Semiconductor device
First Claim
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1. A semiconductor device, comprising:
- a core layer,a first clad layer having a refractive index lower than that of the core layer, anda second clad layer having a refractive index lower than that of the core layer and different from that of the first clad layer,the core layer comprising;
a first portion contacting with the first clad layer and overlapping with the first clad layer in a plan view;
a second portion comprising;
a first overlapping portion contacting with the first clad layer and overlapping with the first clad layer in the plan view; and
a second overlapping portion contacting with the second clad layer and overlapping with the second clad layer in the plan view, the second overlapping portion being adjacent to the first portion; and
a third portion contacting with the second clad layer and overlapping with the second clad layer in the plan view, the third portion being adjacent to the second portion and having a finite radius of curvature,wherein, in a cross-section orthogonal to an extending direction of the second portion and passing through the second portion, a first ratio of a first contact area of an upper surface of the core layer and the first clad layer to a second contact area of the upper surface of the core layer and the second clad layer, and a second ratio of a third contact area of the upper surface of the core layer and the second clad layer to a fourth area of the core layer and the first clad layer are each a finite value more than 0,wherein the first ratio, in the cross-section orthogonal to the extending direction of the second portion and passing through the second portion, is lower than the first ratio in a cross-section orthogonal to an extending direction of the first portion and passing through the first portion, and is greater than the first ratio in a cross-section orthogonal to an extending direction of the third portion and passing through the third portion, andwherein the second ratio, in the cross-section orthogonal to the extending direction of the second portion and passing through the second portion, is greater than the second ratio in the cross-section orthogonal to an extending direction of the first portion and passing through the first portion, and is lower than the second ratio in a cross-section orthogonal to an extending direction of the third portion and passing through the third portion.
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Abstract
To provide a semiconductor device including a low-loss optical waveguide. The optical waveguide included in the semiconductor device has a core layer covered with first and second clad layers having respectively different refractive indices. A portion of the core layer is covered at a first ratio, that is, a ratio of the first clad layer to the second clad layer and at the same time, a second ratio, that is, a ratio of the second clad layer to the first clad layer. At this time, the first ratio and the second ratio are each a finite value more than 0.
1 Citation
19 Claims
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1. A semiconductor device, comprising:
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a core layer, a first clad layer having a refractive index lower than that of the core layer, and a second clad layer having a refractive index lower than that of the core layer and different from that of the first clad layer, the core layer comprising; a first portion contacting with the first clad layer and overlapping with the first clad layer in a plan view; a second portion comprising; a first overlapping portion contacting with the first clad layer and overlapping with the first clad layer in the plan view; and a second overlapping portion contacting with the second clad layer and overlapping with the second clad layer in the plan view, the second overlapping portion being adjacent to the first portion; and a third portion contacting with the second clad layer and overlapping with the second clad layer in the plan view, the third portion being adjacent to the second portion and having a finite radius of curvature, wherein, in a cross-section orthogonal to an extending direction of the second portion and passing through the second portion, a first ratio of a first contact area of an upper surface of the core layer and the first clad layer to a second contact area of the upper surface of the core layer and the second clad layer, and a second ratio of a third contact area of the upper surface of the core layer and the second clad layer to a fourth area of the core layer and the first clad layer are each a finite value more than 0, wherein the first ratio, in the cross-section orthogonal to the extending direction of the second portion and passing through the second portion, is lower than the first ratio in a cross-section orthogonal to an extending direction of the first portion and passing through the first portion, and is greater than the first ratio in a cross-section orthogonal to an extending direction of the third portion and passing through the third portion, and wherein the second ratio, in the cross-section orthogonal to the extending direction of the second portion and passing through the second portion, is greater than the second ratio in the cross-section orthogonal to an extending direction of the first portion and passing through the first portion, and is lower than the second ratio in a cross-section orthogonal to an extending direction of the third portion and passing through the third portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification