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Illumination device

  • US 10,459,343 B2
  • Filed: 11/15/2018
  • Issued: 10/29/2019
  • Est. Priority Date: 08/04/2011
  • Status: Active Grant
First Claim
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1. An illumination optical system which illuminates a pattern surface with light from a light source and is capable of being applied to an exposure apparatus for exposing an image of a pattern arranged on the pattern surface onto a workpiece, the illumination optical system comprising:

  • a fly'"'"'s eye optical system having a plurality of optical surfaces arranged on a surface crossing an optical path of the light from the light source;

    a condenser optical system configured to condense a plurality of light beams respectively passing through the plurality of optical surfaces of the fly'"'"'s eye optical system and direct the condensed light beams onto the pattern surface; and

    a light intensity distribution changing member arranged on an optical path between the light source and the fly'"'"'s eye optical system, the light intensity distribution changing member being configured to change a first light amount of a first light beam with respect to a second light amount of a second light beam, while causing the first light beam to enter at a first position on one optical surface of the plurality of optical surfaces of the fly'"'"'s eye optical system and causing the second light beam to enter at a second position located on the one optical surface and different from the first position.

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