Electrical contact auto-alignment strategy for highly parallel pen arrays in cantilever free scanning probe lithography

• US 10,459,004 B2
• Filed: 02/02/2018
• Issued: 10/29/2019
• Est. Priority Date: 02/02/2017
• Status: Active Grant

• Current Assignee: TERA-print, LLC
• Original Assignee: TERA-print, LLC
• Inventors: Ivankin, Andrey, Magoline, Jared A.
• Primary Examiner(s): Smith, David E
• Application Number:
  US15/887,275
• Publication Number:
  US 20180217183A1
• Time in Patent Office: 634 Days
• CPC Class Codes: G01Q 10/04 Fine scanning or positioning
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: G01Q 70/14 Particular materials
• CPC Class Codes: G01Q 80/00 Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/7034 Leveling
• CPC Class Codes: G03F 9/7042 Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting non-exposure lithographic processes per se G03F7/0002
• CPC Class Codes: G03F 9/7046 Strategy, e.g. mark, sensor or wavelength selection
• CPC Class Codes: G03F 9/7061 Scanning probe microscopy, e.g. AFM, scanning tunneling microscopy

Abstract

Disclosed embodiments provide an electrical contact alignment strategy for leveling an array of probes, pens, tips, etc., in relationship to a substrate, for example, wherein a plurality of independent electrical circuits are formed by configuring regions of the array and substrate regions to be partially conductive and connected to opposite electrodes or vice versa.

Claims

1. A lithography instrument comprising:

a probe array;

a controller that controls positioning of the probe array or a substrate relative to each other, wherein a plurality of components are to be manufactured on the substrate by lithography; and

means to align the probe array or the substrate parallel to each other on an automated basis for subsequent manufacturing lithography based on measured electrical current,

wherein alignment of the probe array or the substrate to be parallel to each other is performed in multiple orthogonal planes to level the probe array or substrate relative to one another,

wherein a layer of conductive material is deposited at at least two regions of the probe array and at least one region of the substrate, or vice versa, to form conductive regions,

wherein application of voltage to the conductive regions on the probe array, substrate or both configures multiple independent electrical circuits between the probe array and the substrate, and

wherein measurement of electrical current in each of the independent electrical circuits is indicative of relative positioning of the probe array and the substrate.

2. The lithography instrument of claim 1, further comprising a motorized tip/tilt stage coupled to the controller and either the probe array or the substrate that enables tilting of the probe array or the substrate in two orthogonal planes under the control of the controller.

3. The lithography instrument of claim 1, wherein the automated alignment applies a voltage bias to either or both of the probe array and the substrate to induce the measurable electrical current to indicate electrical contact between a conductive region of the substrate and a corresponding conductive region of the probe array.

4. The lithography instrument of claim 1, wherein the automated alignment forms an electric circuit capable of carrying electric current.

5. The lithography instrument of claim 1, wherein the automated alignment is performed by the controller performing iterative control and movement of either the probe array or the substrate relative to each other while measuring electrical current between corresponding conductive regions of the probe array and the substrate.

6. The lithography instrument of claim 1, wherein the automated alignment positions the probe array or the substrate such that the probe array and the substrate are positioned parallel to each other within 0.005°

in less than ten minutes.

7. The lithography instrument of claim 1, wherein the probe array is one of a cantilever-free scanning probe array, a polymer pen/probe array or a beam pen/probe array.

8. The lithography instrument of claim 1, wherein the lithography instrument is a Polymer Pen Lithography instrument, and wherein the probe array includes a massively parallel array of probes, each of which acting as a point source for direct molecular printing.

9. The lithography instrument of claim 1, wherein the lithography instrument is a Beam Pen Lithography instrument, and wherein the probe array includes a massively parallel array of probes used to perform diffraction-unlimited patterning with light.

10. The lithography instrument of claim 9, wherein tips in the probe array are coated with an opaque material with apertures at apexes of the tips.

11. The lithography instrument of claim 1, wherein the lithography is cantilever-free scanning probe lithography.

12. The lithography instrument of claim 1, wherein features produced on the substrate via the lithography are nanoscale between 1 nm-10 μ

m in a least one dimension.

13. The lithography instrument of claim 1, wherein the layer of conductive material is deposited at at least two corners of the probe array or the substrate along with four regions in the center-side regions.

14. The lithography instrument of claim 13, wherein the layer of conductive material is between 5 nm and 5 μ

m.

15. The lithography instrument of claim 13, wherein the conductive material includes one of Au, Al, Ag, Pt, Ti, or Cr.

16. The lithography instrument of claim 13, wherein application of voltage to the four corner regions and connecting the four center-side regions to ground, or vice versa, configures four independent electric circuits, and wherein measurement of electrical current in each of the four electric circuits is indicative of relative positioning of the probe array and the substrate.

