Cryopump

• US 10,456,706 B2
• Filed: 06/11/2014
• Issued: 10/29/2019
• Est. Priority Date: 06/14/2013
• Status: Active Grant

• Current Assignee: Sumitomo Heavy Industries Limited
• Original Assignee: Sumitomo Heavy Industries Limited
• Inventors: Oikawa, Ken
• Primary Examiner(s): Pettitt, III, John F
• Application Number:
  US14/301,719
• Publication Number:
  US 20140366562A1
• Time in Patent Office: 1,966 Days
• Field of Search: 62 555
• CPC Class Codes: B01D 8/00 Cold traps; Cold baffles pumps for evacuating by condensing or freezing F04B37/08
• CPC Class Codes: F04B 37/08 by condensing or freezing, e.g. cryogenic pumps

Abstract

A cryopump includes a cryopump including: a refrigerator; a first cryopanel including a radiation shield; and a second cryopanel enclosed by the first cryopanel and cooled to a lower temperature than that of the first cryopanel. The radiation shield includes an attaching pedestal located lateral to the second cryopanel for attachment of the refrigerator to the radiation shield, and a shield portion adjacent to the attaching pedestal and enclosing the second cryopanel. A lateral gap is formed between the second cryopanel and the attaching pedestal. A gap part continuing into the lateral gap is formed between the second cryopanel and the shield portion. The second cryopanel is shaped and/or located such that the lateral gap is comparable in width to the gap part.

Claims

1. A cryopump comprising:

a refrigerator orthogonally intersecting a central axis of the cryopump, the refrigerator comprising a first stage and a second stage cooled to a lower temperature than that of the first stage, the first stage and the second stage arranged in a refrigerator longitudinal direction being perpendicular to the central axis of the cryopump;

a first cryopanel comprising a radiation shield having a main opening and an inlet cryopanel disposed at the main opening, the first cryopanel thermally connected to the first stage;

a second cryopanel enclosed by the first cryopanel and thermally connected to the second stage, the second cryopanel comprising a plurality of cryopanels arranged along the central axis of the cryopump, the plurality of cryopanels including a top cryopanel facing the inlet cryopanel and arranged closest to the inlet cryopanel in the plurality of the cryopanels;

an attaching pedestal forming part of the radiation shield and arranged to attach the first stage of the refrigerator, the attaching pedestal located lateral to the top cryopanel in the refrigerator longitudinal direction; and

a shield portion forming part of the radiation shield and circumferentially adjoining the attaching pedestal so as to surround the top cryopanel,

wherein the top cryopanel extends perpendicularly to the central axis of the cryopump and is positioned at a top-cryopanel axial height,

wherein between the top cryopanel and the attaching pedestal is formed a lateral gap at the top-cryopanel axial height, and between the top cryopanel and the shield portion is formed a gap part at the top-cryopanel axial height, the lateral gap and the gap part in combination forming an annular gap between the top cryopanel and the radiation shield, and

wherein the top cryopanel comprises a cut-out portion at the top-cryopanel axial height, the cut-out portion is formed such that the lateral gap is equal in width to the gap part.

2. The cryopump according to claim 1, wherein

the top cryopanel comprises a front face opposed to the inlet cryopanel, the front face comprising a central region and an outside region surrounding the central region, and

the inlet cryopanel comprises a gas passing region through which gases pass to be condensed on the top cryopanel and a gas shielding region, the gas passing region is opposed to the outside region while the gas shielding region is opposed to the central region.

3. The cryopump according to claim 2, wherein

the gas passing region comprises a plate portion having a multitude of pores.

