Flows of optimization for lithographic processes

• US 10,459,346 B2
• Filed: 07/16/2018
• Issued: 10/29/2019
• Est. Priority Date: 04/14/2014
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Hsu, Duan-Fu Stephen, Howell, Rafael C., Liu, Xiaofeng
• Primary Examiner(s): Nguyen, Hung
• Application Number:
  US16/036,732
• Publication Number:
  US 20180341186A1
• Time in Patent Office: 470 Days
• Field of Search: 355 52, 355 53, 355 55
• CPC Class Codes: G03F 1/36 Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
• CPC Class Codes: G03F 1/70 Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging
• CPC Class Codes: G03F 7/70125 Use of illumination settings tailored to particular mask patterns details of setting means G03F7/70091
• CPC Class Codes: G03F 7/70191 Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
• CPC Class Codes: G03F 7/70433 Layout for increasing efficiency or for compensating imaging errors, e.g. layout of exposure fields for reducing focus errors; Use of mask features for increasing efficiency or for compensating imaging errors
• CPC Class Codes: G03F 7/70441 Optical proximity correction [OPC]
• CPC Class Codes: G03F 7/705 Modelling or simulating from physical phenomena up to complete wafer processes or whole workflow in wafer productions
• CPC Class Codes: G03F 7/70558 Dose control, i.e. achievement of a desired dose
• CPC Class Codes: G03F 7/70641 Focus

Abstract

A method to improve a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus having an illumination system and projection optics, the method including: obtaining an illumination source shape and a mask defocus value; optimizing a dose of the lithographic process; and optimizing the portion of the design layout for each of a plurality of slit positions of the illumination source.

Claims

1. A method to improve a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus comprising an illumination system and projection optics, the method comprising:

optimizing, by a hardware computer system, a patterning device defocus value of the lithographic process; and

optimizing, by the hardware computer system performing a simulation and based on the patterning device defocus value, the portion of the design layout for each of a plurality of slit positions of an illumination for a patterning device.

2. The method of claim 1, further comprising optimizing the portion of the design layout wherein transmission at all locations of the portion of the design layout is not restricted to a number of discrete values.

3. The method of claim 1, further comprising determining, for each of the slit positions, a process window.

4. The method of claim 1, comprising optimizing the illumination and the portion of the design layout using a three-dimensional mask model, under an assumption that the illumination is a freeform illumination.

5. The method of claim 4, comprising determining a plane of best focus of an aerial image formed by the illumination and the portion of the design layout optimized using the three-dimensional mask model.

6. The method of claim 4, wherein the optimizing the illumination and the portion of the design layout comprises using a cost function that represents at least one stochastic variation.

7. The method of claim 1, comprising:

mapping a freeform illumination to a discrete illumination, or

optimizing the portion of the design layout and a discrete illumination.

8. The method of claim 1, further comprising optimizing the illumination and the portion of the design layout using a thin mask model, wherein the illumination is a freeform illumination.

9. The method of claim 1, wherein the obtaining the the patterning device defocus value comprises:

determining a plurality of mask defocus values using a plurality of pupil profiles, or

averaging several mask defocus values.

10. A computer program product comprising a non-transitory computer readable medium having instructions therein, the instructions, upon execution by a computer system, configured to cause the computer system to at least:

optimize a patterning device defocus value of a lithographic process for imaging a portion of a design layout onto a substrate using a lithographic projection apparatus; and

optimize, based on a simulation and on the patterning device defocus value, the portion of the design layout for each of a plurality of slit positions of illumination, for a patterning device, to be produced by an illumination system of the lithographic projection apparatus.

11. The computer program product of claim 10, wherein the instructions, when executed by the computer system, are further configured to optimize the portion of the design layout wherein transmission at all locations of the portion of the design layout is not restricted to a number of discrete values.

12. The computer program product of claim 10, wherein the instructions, when executed by the computer system, are further configured to determine, for each of the slit positions, a process window.

13. The computer program product of claim 10, wherein the instructions, when executed by the computer, are further configured to optimize the illumination and the portion of the design layout using a three-dimensional mask model, under an assumption that the illumination is a freeform illumination.

14. The computer program product of claim 10, wherein the illumination comprises EUV radiation and the illumination is arranged to have oblique chief rays incident on the patterning device.

15. A computer program product comprising a non-transitory computer readable medium having instructions therein, the instructions, upon execution by a computer system, configured to cause the computer system to at least:

perform a first optimization, based on a simulation, the first optimization involving optimizing of a portion of a design layout for imaging by a lithographic process onto a substrate using a lithographic projection apparatus, with an illumination to be produced by the lithographic projection apparatus, wherein the illumination is a freeform illumination and the first optimization involves changing the portion of the design layout and/or the freeform illumination;

map the freeform illumination resulting from the first optimization to a discrete illumination; and

perform a second optimization, the second optimization involving optimizing of the portion of the design layout with the discrete illumination, wherein the second optimization involves changing the portion of the design layout and/or the discrete illumination.

16. The computer program product of claim 15, wherein, in at least the first optimization, transmission at all locations of the portion of the design layout is not restricted to a number of discrete values.

17. The computer program product of claim 15, wherein the first optimization involves use of a three-dimensional mask model.

18. The computer program product of claim 15, wherein the instructions are further configured to cause the computer system to obtain a patterning device defocus value, which patterning device defocus value is used in the first and/or second optimization.

19. The computer program product of claim 15, wherein the instructions are further configured to cause the computer system to perform a third optimization, the third optimization involving optimizing of the portion of the design layout for each of a plurality of slit positions of illumination, for a patterning device, to be produced by an illumination system of the lithographic projection apparatus.

20. The computer program product of claim 15, wherein the illumination comprises EUV radiation and the illumination is arranged to have oblique chief rays incident on the patterning device.