Methods and system for wavelength tunable optical components and sub-systems

• US 10,466,421 B2
• Filed: 03/09/2015
• Issued: 11/05/2019
• Est. Priority Date: 03/07/2014
• Status: Active Grant

• Current Assignee: AEPONYX inc.
• Original Assignee: AEPONYX inc.
• Inventors: Menard, Francois, Menard, Michael, Nabki, Frederic, Berard, Martin, Briere, Jonathan
• Primary Examiner(s): Hollweg, Thomas A
• Assistant Examiner(s): El-Shammaa, Mary A
• Application Number:
  US15/124,198
• Publication Number:
  US 20170017042A1
• Time in Patent Office: 1,702 Days
• CPC Class Codes: G02B 2006/12147 Coupler
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 6/12002 Three-dimensional structures
• CPC Class Codes: G02B 6/12007 forming wavelength selective elements, e.g. multiplexer, demultiplexer
• CPC Class Codes: G02B 6/124 Geodesic lenses or integrated gratings
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3596 With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
• CPC Class Codes: H01S 5/021 Silicon based substrates
• CPC Class Codes: H01S 5/02216 Butterfly-type, i.e. with electrode pins extending horizontally from the housings
• CPC Class Codes: H01S 5/02325 Mechanically integrated components on mount members or optical micro-benches
• CPC Class Codes: H01S 5/12 the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers comprising a photonic bandgap structure H01S5/11; surface-emitting lasers H01S5/18
• CPC Class Codes: H01S 5/141 using a wavelength selective device, e.g. a grating or etalon H01S5/146 takes precedence

Abstract

Wavelength division multiplexing (WDM) has enabled telecommunication service providers to provide multiple independent multi-gigabit channels on one optical fiber. To meet demands for improved performance, increased integration, reduced footprint, reduced power consumption, increased flexibility, re-configurability, and lower cost monolithic optical circuit technologies and microelectromechanical systems (MEMS) have become increasingly important. However, further integration via microoptoelectromechanical systems (MOEMS) of monolithically integrated optical waveguides upon a MEMS provide further integration opportunities and functionality options. Such MOEMS may include MOEMS mirrors and optical waveguides capable of deflection under electronic control. In contrast to MEMS devices where the MEMS is simply used to switch between two positions the state of MOEMS becomes important in all transition positions. Improvements to the design and implementation of such MOEMS mirrors, deformable MOEMS waveguides, and optical waveguide technologies supporting MOEMS devices are presented where monolithically integrated optical waveguides are directly supported, moved and/or deformed by a MEMS.

Claims

1. A device comprising:

a substrate;

a microoptoelectromechanical systems (MOEMS) element integrated upon the substrate in a first predetermined position comprising;

a rotatable microelectromechanical systems (MEMS) element;

an optical waveguide formed upon the rotatable MEMS element rotating under action of the rotatable MEMS element; and

a mirror formed upon the rotatable MEMS element optically coupled to a facet of the optical waveguide;

a plurality of wavelength reflective filters integrated upon the substrate, each wavelength reflective filter of the plurality of wavelength reflective filters in a second predetermined position relative to the MOEMS element and optically coupled to the MOEMS element; and

a reflective optical gain block disposed upon the substrate in a third predetermined position relative to the MOEMS element and optically coupled to the MOEMS element;

wherein

the MOEMS element optically couples optical signals to and from the reflective optical gain block and to and from a selected wavelength reflective filter of the plurality of wavelength reflective filters selected in dependence upon the rotation of the rotatable MEMS element; and

the optical signals propagate within the optical waveguide formed upon the rotatable MEMS element and are reflected by the mirror formed upon the rotatable MEMS element.

2. The device according to claim 1, wherein

the rotatable MEMS element is coupled to a rotational actuator for controlling the rotation of the rotatable MEMS element and a linear actuator for translating the rotatable MEMS element away from a facet of the optical waveguide thereby allowing rotational position setting of the rotatable MEMS actuator prior to re-engaging the rotatable MEMS element against the facet of the optical waveguide.

3. The device according to claim 1, wherein

the rotatable MEMS element comprises:

at least one first feature upon a surface of the rotatable MEMS element with the planar waveguide; and

a plurality of second features disposed upon a facet of the device;

wherein

the MOEMS device further comprises a linear actuator for translating the rotatable MEMS relative to the facet of the device such that;

in a first configuration the rotatable MEMS is moved towards the facet of the device such the at least one first feature is mated to a predetermined second feature of the plurality of second features once the rotatable MEMS element has been rotated to a first predetermined position associated with a selected first wavelength reflective filter of the plurality of wavelength reflective filters; and

in a second configuration the rotatable MEMS is moved away from the facet of the device such that the rotatable MEMS element can be rotated to a second predetermined position associated with a selected second wavelength reflective filter of the plurality of wavelength reflective filters.

