Method for treating a semiconductor device

• US 10,456,814 B2
• Filed: 11/06/2018
• Issued: 10/29/2019
• Est. Priority Date: 03/26/2015
• Status: Active Grant

• Current Assignee: Life Technologies Corporation (Thermo Fisher Scientific Incorporated)
• Original Assignee: Life Technologies Corporation (Thermo Fisher Scientific Incorporated)
• Inventors: Ball, James A., Waggoner, Phil, Parker, Scott
• Primary Examiner(s): Carrillo, Sharidan
• Application Number:
  US16/182,429
• Publication Number:
  US 20190070640A1
• Time in Patent Office: 357 Days
• CPC Class Codes: B05D 3/00 Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials successively applying liquids or other fluent materials B05D1/36; drying ovens F26B
• CPC Class Codes: B05D 5/12 to obtain a coating with specific electrical properties
• CPC Class Codes: B08B 3/08 the liquid having chemical or dissolving effect substances used, see the relevant classes
• CPC Class Codes: B08B 9/08 Cleaning containers, e.g. tanks
• CPC Class Codes: C11D 1/22 derived from aromatic compounds
• CPC Class Codes: C11D 2111/22 Electronic devices, e.g. PCBs or semiconductors
• CPC Class Codes: C11D 3/162 containing Si
• CPC Class Codes: C11D 3/3418 Toluene -, xylene -, cumene -, benzene - or naphthalene sulfonates or sulfates
• CPC Class Codes: C11D 3/43 Solvents
• CPC Class Codes: C11D 7/34 containing sulfur
• CPC Class Codes: C11D 7/5013 containing nitrogen
• CPC Class Codes: C11D 7/5022 containing oxygen
• CPC Class Codes: G01N 27/414 Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
• CPC Class Codes: G01N 27/4145 specially adapted for biomolecules, e.g. gate electrode with immobilised receptors
• CPC Class Codes: G01N 27/4148 Integrated circuits therefor, e.g. fabricated by CMOS processing CMOS processing per se H01L21/82
• CPC Class Codes: H01L 21/02057 Cleaning during device manufacture

Abstract

A method of treating a sensor array including a plurality of sensors and an isolation structure, where a sensor of the plurality of sensors has a sensor pad exposed at a surface of the sensor array and the isolation structure is disposed between the sensor pad and sensor pads of other sensors of the plurality of sensors, comprises exposing the sensor pad and the isolation structure to a non-aqueous organo-silicon solution including an organo-silicon compound and a first non-aqueous carrier; applying an acid solution including an organic acid and a second non-aqueous carrier to the sensor pad; and rinsing the acid solution from the sensor pad and the isolation structure.

Claims

1. A method of treating a sensor array, the sensor array including a plurality of sensors, a sensor of the plurality of the sensors including a sensor pad, a well structure defining a well array having a plurality of wells, a well of the plurality of wells disposed over each sensor of the sensor array and providing an opening to the sensor pad, a lid attached over the sensor array and the well structure and including a fluid port, a space defined between the lid and the well structure, the method comprising:

applying a treatment solution through the fluid port into the space and waiting for a first period between 30 seconds and 30 minutes, the treatment solution entering the well and contacting the sensor pad, the treatment solution including an organo-silicon compound, an organic acid and an organic solvent, the organic solvent has a normal boiling point in a range of 36°

C. to 345°

C.;

applying a basic solution through the fluid port into the space and waiting for a second period between 20 seconds and 15 minutes, the basic solution entering the well and contacting the sensor pad; and

applying a rinse solution through the fluid port the rinse solution entering the well and contacting the sensor pad.

2. The method of claim 1, wherein the organo-silicon compound includes a silane functionalized with an aryl, polyaryl, alkyl, alkoxy, halo, or cyano moiety, or any combination thereof.

3. The method of claim 1, wherein the organo-silicon compound includes a polysiloxane including aryl, dialkyl or alkylhydro units, or combinations thereof.

4. The method of claim 1, wherein the organo-silicon compound includes a siloxane selected from the group consisting of an alkyl terminated polydimethylsiloxane, a hydride-terminated polydimethylsiloxane, a monovinyl terminated polydimethylsiloxane, dichloro-tetramethyldisiloxane, hexamethyltrisiloxane, polymethylhydrosiloxane, tris(trimethylsilyloxy)silane, octamethyltrisiloxane, and a combination thereof.

5. The method of claim 1, wherein the organo-silicon compound has a molecular weight in a range of 50 Da to 10000 Da.

6. The method of claim 1, wherein the treatment solution includes the organo-silicon compound in an amount of 0.001% to 10.0% by weight.

7. The method of claim 1, wherein the treatment solution further includes a platinum compound.

8. The method of claim 1, wherein the organic acid includes sulfonic acid.

9. The method of claim 1, wherein the treatment solution includes between 0.5 wt % and 25 wt % of the organic acid.

10. The method of claim 1, wherein the organic solvent is non-polar.

11. The method of claim 1, wherein the organic solvent has a normal boiling point in a range of 65°

C. to 275°

C.

12. The method of claim 1, further comprising heating the sensor pad and the treatment solution while exposing the sensor pad to the treatment solution, wherein heating includes heating at a temperature in a range of 35°

C. to 70°

C.

13. The method of claim 1, wherein the basic solution includes between 0.005M and 1.5M sodium hydroxide.

14. The method of claim 1, further comprising repeating exposing at least the sensor pad to the treatment solution and exposing at least the sensor pad to the basic solution.

15. The method of claim 14, further comprising repeating applying the treatment solution, applying the basic solution, and applying the rinse solution.

16. The method of claim 2, wherein the silane is selected from the group consisting of phenyldimethylchlorosilane, tert-butylchlorodiiphenylsilane, chlorotripropylsilane, (N,N-dimethylamino) trimethyl-silane, tris(trimethylsilyl)silane, triethylchlorosilane, 3-cyanopropyldimethylchloro-silane, chlorotriethylsilane, 1,2-bis(chlorodimethylsiyl)ethane, trimethylsilyltrifluoronesulfonate, trioctylsilane, dodecyldimethylchlorosilane, chlorodimethylthexylsilane, trimethylchlorosilane, chloro(chloromethyl) dimethylsilane, thexyldimethylchlorosilane, triisopropylchlorosilane, trimethylmethoxysilane, trimethylchlorosilane, chlorotriisopropylsilane, acetoxytrimethylsilane, and a combination thereof.

17. The method of claim 8, wherein the sulfonic acid includes alkyl sulfonic acid, alkyl aryl sulfonic acid, or a combination thereof.

18. The method of claim 13, wherein exposing at least the sensor pad to the basic solution occurs following exposing the sensor pad to the treatment solution.

19. The method of claim 17, wherein the alkyl aryl sulfonic acid includes an alkyl group having between 1 and 20 carbons.