17. An electrical contact auto-alignment method for lithography, the method comprising:

providing a probe array;

positioning the probe array or a substrate relative to each another, wherein a plurality of components are to be manufactured on the substrate by lithography; and

aligning the probe array or the substrate parallel to each other on an automated basis for subsequent manufacturing lithography based on measured electrical current,

wherein alignment of the probe array or the substrate to be parallel to each other is performed in multiple orthogonal planes to level the probe array or substrate relative to one another,

wherein a layer of conductive material is deposited at at least two regions of the probe array and at least one region of the substrate, or vice versa, to form conductive regions,

wherein application of voltage to the conductive regions on the probe array, substrate or both configures multiple independent electrical circuits between the probe array and the substrate, and

wherein measurement of electrical current in each of the independent electrical circuits is indicative of relative positioning of the probe array and the substrate.

18. The method of claim 17, wherein the automated alignment applies a voltage bias to either or both of the probe array and the substrate to induce the measurable electrical current to indicate electrical contact between a conductive region of the substrate and a corresponding conductive region of the probe array.

19. The method of claim 17, wherein the automated alignment forms an electric circuit capable of carrying electric current.

20. The method of claim 17, wherein the automated alignment performs iterative control and movement of either the probe array or the substrate relative to each other while measuring electrical current between corresponding conductive regions of the probe array and the substrate.

21. The method of claim 17, wherein the automated alignment positions the probe array or the substrate such that the probe array and the substrate are positioned parallel to each other to 0.005°

in less than ten minutes.

22. The method of claim 17, wherein the probe array is a cantilever-free scanning probe array, a polymer pen/probe array or a beam pen/probe array.

23. The method of claim 17, wherein the lithography is Polymer Pen Lithography, wherein the probe array includes a massively parallel array of probes, each of which acting as a point source for direct molecular printing.

24. The method of claim 17, wherein the lithography is Beam Pen Lithography (BPL), wherein the probe array includes a massively parallel array of probes used to perform diffraction-unlimited patterning with light.

25. The method of claim 24, wherein tips in the probe array are coated with an opaque material with apertures at apexes of the tips.

26. The method of claim 17, wherein the lithography is cantilever free scanning probe lithography.

27. The method of claim 17, wherein features produced on the substrate via the lithography are nanoscale between 1 nm-10 μ

m in a least one dimension.

28. The method of claim 17, wherein the layer of conductive material is deposited at at least two corners of the probe array or the substrate along with four regions in the center-side regions.

29. The method of claim 28, wherein the layer of conductive material is between 5 nm and 5 μ

m.

30. The method of claim 28, wherein the conductive material includes one of Au, Al, Ag, Pt, Ti, or Cr.

31. The method of claim 28, wherein application of voltage to the four corner regions and connecting the four center-side regions to ground, or vice versa, configures four independent electric circuits, and wherein measurement of electrical current in each of the four electric circuits is indicative of relative positioning of the probe array and the substrate.

32. A method of manufacturing a plurality of components on a substrate using lithography, the method comprising:

providing a probe array;

positioning the probe array or a substrate relative to each another, wherein a plurality of components are to be manufactured on the substrate by lithography; and

aligning the probe array or the substrate parallel to each other on an automated basis based on measured electrical current; and

performing lithography using the probe array to produce uniform feature sizes on the substrate,

wherein alignment of the probe array or the substrate to be parallel to each other is performed in multiple orthogonal planes to level the probe array or substrate relative to one another,

wherein a layer of conductive material is deposited at at least two regions of the probe array and at least one region of the substrate, or vice versa, to form conductive regions,

wherein application of voltage to the conductive regions on the probe array, substrate or both configures multiple independent electrical circuits between the probe array and the substrate, and

wherein measurement of electrical current in each of the independent electrical circuits is indicative of relative positioning of the probe array and the substrate.

33. The method of manufacturing of claim 32, wherein the automated alignment applies a voltage bias to either or both of the probe array and the substrate to induce a measurable electrical current to indicate electrical contact between a conductive region of the substrate and a corresponding conductive region of the probe array.

34. The method of manufacturing of claim 32, wherein the automated alignment forms an electric circuit capable of carrying electric current.

35. The method of manufacturing of claim 32, wherein the automated alignment is performed by the controller performing iterative control and movement of either the probe array or the substrate relative to each other while measuring electrical current between corresponding conductive regions of the probe array and the substrate.

36. The method of manufacturing of claim 32, wherein the automated alignment positions the probe array or the substrate such that the probe array and the substrate are positioned parallel to each other within 0.005°

in less than ten minutes.

37. The method of manufacturing of claim 32, wherein the probe array is one of a cantilever-free scanning probe array, a polymer pen/probe array or a beam pen/probe array.

