Planar positioning apparatus and positioning table

• US 10,461,612 B2
• Filed: 10/31/2016
• Issued: 10/29/2019
• Est. Priority Date: 11/13/2015
• Status: Active Grant

• Current Assignee: Physik Instrumente (PI) GmbH & Co. KG
• Original Assignee: Physik Instrumente (PI) GmbH & Co. KG
• Inventors: Gloss, Rainer
• Primary Examiner(s): Lam, Thanh
• Application Number:
  US15/775,123
• Publication Number:
  US 20180269756A1
• Time in Patent Office: 1,093 Days
• Field of Search: 31015601, 310 71, 310 68 B, 310208, 310 1219
• CPC Class Codes: H01F 27/2804 Printed windings
• CPC Class Codes: H02K 15/03 having permanent magnets
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 3/26 consisting of printed conductors
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: H02K 7/14 Structural association with mechanical loads, e.g. with hand-held machine tools or fans with fan or impeller for cooling the machine H02K9/06
• CPC Class Codes: H05K 1/165 incorporating printed inductors
• CPC Class Codes: H05K 2201/09245 Crossing layout alternating conductors H05K2201/097
• CPC Class Codes: H05K 3/46 Manufacturing multilayer circuits

Abstract

The invention relates to a planar positioning apparatus, comprising a stator, which comprises a coil arrangement comprising flat coils, a rotor which is arranged opposite the stator in the operating position of the positioning apparatus and has a planar magnet arrangement comprising a plurality of rows of magnets, wherein the plane which is spanned by the planar magnet arrangement is arranged parallel to the plane of the coil arrangement, a position detecting device for detecting the position of the rotor relative to the stator, and an evaluation and control device for evaluating position signals of the position detecting device and for controlling a current supply to the coil arrangement for controlling the position of the rotor with respect to the stator, wherein the coil arrangement comprises in each case n×3 (n≥1) elongate flat coils which are interleaved with one another, in a first and second orientation of the coil arrangement which, over the majority of their extent, are designed as conductor runs of a first plane of a multiple-plane printed circuit board, and the conductor runs of the three associated flat coils enclose crossover regions which run in a second plane of the multiple-plane printed circuit board.

Claims

1. Planar positioning apparatus, comprising

a stator which comprises a coil arrangement of flat coils,

a rotor which is arranged opposite the stator in the operating position of the positioning apparatus and has a planar magnet arrangement comprising a plurality of rows of magnets, wherein the plane which is spanned by the planar magnet arrangement is arranged parallel to the plane of the coil arrangement,

a position detecting device for detecting the position of the rotor relative to the stator, and

an evaluation and control device for evaluating position signals of the position detecting device and for controlling a current supply to the coil arrangement for controlling the position of the rotor with respect to the stator,

wherein the coil arrangement comprises in each case n×

3 (n≥

1) elongate flat coils which are interleaved with one another, in a first and second orientation of the coil arrangement, which over the majority of their extent, are designed as conductors tracks of a first plane of a multiple-plane printed circuit board, and the conductor tracks of the three associated flat coils enclose crossover regions which run in a second plane of the multiple-plane printed circuit board, while all of the connection ends of the three associated flat coils each are concentrated in a small connection region of the multiple-plane printed circuit board.

2. Planar positioning apparatus according to claim 1, wherein the n×

3 flat coils of the first orientation run over the majority of their extent in the first plane and the associated crossover regions in the second plane of the multiple-plane printed circuit board, while the n×

3 flat coils of the second orientation run over the majority of their extent in the second plane and the associated crossover regions in the first plane of the multiple-plane printed circuit board.

3. Planar positioning apparatus according to claim 1, wherein in each case a part of the connection ends of all of the flat coils is in the first plane of the multiple-plane printed circuit board, and another part in the second plane thereof.

4. Planar positioning apparatus according to claim 1, wherein all of the flat coils are realized to have substantially the same length and the same ohmic resistance.

5. Planar positioning apparatus according to claim 1, wherein all of the flat coils are realized to have a largely rectangular conductor extent.

6. Planar positioning apparatus according to claim 1, wherein the small connection area of the multiple-plane printed circuit board occupies a surface of less than 10%, in particular of less than 5% of the surface occupied by the flat coils and is in particular formed to be rectangular.

7. Planar positioning apparatus according to claim 1, wherein the multiple-plane printed circuit board is a dual-plane printed circuit board.

8. Planar positioning apparatus according to claim 1, wherein the coil arrangement covers substantially the entire surface of the stator.

9. Planar positioning apparatus according to claim 1, wherein the position detecting device comprises at least one position measuring head arranged within the stator or the rotor in the operating position of the positioning device, and an area scale fixed true to position to the rotor or the stator, and wherein the stator or the rotor has at least one window, and preferably a plurality of windows in a matrix arrangement for making the area scale visible for the position measuring head.

10. Planar positioning apparatus according to claim 9, wherein at least a part of the plurality of windows in the matrix arrangement is either disposed between adjacent flat coils of in each case three associated flat coils or between the in each case n adjacent groups each comprising three associated flat coils.

11. Planar positioning apparatus according to claim 1, wherein the rotor comprises a chessboard-like arrangement of rows of magnets, each of which in particular forming a Halbach array, in particular four square rows of magnets in a chessboard arrangement.

12. Planar positioning apparatus according to claim 11, wherein the rows of magnets cover substantially the central area of the rotor.

13. Positioning table comprising a planar positioning apparatus according to claim 1, wherein the positioning table has holding and guiding means for the planar positioning apparatus and an object holder for holding an object to be positioned.

14. Machining arrangement, in particular machine tool, comprising a positioning table according to claim 13.

15. Measuring arrangement comprising a positioning table according to claim 13.