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RF impedance matching circuit and systems and methods incorporating same

  • US 10,460,912 B2
  • Filed: 08/24/2018
  • Issued: 10/29/2019
  • Est. Priority Date: 01/10/2014
  • Status: Active Grant
First Claim
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1. A radio frequency (RF) impedance matching circuit comprising:

  • an RF input configured to operably couple to an RF source;

    an RF output configured to operably couple to a plasma chamber;

    a first electronically variable capacitor having a first variable capacitance;

    a second electronically variable capacitor having a second variable capacitance; and

    a control circuit operably coupled to the first and second electronically variable capacitors to control the first variable capacitance and the second variable capacitance, wherein the control circuit is configured to;

    determine a variable impedance of the plasma chamber;

    determine, based on the determined variable impedance of the plasma chamber, a first capacitance value for the first electronically variable capacitor and a second capacitance value for the second electronically variable capacitor; and

    generate a control signal to alter at least one of the first variable capacitance and the second variable capacitance to the first capacitance value and the second capacitance value, respectively;

    wherein the alteration of the at least one of the first variable capacitance and the second variable capacitance causes RF power reflected back to the RF source to begin decreasing within 150 μ

    sec of the determination of the variable impedance of the plasma chamber.

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