38. The method of manufacturing of claim 32, wherein the lithography instrument is a Polymer Pen Lithography instrument, and wherein the probe array includes a massively parallel array of probes, each of which acting as a point source for direct molecular printing.

39. The method of manufacturing of claim 32, wherein the lithography instrument is a Beam Pen Lithography instrument, and wherein the probe array includes a massively parallel array of probes used to perform diffraction-unlimited patterning with light.

40. The method of manufacturing of claim 39, wherein tips in the probe array are coated with an opaque material with apertures at apexes of the tips.

41. The method of manufacturing of claim 32, wherein the lithography is cantilever-free scanning probe lithography.

42. The method of manufacturing of claim 32, wherein features produced on the substrate via the lithography are nanoscale between 1 nm-10 μ

m in a least one dimension.

43. The method of manufacturing of claim 32, wherein the layer of conductive material is deposited at at least two corners of the probe array or the substrate along with four regions in the center-side regions.

44. The method of manufacturing of claim 43, wherein the layer of conductive material is between 5 nm and 5 μ

m.

45. The method of manufacturing of claim 43, wherein the conductive material includes one of Au, Al, Ag, Pt, Ti, or Cr.

46. The method of manufacturing of claim 43, wherein application of voltage to the four corner regions and connecting the four center-side regions to ground, or vice versa, configures four independent electric circuits, and wherein measurement of electrical current in each of the four electric circuits is indicative of relative positioning of the probe array and the substrate.

47. A lithography instrument comprising:

a probe array;

a controller that controls positioning of the probe array or a substrate relative to each other, wherein a plurality of components are to be manufactured on the substrate by lithography; and

a motorized tip/tilt stage coupled to the controller and either the probe array or the substrate that enables tilting of the probe array or the substrate relative to each other in two orthogonal planes under the control of the controller,

wherein the controller controls iterative movement of the motorized tip/tilt stage to align the probe array and the substrate in parallel on an automated basis in response to iterative measurement of electric current between a plurality of regions of the probe array and the substrate for subsequent manufacturing lithography,

wherein a layer of conductive material is deposited at at least two regions of the probe array and at least one region of the substrate, or vice versa, to form conductive regions,

wherein application of voltage to the conductive regions on the probe array, substrate or both configures multiple independent electrical circuits between the probe array and the substrate, and

wherein measurement of electrical current in each of the independent electrical circuits is indicative of relative positioning of the probe array and the substrate.

48. The lithography instrument of claim 47, wherein the automated alignment applies a voltage bias to either the probe array or the substrate to induce a measurable electrical current to indicate electrical contact between a conductive region of the substrate and a corresponding conductive region of the probe array.

49. The lithography instrument of claim 47, wherein the automated alignment forms an electric circuit capable of carrying electric current.

50. The lithography instrument of claim 47, wherein the automated alignment is performed by the controller performing iterative control and movement of either the probe array or the substrate relative to each other while measuring electrical current between corresponding conductive regions of the probe array and the substrate.

51. The lithography instrument of claim 47, wherein the automated alignment positions the probe array or the substrate such that the probe array and the substrate are positioned parallel to each other within 0.005°

in less than ten minutes.

52. The lithography instrument of claim 47, wherein the probe array is one of a cantilever-free scanning probe array, a polymer pen/probe array or a beam pen/probe array.

53. The lithography instrument of claim 47, wherein the lithography instrument is a Polymer Pen Lithography instrument, and wherein the probe array includes a massively parallel array of probes, each of which acting as a point source for direct molecular printing.

54. The lithography instrument of claim 47, wherein the lithography instrument is a Beam Pen Lithography instrument, and wherein the probe array includes a massively parallel array of probes used to perform diffraction-unlimited patterning with light.

55. The lithography instrument of claim 54, wherein tips in the probe array are coated with an opaque material with apertures at apexes of the tips.

56. The lithography instrument of claim 47, wherein the lithography is cantilever-free scanning probe lithography.

57. The lithography instrument of claim 47, wherein features produced on the substrate via the lithography are nanoscale between 1 nm-10 μ

m in a least one dimension.

58. The lithography instrument of claim 47, wherein the layer of conductive material is deposited at at least two corners of the probe array or the substrate along with four regions in the center-side regions.

59. The lithography instrument of claim 58, wherein the layer of conductive material is between 5 nm and 5 μ

m.

60. The lithography instrument of claim 58, wherein the conductive material includes one of Au, Al, Ag, Pt, Ti, or Cr.

61. The lithography instrument of claim 58, wherein application of voltage to the four corner regions and connecting the four center-side regions to ground, or vice versa, configures four independent electric circuits, and wherein measurement of electrical current in each of the four electric circuits is indicative of relative positioning of the probe array and the substrate.