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MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same

  • US 10,457,544 B2
  • Filed: 12/15/2017
  • Issued: 10/29/2019
  • Est. Priority Date: 06/15/2015
  • Status: Active Grant
First Claim
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1. A MEMS transducer for interacting with a volume flow of a fluid, comprising:

  • a substrate comprising a cavity;

    an electromechanical transducer connected to the substrate in the cavity and comprising an element deformable along a lateral movement direction, wherein a deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related;

    wherein the deformation of the deformable element is a curvature of the deformable element in-plane with respect to the substrate.

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