4. A cryopump comprising:

a refrigerator orthogonally intersecting a central axis of the cryopump, the refrigerator comprising a first stage and a second stage cooled to a lower temperature than that of the first stage, the first stage and the second stage arranged in a refrigerator longitudinal direction being perpendicular to the central axis of the cryopump;

a first cryopanel comprising a radiation shield having a main opening and an inlet cryopanel disposed at the main opening, the first cryopanel thermally connected to the first stage;

a second cryopanel enclosed by the first cryopanel and thermally connected to the second stage, the second cryopanel comprising a plurality of cryopanels arranged along the central axis of the cryopump, the plurality of cryopanels including a top cryopanel facing the inlet cryopanel and arranged closest to the inlet cryopanel in the plurality of the cryopanels;

an attaching pedestal forming part of the radiation shield and arranged to attach the first stage of the refrigerator, the attaching pedestal located lateral to the top cryopanel in the refrigerator longitudinal direction; and

a shield portion forming part of the radiation shield and circumferentially adjoining the attaching pedestal so as to surround the top cryopanel,

wherein the top cryopanel extends perpendicularly to the central axis of the cryopump and is positioned at a top-cryopanel axial height,

wherein between the top cryopanel and the attaching pedestal is formed a lateral gap at the top-cryopanel axial height, and between the top cryopanel and the shield portion is formed a gap part at the top-cryopanel axial height, the lateral gap and the gap part in combination forming an annular gap between the top cryopanel and the radiation shield, and

wherein the top cryopanel comprises a cut-out portion at the top-cryopanel axial height, the cut-out portion formed is such that the lateral gap is equal in width to the gap part,

wherein, as viewed along the central axis of the cryopump, the cut-out portion forms a chord located at the top-cryopanel axial height adjacent to the attaching pedestal to form the lateral gap between the chord and the attaching pedestal.

5. A cryopump comprising:

a refrigerator orthogonally intersecting a central axis of the cryopump, the refrigerator comprising a first stage and a second stage cooled to a lower temperature than that of the first stage, the first stage and the second stage arranged in a refrigerator longitudinal direction being perpendicular to the central axis of the cryopump;

a first cryopanel comprising a radiation shield having a main opening and an inlet cryopanel disposed at the main opening, the first cryopanel thermally connected to the first stage;

a second cryopanel enclosed by the first cryopanel and thermally connected to the second stage, the second cryopanel comprising a plurality of cryopanels arranged along the central axis of the cryopump, the plurality of cryopanels including a top cryopanel facing the inlet cryopanel and arranged closest to the inlet cryopanel in the plurality of the cryopanels;

an attaching pedestal forming part of the radiation shield and arranged to attach the first stage of the refrigerator, the attaching pedestal located lateral to the top cryopanel in the refrigerator longitudinal direction; and

a shield portion forming part of the radiation shield and circumferentially adjoining the attaching pedestal so as to surround the top cryopanel,

wherein the top cryopanel extends perpendicularly to the central axis of the cryopump and is positioned at a top-cryopanel axial height,

wherein between the top cryopanel and the attaching pedestal is formed a lateral gap at the top-cryopanel axial height, and between the top cryopanel and the shield portion is formed a gap part at the top-cryopanel axial height, the lateral gap and the gap part in combination forming an annular gap between the top cryopanel and the radiation shield, and

wherein the top cryopanel comprises a cut-out portion at the top-cryopanel axial height, the cut-out portion formed is such that the lateral gap is equal in width to the gap part,

wherein, the lateral gap is formed between the cut-out portion of the top cryopanel and the attaching pedestal and the gap part is formed between a remaining portion of the top cryopanel and the shield portion,

as viewed along the central axis of the cryopump, the cut-out portion and the remaining portion of the top cryopanel form a first top cryopanel outline and a second top cryopanel outline, respectively, and the attaching pedestal and the shield portion form an attaching pedestal outline and a shield portion outline, respectively,

the lateral gap having a first constant width is defined along and between the first top cryopanel outline and the attaching pedestal outline,

the gap part having a second constant width is defined along and between the second top cryopanel outline and the shield portion outline, the second constant width being equal to the first constant width at the top-cryopanel axial height.

6. The cryopump according to claim 5, wherein

the first top cryopanel outline and the attaching pedestal outline are straight lines and the second top cryopanel outline and the shield portion outline are arcs.