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Laser device provided with function of predicting occurrence of condensation

  • US 10,461,488 B2
  • Filed: 05/11/2016
  • Issued: 10/29/2019
  • Est. Priority Date: 05/14/2015
  • Status: Active Grant
First Claim
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1. A laser device comprising:

  • a laser resonator generating laser light,a cooling water feed device feeding cooling water to the laser resonator for cooling the laser resonator,a water temperature gauge measuring a temperature of cooling water fed to the laser resonator,a temperature/humidity adjusting device adjusting at least one of a temperature and humidity of a space in which the laser resonator is set,a thermometer measuring a temperature of air adjusted by the temperature/humidity adjusting device,a hygrometer measuring a humidity of air adjusted by the temperature/humidity adjusting device,a controlling part determining a control target temperature of cooling water which is fed to the laser resonator and calculating a reference temperature or a reference humidity for judging if the cooling water feed device may feed cooling water based on the temperature measured by the thermometer and the humidity measured by the hygrometer,wherein the reference temperature is a dew point in the space in which the laser resonator is placed, or a value calculated based on the dew point, andwherein the cooling water feed device is configured to repeat the following steps a plurality of times until the temperature of cooling water reaches the control target temperature;

    1) start or continue the feed of cooling water after a command for starting up the laser resonator has been output and when;

    a) the temperature of the cooling water is greater than the control target temperature, andb) the temperature of the cooling water is greater than or equal to the reference temperature, and2) stop the feed of cooling water when;

    a) the temperature of the cooling water is less than or equal to the control target temperature, orb) the temperature of the cooling water is less than the reference temperature.

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