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Method and system for surface modification of substrate for ion beam target

  • US 10,462,893 B2
  • Filed: 06/05/2017
  • Issued: 10/29/2019
  • Est. Priority Date: 06/05/2017
  • Status: Active Grant
First Claim
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1. A method for making a neutron generating target, the method comprising:

  • modifying a surface of a target substrate to form one or more surface features; and

    disposing a neutron source layer on the surface of the target substrate,wherein the one or more surface features have a height that is less than a thickness of the neutron source layer.

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