Out-of-plane sensing gyroscope robust to external acceleration and rotation
First Claim
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1. A gyroscope, comprising:
- two first drive masses that move in a first anti-phase drive motion;
two first lever arms;
two first drive decouplings, wherein each of the two first drive decouplings couples a respective one of the first drive masses to a respective one of the first lever arms and is located between the respective first drive mass and the respective first lever arm to cause the respective first lever arm to rotate in response to the drive motion of the respective first drive mass;
two first proof masses;
four first proof mass couplings, wherein two of the first proof mass couplings couple one of the two first lever arms to each of the two first proof masses, wherein another two of the first proof mass couplings couple the other of the two first lever arms to each of the two first proof masses, and wherein the two first proof masses move in anti-phase in response to the first anti-phase drive motion;
two second drive masses that move in a second anti-phase drive motion;
two second lever arms;
two second drive decouplings;
wherein each of the two second driving decouplings couples a respective one of the second drive masses to a respective one of the second lever arms and is located between the respective second drive mass and the respective second lever arm to cause the respective second lever arm to rotate in response to the drive motion of the respective second drive mass;
two second proof masses;
four second proof mass couplings, wherein two of the second proof mass couplings couple one of the second lever arms to each of the two second proof masses, wherein another two of the second proof mass couplings couple the other of the two second lever arms to each of the two second proof masses, and wherein the two second proof masses move in anti-phase in response to the second anti-phase drive motion; and
a coupling spring between one of the two first proof masses and one of the two second proof masses.
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Abstract
A gyroscope includes drive portions, lever arms, and proof masses located in a device plane. The lever arms are caused to rotate about an anchoring point based on anti-phase movement of the drive portions along a first axis in the device plane, and are coupled to the proof masses to cause the proof masses to move in anti-phase along an axis perpendicular to the first axis in the device plane. In response to a Coriolis force applied to the proof masses, the lever arm rotates out of plane and the proof masses move relative to sense electrodes. The movement of the proof masses with respect to the sense electrodes is used to measure angular velocity.
37 Citations
20 Claims
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1. A gyroscope, comprising:
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two first drive masses that move in a first anti-phase drive motion; two first lever arms; two first drive decouplings, wherein each of the two first drive decouplings couples a respective one of the first drive masses to a respective one of the first lever arms and is located between the respective first drive mass and the respective first lever arm to cause the respective first lever arm to rotate in response to the drive motion of the respective first drive mass; two first proof masses; four first proof mass couplings, wherein two of the first proof mass couplings couple one of the two first lever arms to each of the two first proof masses, wherein another two of the first proof mass couplings couple the other of the two first lever arms to each of the two first proof masses, and wherein the two first proof masses move in anti-phase in response to the first anti-phase drive motion; two second drive masses that move in a second anti-phase drive motion; two second lever arms; two second drive decouplings;
wherein each of the two second driving decouplings couples a respective one of the second drive masses to a respective one of the second lever arms and is located between the respective second drive mass and the respective second lever arm to cause the respective second lever arm to rotate in response to the drive motion of the respective second drive mass;two second proof masses; four second proof mass couplings, wherein two of the second proof mass couplings couple one of the second lever arms to each of the two second proof masses, wherein another two of the second proof mass couplings couple the other of the two second lever arms to each of the two second proof masses, and wherein the two second proof masses move in anti-phase in response to the second anti-phase drive motion; and a coupling spring between one of the two first proof masses and one of the two second proof masses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A gyroscope, comprising:
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two drive masses located in a device plane, wherein the two drive masses are decoupled and move in an anti-phase drive motion along a first axis; two lever arms located in the device plane; two drive decouplings located in the device plane, wherein each of the two drive decouplings couples a respective one of the drive masses to a respective one of the lever arms, and is located between the respective drive mass and the respective lever arm to cause the respective lever arm to rotate in response to the drive motion of the respective drive mass; two proof masses located in the device plane; four proof mass couplings located in the device plane, wherein two of the proof mass couplings couple one of the two lever arms to each of the two first proof masses, wherein another two of the proof mass couplings couple the other of the two lever arms to each of the two proof masses, wherein the two first proof masses move in anti-phase in the device plane along a second axis perpendicular to the first axis in response to the first anti-phase drive motion; and one or more sense electrodes located in a plane parallel to the device plane, where, in response to a rotation about a measured axis, the two lever arms rotate out of the device plane about the drive decouplings, where, in response to the rotation, the two proof masses move out of the device plane relative to the one or more sense electrodes, and wherein angular velocity is determined based on the movement of the two proof masses relative to the one or more sense electrodes.
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20. A gyroscope, comprising:
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two drive masses located in a device plane, wherein the two drive masses are decoupled and move in an anti-phase drive motion; two lever arms located in the device plane, wherein each of the lever arms is coupled to one of the two drive masses, and wherein the two lever arms rotate in the device plane response to the anti-phase drive motion; two proof masses located in the device plane; two drive decouplings located in the device plane, wherein each of the drive decouplings couples a respective one of the drive masses to a respective one of the lever arms and is located between the respective drive mass and the respective lever arm; four proof mass couplings located in the device plane, wherein two of the proof mass couplings couple one of the two lever arms to each of the two first proof masses, wherein another two of the proof mass couplings couple the other of the two lever arms to each of the two proof masses, wherein the two first proof masses move in anti-phase in the device plane in response to the first anti-phase drive motion; and one or more sense electrodes located in a plane parallel to the device plane, where, in response to a rotation about a measured axis, the two lever arms rotate out of the device plane in an axis perpendicular to the measured axis, where, in response to the rotation, the two proof masses move out of the device plane relative to the one or more sense electrodes, wherein a linear acceleration out of the device plane does not result in a differential movement of the two proof masses, and wherein angular velocity is determined based on the movement of the two proof masses relative to the one or more sense electrodes.
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Specification