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Out-of-plane sensing gyroscope robust to external acceleration and rotation

  • US 10,466,053 B2
  • Filed: 04/04/2017
  • Issued: 11/05/2019
  • Est. Priority Date: 04/04/2017
  • Status: Active Grant
First Claim
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1. A gyroscope, comprising:

  • two first drive masses that move in a first anti-phase drive motion;

    two first lever arms;

    two first drive decouplings, wherein each of the two first drive decouplings couples a respective one of the first drive masses to a respective one of the first lever arms and is located between the respective first drive mass and the respective first lever arm to cause the respective first lever arm to rotate in response to the drive motion of the respective first drive mass;

    two first proof masses;

    four first proof mass couplings, wherein two of the first proof mass couplings couple one of the two first lever arms to each of the two first proof masses, wherein another two of the first proof mass couplings couple the other of the two first lever arms to each of the two first proof masses, and wherein the two first proof masses move in anti-phase in response to the first anti-phase drive motion;

    two second drive masses that move in a second anti-phase drive motion;

    two second lever arms;

    two second drive decouplings;

    wherein each of the two second driving decouplings couples a respective one of the second drive masses to a respective one of the second lever arms and is located between the respective second drive mass and the respective second lever arm to cause the respective second lever arm to rotate in response to the drive motion of the respective second drive mass;

    two second proof masses;

    four second proof mass couplings, wherein two of the second proof mass couplings couple one of the second lever arms to each of the two second proof masses, wherein another two of the second proof mass couplings couple the other of the two second lever arms to each of the two second proof masses, and wherein the two second proof masses move in anti-phase in response to the second anti-phase drive motion; and

    a coupling spring between one of the two first proof masses and one of the two second proof masses.

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