4. The device according to claim 1, wherein

the reflective optical gain block comprises:

a first facet having a predetermined high reflectivity over a first optical passband disposed towards an input port of the device; and

a second facet having a predetermined low reflectivity over the first optical passband;

wherein

the first optical passband covers the wavelengths reflected by the plurality of wavelength reflective filters; and

the reflective optical gain block acts in combination with selected wavelength reflective filter of the plurality of wavelength reflective filters as a wavelength specific optical emitter having an optical emission wavelength and bandwidth established by the selected wavelength reflective filter of the plurality of wavelength reflective filters.

5. The device according to claim 1, further comprising

a modulator either monolithically integrated with the reflective optical gain block or integrated upon the substrate.

6. The device according to claim 1, further comprising

a first MEMS actuator coupled to first suspended waveguide portion of an optical circuit integrated upon the substrate which terminates in a first end;

and

a second MEMS actuator coupled to second suspended waveguide portion of an optical circuit integrated upon the substrate which terminates in a second end;

wherein

the first end of the first suspended waveguide portion is disposed towards a first facet of the reflective optical gain block;

the second end of the second suspended waveguide portion is disposed towards a second facet of the reflective optical gain block;

the first MEMS actuator provides adjustment of the position of the first end of the first suspended waveguide portion relative to a three-dimensional waveguide forming part of the reflective optical gain block;

the second MEMS actuator provides adjustment of the position of the second end of the second suspended waveguide portion relative to the three-dimensional waveguide forming part of the reflective optical gain block.

7. The device according to claim 1, further comprising

an optical coupler integrated upon the substrate comprising:

a first port coupled to a first facet of the reflective optical gain block;

a second port coupled to the optical waveguide; and

a third port coupled to an output port of the device;

an optical wavelocker coupled to a second facet of the reflective optical gain block.

8. The device according to claim 7, further comprising

an optical modulator having an input coupled to the third port of the optical coupler and an output coupled to the output port of the device.

9. The device according to claim 1, further comprising

either:

an optical detector disposed upon the substrate coupled a distal end of each wavelength filter of the plurality of wavelength filters to that disposed towards the rotatable MEMS;

or

a plurality of optical detectors, each optical detector of the plurality of optical detectors coupled a distal end of each wavelength filter of a predetermined subset of the plurality of wavelength filters to that disposed towards the rotatable MEMS.

10. The device according to claim 1, further comprising

a planar waveguide region disposed between the rotatable MEMS and an end of each wavelength reflective filter of the plurality of wavelength reflective filters.

11. A device comprising:

a substrate;

a microoptoelectromechanical systems (MOEMS) element integrated upon the substrate in a first predetermined position comprising;

a rotatable microelectromechanical systems (MEMS) element;

an optical waveguide formed upon the rotatable MEMS element rotating under action of the rotatable MEMS element; and

a mirror formed upon the rotatable MEMS element optically coupled to a facet of the optical waveguide;

an optical coupler integrated upon the substrate comprising;

a first port coupled to an optical network for receiving optical signals;

a second port coupled to an optical detector at least one of disposed upon the substrate and integrated upon the substrate;

a third port for coupling first optical signals received by the optical coupler at the first port to the MOEMS element and coupling second optical signals received from the MOEMS element to the optical detector; and

the optical detector disposed upon the substrate;

wherein

the first optical signals received from the network are coupled from the third port of the optical coupler to a selected wavelength reflective filter of a plurality of wavelength reflective filters via the optical waveguide and mirror;

the second optical signals are those optical signals within the first optical signals reflected by the selected wavelength reflective filter of the plurality of wavelength reflective filters and are coupled back to the third port of the optical coupler via the mirror and optical waveguide; and

the selected wavelength filter of the plurality of wavelength reflective filters is established in dependence upon the rotation of the rotatable MEMS element to a predetermined position.

12. The device according to claim 11, wherein

the rotatable MEMS element is coupled to a rotational actuator for controlling the rotation of the rotatable MEMS element and a linear actuator for translating the rotatable MEMS element away from a facet of the optical waveguide thereby allowing rotational position setting of the rotatable MEMS actuator prior to re-engaging the rotatable MEMS element against the facet of the optical waveguide.

13. The device according to claim 12, wherein

the rotatable microelectromechanical systems MEMS element comprises:

at least one first feature upon a surface of the rotatable MEMS element with the planar waveguide; and

a plurality of second features disposed upon a facet of the device;

wherein

the MOEMS device further comprises a linear actuator for translating the rotatable MEMS relative to the facet of the device such that;

in a first configuration the rotatable MEMS is moved towards the facet of the device such the at least one first feature is mated to a predetermined second feature of the plurality of second features once the rotatable MEMS element has been rotated to a first predetermined position associated with a selected first wavelength reflective filter of the plurality of wavelength reflective filters; and

in a second configuration the rotatable MEMS is moved away from the facet of the device such that the rotatable MEMS element can be rotated to a second predetermined position associated with a selected second wavelength reflective filter of the plurality of wavelength reflective filters.

