Method and apparatus for purifying target material for EUV light source

• US 10,455,680 B2
• Filed: 02/29/2016
• Issued: 10/22/2019
• Est. Priority Date: 02/29/2016
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Vaschenko, Georgiy, Baumgart, Peter, Rajyaguru, Chirag, Sams, Benjamin, Ridinger, Armin, Kardokus, Janine
• Primary Examiner(s): Kastler, Scott R
• Assistant Examiner(s): Aboagye, Michael
• Application Number:
  US15/057,086
• Publication Number:
  US 20170247778A1
• Time in Patent Office: 1,331 Days
• Field of Search: 266210
• CPC Class Codes: C22B 25/08 Refining
• CPC Class Codes: C22B 9/04 Refining by applying a vacuum
• CPC Class Codes: F27B 17/00 Furnaces of a kind not covered by any preceding group structural combinations of furnaces F27B19/02
• CPC Class Codes: F27B 17/02 specially designed for laboratory use
• CPC Class Codes: H05G 2/005 containing a metal as principal radiation generating component
• CPC Class Codes: H05G 2/008 involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Abstract

A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.

Claims

1. A system, comprising:

a furnace having a central region defined therein and at least one heater configured to heat the central region in a substantially uniform manner;

a vessel having an open end for loading a target material, such that when inserted in the central region of the furnace, the open end of the vessel is located outside of the furnace;

a crucible having an open end disposed within the vessel, the crucible being disposed within the vessel such that the open end of the crucible faces the open end of the vessel;

a closure device covering the open end of the vessel, the closure device configured to form a seal having vacuum and pressure capability;

a gas input tube having a first end located outside the vessel and a second end located inside the vessel, the second end of the gas input tube being positioned such that an input gas flowing into the vessel through the input tube is directed into the crucible;

a gas exhaust tube having a first end located outside the vessel and a second end in flow communication with an inside of the vessel;

a vacuum port having a first end located outside the vessel and a second end in flow communication with the inside of the vessel;

a gas supply network coupled in flow communication with the first end of the gas input tube;

a gas exhaust network coupled in flow communication with the first end of the gas exhaust tube; and

a vacuum network coupled in flow communication with the first end of the vacuum port.

2. The system of claim 1, wherein the vessel is a metal vessel.

3. The system of claim 2, wherein the metal vessel is comprised of stainless steel or an alloy steel.

4. The system of claim 2, wherein an outer surface of the vessel is coated with an oxidation-resistant material.

5. The system of claim 1, wherein the gas supply network comprises a gas supply containing hydrogen and a gas purifier.

6. The system of claim 5, wherein the gas supply contains a gas mixture of argon and hydrogen.

7. The system of claim 6, wherein the gas mixture of argon and hydrogen includes up to 2.93 molar % hydrogen and the balance substantially argon.

8. The system of claim 1, wherein the gas exhaust network comprises at least one flow controller and a cavity ring-down spectrometer (CRDS).

9. The system of claim 1, wherein the vacuum network comprises at least one vacuum generating device capable of generating high vacuum and at least one vacuum gauge.

10. The apparatus as claimed in claim 1, wherein in use the crucible is rotated with respect to horizontal.

11. The apparatus as claimed in claim 1, wherein in use the crucible is rotated about 12 degrees with respect to horizontal.

12. An apparatus adapted to purify target material, the apparatus comprising:

a furnace having a central region defined therein and at least one heater configured to heat the central region in a substantially uniform manner;

a vessel having an open end for loading, such that when inserted in the central region of the furnace, the open end of the vessel is located outside of the furnace;

a crucible disposed within the metal vessel, the crucible having an open end and a closed end, the crucible disposed within the metal vessel such that the open end of the crucible faces the open end of the metal vessel, a sidewall of the crucible having a tapered shape that facilitates removal of an ingot of the target material from the crucible;

a closure device covering the open end of the metal vessel, the closure device configured to form a seal having vacuum and pressure capability;

an input tube having a first end located outside the vessel and a second end located inside the vessel, the second end of the input tube being positioned to direct an input gas flowing into the vessel through the input tube toward the crucible; and

an exhaust tube having a first end located outside the metal vessel and a second end in flow communication with the inside of the metal vessel.

13. The apparatus of claim 12, wherein the crucible is a quartz crucible purified and cleaned to a level compatible with compound semiconductor crystal growth.

14. The apparatus of claim 12, wherein the crucible is comprised of carbon coated quartz, glassy carbon, graphite, glassy carbon coated graphite, or SiC-coated graphite.

15. The apparatus of claim 12, wherein the input tube is a metal tube or a glass tube.

16. The apparatus of claim 12, wherein the input tube is a ceramic tube or a graphite tube.

17. The apparatus of claim 12, further comprising:

a vacuum port defined in a wall of the metal vessel.