layers
• CPC Class Codes: H10K 50/82 Cathodes
• CPC Class Codes: H10K 50/824 combined with auxiliary electrodes
• CPC Class Codes: H10K 50/828 Transparent cathodes, e.g. comprising thin metal layers
• CPC Class Codes: H10K 50/841 Self-supporting sealing arrangements
• CPC Class Codes: H10K 50/856 comprising reflective means
• CPC Class Codes: H10K 50/87 Arrangements for heating or cooling
• CPC Class Codes: H10K 59/12 Active-matrix OLED [AMOLED] displays
• CPC Class Codes: H10K 59/1201 Manufacture or treatment
• CPC Class Codes: H10K 59/1213 the pixel elements being TFTs
• CPC Class Codes: H10K 59/122 Pixel-defining structures or layers, e.g. banks
• CPC Class Codes: H10K 59/124 Insulating layers formed between TFT elements and OLED elements
• CPC Class Codes: H10K 59/131 Interconnections, e.g. wiring lines or terminals
• CPC Class Codes: H10K 59/30 Devices specially adapted for multicolour light emission
• CPC Class Codes: H10K 59/35 : comprising red-green-blue [RGB] subpixels
• CPC Class Codes: H10K 59/38 : comprising colour filters or colour changing media [CCM]
• CPC Class Codes: H10K 71/00 : Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 77/10 : Substrates, e.g. flexible substrates
• CPC Class Codes: Y02E 10/549 : Organic PV cells
• CPC Class Codes: Y02P 70/50 : Manufacturing or production processes characterised by the final manufactured product

Abstract

A FET is formed on a semiconductor substrate, a curved surface having a radius of curvature is formed on an upper end of an insulation, a portion of a first electrode is exposed corresponding to the curved surface to form an inclined surface, and a region defining a luminescent region is subjected to etching to expose the first electrode. Luminescence emitted from an organic chemical compound layer is reflected by the inclined surface of the first electrode to increase a total quantity of luminescence taken out in a certain direction.

Claims

1. a display device comprising:

a pixel portion comprising;

a single crystal semiconductor substrate;

a transistor comprising a source region and a drain region, each of the source region and the drain region in the single crystal semiconductor substrate;

an interlayer insulating film over the transistor;

a first conductive layer over the interlayer insulating film and in contact with one of the source region and the drain region of the transistor, the first conductive layer comprising titanium;

a second conductive layer over and in contact with the first conductive layer, a material of the second conductive layer being a first compound;

a third conductive layer over and electrically connected to the second conductive layer, a material of the third conductive layer comprising one of aluminum and silver;

a fourth conductive layer over and in contact with the third conductive layer, a material of the fourth conductive layer being a second compound;

an insulation over the interlayer insulating film and the first conductive layer, the insulation comprising an opening having an inclined surface;

an organic chemical compound layer over the insulation and the second conductive layer; and

a fifth conductive layer over the organic chemical compound layer, the fifth conductive layer having a transparent property,

wherein the first compound comprises a first metal element, and

wherein the second compound comprises a second metal element.

2. The display device according to claim 1, further comprising a sealing material over the fifth conductive layer.

3. The display device according to claim 2, further comprising a substrate over the sealing material.

4. The display device according to claim 3, wherein the substrate is a glass substrate.

5. The display device according to claim 1, further comprising a color filter over the opening of the insulation.

6. The display device according to claim 1, wherein the organic chemical compound layer is capable to have emissions of red, green and blue.

7. The display device according to claim 6, wherein the organic chemical compound layer is capable to emit white light including the emissions of red, green and blue.

8. The display device according to claim 6, wherein the pixel portion comprises three light-emitting elements of emitting red, green and blue light.

9. a display device comprising:

a pixel portion comprising;

a single crystal semiconductor substrate;

a transistor comprising a source region and a drain region, each of the source region and the drain region in the single crystal semiconductor substrate;

an interlayer insulating film over the transistor;

a first conductive layer over the interlayer insulating film and in contact with one of the source region and the drain region of the transistor, the first conductive layer comprising titanium;

a second conductive layer over and in contact with the first conductive layer, a material of the second conductive layer being a first compound;

a third conductive layer over and electrically connected to the second conductive layer, a material of the third conductive layer comprising one of aluminum and silver;

a fourth conductive layer over and in contact with the third conductive layer, a material of the fourth conductive layer being a second compound;

an insulation over the interlayer insulating film and the first conductive layer, the insulation comprising an opening having an inclined surface;

an organic chemical compound layer over the insulation and the second conductive layer; and

a fifth conductive layer over the organic chemical compound layer, the fifth conductive layer having a transparent property,

wherein the organic chemical compound layer is in direct contact with the second conductive layer and the fourth conductive layer in the pixel portion,

wherein the first compound comprises a first metal element, and

wherein the second compound comprises a second metal element.

10. The display device according to claim 9, further comprising a sealing material over the fifth conductive layer.

11. The display device according to claim 10, further comprising a substrate over the sealing material.

12. The display device according to claim 11, wherein the substrate is a glass substrate.

13. The display device according to claim 9, further comprising a color filter over the opening of the insulation.

14. The display device according to claim 9, wherein the organic chemical compound layer is capable to have emissions of red, green and blue.

15. The display device according to claim 14, wherein the organic chemical compound layer is capable to emit white light including the emissions of red, green and blue.

16. The display device according to claim 14, wherein the pixel portion comprises three light-emitting elements of emitting red, green and blue light.

17. The display device according to claim 9, wherein the fourth conductive layer comprises an edge portion in the opening of the insulation.