14. The device according to claim 11, further comprising

a planar waveguide region disposed between the rotatable MEMS and an end of each wavelength reflective filter of the plurality of wavelength reflective filters.

15. A device comprising:

a substrate;

a microoptoelectromechanical systems (MOEMS) element integrated upon the substrate in a first predetermined position comprising;

a rotatable microelectromechanical systems (MEMS) element;

an optical waveguide formed upon the rotatable MEMS element rotating under action of the rotatable MEMS element; and

a mirror formed upon the rotatable MEMS element optically coupled to a facet of the optical waveguide;

an optical coupler integrated upon the substrate comprising a first port coupled to an optical network for receiving optical signals and a second port for coupling the received optical signals to the optical waveguide; and

a plurality of transmissive wavelength filters integrated upon the substrate, each comprising a third port for receiving the received optical signals from the optical waveguide after reflection by the mirror and a fourth port for providing wavelength filtered optical signals to an optical detector;

wherein

rotation of the rotatable MEMS element to a predetermined position couples the received optical signals to a predetermined transmissive wavelength filter of the plurality of transmissive wavelength filters via the optical waveguide and mirror.

16. The device according to claim 15, wherein

the rotatable MEMS element is coupled to a rotational actuator for controlling the rotation of the rotatable MEMS element and a linear actuator for translating the rotatable MEMS element away from a facet of the optical waveguide thereby allowing rotational position setting of the rotatable MEMS actuator prior to re-engaging the rotatable MEMS element against the facet of the optical waveguide.

17. The device according to claim 15, wherein

the rotatable MEMS element comprises:

at least one first feature upon a surface of the rotatable MEMS element with the planar waveguide; and

a plurality of second features disposed upon a facet of the device;

wherein

the MOEMS device further comprises a linear actuator for translating the rotatable MEMS relative to the facet of the device such that;

in a first configuration the rotatable MEMS is moved towards the facet of the device such the at least one first feature is mated to a predetermined second feature of the plurality of second features once the rotatable MEMS element has been rotated to a first predetermined position associated with a selected first wavelength reflective filter of the plurality of wavelength reflective filters; and

in a second configuration the rotatable MEMS is moved away from the facet of the device such that the rotatable MEMS element can be rotated to a second predetermined position associated with a selected second wavelength reflective filter of the plurality of wavelength reflective filters.

18. The device according to claim 15, wherein

the optical detector is coupled to all fourth ports of the plurality of transmissive wavelength filters.

19. The device according to claim 15, wherein

the optical detector is one of a plurality of optical detectors;

and

each optical detector of the plurality of optical detectors is coupled to the fourth ports of a predetermined subset of the plurality of transmissive wavelength filters.

20. The device according to claim 15, further comprising

a planar waveguide region disposed between the rotatable MEMS and an end of each wavelength reflective filter of the plurality of wavelength reflective filters.

21. A device comprising:

a substrate;

a microoptoelectromechanical systems (MOEMS) element integrated upon the substrate in a first predetermined position comprising;

a rotatable microelectromechanical systems (MEMS) element;

an optical waveguide formed upon the rotatable MEMS element rotating under action of the rotatable MEMS element; and

a mirror formed upon the rotatable MEMS element optically coupled to a facet of the optical waveguide;

an optical coupler integrated upon the substrate comprising;

a first port coupled to a first port of the device for coupling to a first predetermined portion of an optical network;

a second port coupled to second port of the device for coupling to a second predetermined portion of the optical network;

a third port coupled to the optical waveguide; and

a plurality of fourth ports each coupled to a first end of a wavelength selective filter of a plurality of wavelength selective filters; and

the plurality of wavelength reflective filters, a second end of each wavelength reflective filter of the plurality of wavelength reflective filters being disposed at a predetermined position relative to the rotatable MEMS;

wherein

optical signals received at the first port of the coupler are coupled to the third port of the optical coupler to the rotatable MEMS and therein to a selected wavelength reflective filter of a plurality of wavelength reflective filters via the optical waveguide and mirror;

a first portion of the optical signals reflected by the selected wavelength reflective filter of the plurality of wavelength reflective filters are coupled back to the first port of the optical coupler via the optical waveguide, mirror, and third port of the coupler; and

a second portion of the optical signals not reflected by the selected wavelength reflective filter of the plurality of wavelength reflective filters are coupled to the second port of the optical coupler via the fourth port of the plurality of fourth ports associated with the selected wavelength reflective filter of the plurality of wavelength reflective filters.

22. The device according to claim 21, further comprising

a planar waveguide region disposed between the rotatable MEMS and the second end of each wavelength reflective filter of the plurality of wavelength reflective filters disposed at a predetermined position relative to the rotatable MEMS.