Method and apparatus for manufacturing electronic device using device chip

• US 10,461,058 B2
• Filed: 02/27/2017
• Issued: 10/29/2019
• Est. Priority Date: 03/25/2016
• Status: Active Grant

• Current Assignee: Shashin Kagaku Co., Ltd.
• Original Assignee: Shashin Kagaku Co., Ltd.
• Inventors: Kitazawa, Hiroyuki
• Primary Examiner(s): Sengupta, Sonya M
• Application Number:
  US16/087,239
• Publication Number:
  US 20190067237A1
• Time in Patent Office: 974 Days
• Field of Search: 156247, 156446
• CPC Class Codes: G09F 9/33 being semiconductor devices, e.g. diodes
• CPC Class Codes: H01L 21/67144 Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
• CPC Class Codes: H01L 24/743 Apparatus for manufacturing layer connectors
• CPC Class Codes: H01L 24/83 using a layer connector
• CPC Class Codes: H01L 2924/06 Polymers polymers per se C08; polymer adhesives C09J
• CPC Class Codes: H01L 2924/12041 LED
• CPC Class Codes: H01L 33/0095 Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
• CPC Class Codes: H05K 13/04 Mounting of components , e.g. of leadless components
• CPC Class Codes: H05K 13/0404 Pick-and-place heads or apparatus, e.g. with jaws

Abstract

[Object] To provide a method and an apparatus for manufacturing electronic devices by transferring the device chips from one substrate for producing device chips to the other substrate for a product having a large display.

[Means of Realizing the Object] A substrate having a plurality of device chips is brought into contact with a first drum including a selective adhesive region, the device chips are transferred by making the device chips be adhered to the selective adhesive layer of the first drum and separating at least part of the device chips from the substrate by rotating the first drum, then, the device chips on the first drum are made to be come into contact with the other substrate for the product, and the device chips are transferred to the substrate for the product by rotating the first drum. Additionally, the front-and-rear relation for the surfaces may be inversed by, after the device chips on the first drum are transferred to the second drum, transferring the device chips on the second drum to the substrate for the product.

Claims

1. A method of manufacturing electronic devices comprising:

a preparation step for preparing a first substrate having a first adhesive layer and a second substrate having a second adhesive layer, the first adhesive layer including a surface where a plurality of device chips are adhered;

a first take-out step for making at least part of the device chips on the first substrate come into contact with and adhere to at least part of a selective adhesive region on a third adhesive layer of a first drum and for separating the at least part of the device chips from the first substrate by rotating the first drum; and

a first transfer step for making the device chips on the selective adhesive region come into contact with and adhere to the second adhesive layer and for separating the device chips from the selective adhesive region by rotating the first drum.

2. The method of manufacturing electronic devices according to claim 1,

wherein an adhesion force between the first adhesive layer and the device chips is weaker than an adhesion force between the selective adhesive region and the device chips, and

wherein the adhesion force between the selective adhesive region and the device chips is weaker than an adhesion force between the second adhesive layer and the device chips.

6. The method of manufacturing electronic devices according to claim 1, comprising:

the first take-out step; and

further a parallel-move step for separating the first drum from the first substrate after the first take-out step and for moving the first substrate in a direction parallel to a rotation shaft of the first drum,

wherein the first take-out step and the parallel moving step are repeated several times, so as to transfer the device chips to the selective adhesive region of the first drum.

7. The method of manufacturing electronic devices according to claim 1, wherein the selective adhesive region comprises convex portions.

3. A method of manufacturing electronic devices comprising:

a preparation step for preparing a first substrate having a first adhesive layer and a second substrate having a second adhesive layer, the first adhesive layer including a surface where a plurality of device chips are adhered;

a first take-out step for making at least part of the device chips on the first substrate come into contact with and adhere to at least part of a selective adhesive region on a third adhesive layer of a first drum and for separating the at least part of the device chips from the first substrate by rotating the first drum;

an inversion step for making the device chips on the selective adhesive region of the first drum come into contact with and adhere to a fourth adhesive layer of a second drum and for separating the device chips from the selective adhesive region by rotating the first drum and the second drum oppositely to each other; and

a second transfer step for making the device chips come into contact with and adhere to the second adhesive layer and for separating the device chips from the second drum by rotating the second drum.

4. The method of manufacturing electronic devices according to claim 3,

wherein an adhesion force between the first adhesive layer and the device chips is weaker than an adhesion force between the selective adhesive region and the device chips,

wherein the adhesion force between the selective adhesive region and the device chips is weaker than an adhesion force between the fourth adhesive layer and the device chips, and

wherein the adhesion force between the fourth adhesive layer and the device chips is weaker than an adhesion force between the second adhesive layer and the device chips.

5. A method of manufacturing electronic devices, comprising:

a preparation step for preparing a first substrate having a first adhesive layer and a second substrate having a second adhesive layer, the first adhesive layer including a surface where a plurality of device chips are adhered; and

a first transfer process and a second transfer process;

wherein;

the first transfer process comprises;

a first take-out step for making at least part of the device chips on the first substrate come into contact with and adhere to at least part of a selective adhesive region on a third adhesive layer of a first drum and for separating the at least part of the device chips from the first substrate by rotating the first drum; and

a first transfer step for making the device chips on the selective adhesive region come into contact with and adhere to the second adhesive layer and for separating the device chips from the selective adhesive region by rotating the first drum; and

the second transfer process comprises;

a second take-out step for making at least part of the device chips on the first substrate come into contact with and adhere to at least part of a selective adhesive region on a third adhesive layer of a first drum and for separating the at least part of the device chips from the first substrate by rotating the first drum; and

an inversion step for making the device chips on the selective adhesive region of the first drum come into contact with and adhere to a fourth adhesive layer of a second drum and for separating the device chips from the selective adhesive region by rotating the first drum and the second drum oppositely to each other; and

a second transfer step for making the device chips come into contact with and adhere to the second adhesive layer and for separating the device chips from the second drum by rotating the second drum.

8. An apparatus for manufacturing electronic devices comprising:

a traveling guide;

a first conveying table;

a second conveying table; and

a first drum,

wherein the first conveying table includes;

a first traveling device that makes the first conveying table move on the traveling guide; and

a traversing device that moves perpendicularly to a longitudinal direction of the traveling guide,

wherein the second conveying table includes a second traveling device that makes the second conveying table move on the traveling guide, and

wherein the first drum includes;

a first rotation shaft;

a first elevating device for raising and lowering the first drum;

a first rotation device for rotating the first drum around the first rotation shaft; and

a mechanism for controlling a tilt angle of the first rotation shaft in a direction parallel to a first direction perpendicular to the first conveying table and a direction parallel to a second direction parallel to the first conveying table, and

further includes a third adhesive layer having a selective adhesive region.

9. The apparatus for manufacturing electronic devices according to claim 8, further comprising a second drum,

wherein the second drum includes:

a second rotation shaft;

a second elevating device for raising and lowering the second drum; and

a second rotation device for rotating the second drum around the second rotation shaft,

wherein at least one of the first drum and the second drum has a drum mover, and the drum mover moves in a direction parallel to a longitudinal direction of the traveling guide, and

wherein the second drum includes a fourth adhesive layer, and an adhesion force of the selective adhesive region is weaker than an adhesion force of the fourth adhesive layer.

10. The apparatus for manufacturing electronic devices according to claim 8, wherein the selective adhesive region comprises convex portions.