System and method for detecting substrate and manufacturing device

• US 10,467,591 B2
• Filed: 10/21/2016
• Issued: 11/05/2019
• Est. Priority Date: 01/04/2016
• Status: Active Grant

• Current Assignee: BOE Technology Group Co., Ltd.
• Original Assignee: BOE Technology Group Co., Ltd.
• Inventors: Li, Wusheng, Li, Zhengliang, Liu, Zhen
• Primary Examiner(s): Rahman, Md M
• Application Number:
  US15/521,976
• Publication Number:
  US 20180090396A1
• Time in Patent Office: 1,110 Days
• Field of Search: 3562373
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01V 8/10 Detecting, e.g. by using light barriers by reflection from the object G01S17/00
• CPC Class Codes: G01V 8/20 using multiple transmitters or receivers
• CPC Class Codes: G02F 1/1303 Apparatus specially adapted to the manufacture of LCDs
• CPC Class Codes: G02F 1/1309 Repairing; Testing
• CPC Class Codes: G02F 1/133302 Rigid substrates, e.g. inorganic substrates
• CPC Class Codes: G06F 8/65 Updates security arrangements therefor G06F21/57
• CPC Class Codes: G06Q 10/10 Office automation; Time management
• CPC Class Codes: H01L 21/67242 Apparatus for monitoring, sorting or marking testing or measuring during manufacture H01L22/00, marks per se H01L23/544; testing individual semiconductor devices G01R31/26
• CPC Class Codes: H01L 21/67259 Position monitoring, e.g. misposition detection or presence detection
• CPC Class Codes: H01L 22/12 for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions electrical measurement of diffusions H01L22/14
• CPC Class Codes: H01L 22/24 Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change voltage contrast G01R31/311
• CPC Class Codes: H01L 22/30 Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

Abstract

A system and a method for detecting a substrate and a manufacturing device are disclosed. The detection system includes: an emitting unit and a control unit; wherein the emitting unit provides a first reference light and a second reference light, the first reference light propagates to the control unit, the second reference light is modulated by the substrate to generate a test light, the test light propagates to the control unit; the control unit obtains and compares a power of the first reference light and a power of the test light so as to determine whether a foreign matter is present on a surface of the substrate. The detection system can prevent foreign matters such as photoresist from influencing other manufacturing devices such as cleaning and deposition devices, which is beneficial to the maintenance and service of the manufacturing devices.

Claims

1. A detection system for detecting a substrate, comprising an emitter and a controller unit, wherein

the emitter is configured for providing a first reference light and a second reference light, the first reference light propagates to the controller unit, the second reference light is modulated by the substrate to generate a test light, and the test light propagates to the controller unit;

and

the controller unit is configured for obtaining and comparing a power measured in watts of the first reference light and a power measured in watts of the test light so as to determine whether a foreign matter is present on a surface of the substrate,

wherein the second reference light entering the substrate from the surface of the substrate leaves the substrate from an outer surface that is comprised by the substrate and is opposite to the surface of the substrate, and then is received by the controller unit.

2. The detection system of claim 1, wherein the controller unit is configured for giving an alert when the controller unit determines that a foreign matter is present on the surface of the substrate.

3. The detection system of claim 1, wherein the emitter comprises a laser emitter for emitting a laser beam, and a beam splitter which is arranged on a transmission path of the laser beam and configured for splitting the laser beam into the first reference light and the second reference light;

and

the first reference light directly formed due to a slitting function of the beam splitter is directly received by the controller unit.

4. The detection system of claim 3, wherein the beam splitter is a half-reflecting mirror.

5. The detection system of claim 3, wherein the power measured in watts of the first reference light is the same as that of the second reference light.

6. The detection system of claim 1, wherein the controller unit comprises a first power sensor, a second power sensor, a controller and an alarm, wherein,

the first power sensor is configured for receiving the first reference light and calculating the power measured in watts of the first reference light;

the second power sensor is configured for receiving the test light and calculating the power measured in watts of the test light;

the controller is configured for comparing the power measured in watts of the first reference light and the power measured in watts of the test light to obtain a test ratio;

the alarm is configured for giving an alert when it determines that the foreign matter is present on the surface of the substrate based on the test ratio.

7. The detection system of claim 6, wherein in condition that the test ratio is larger than a predetermined value, the alarm determines that the foreign matter is present on the surface of the substrate and gives the alert.

8. The detection system of claim 6, wherein a light-transmissive film is disposed on the surface of the substrate,

the test light is a transmitted light generated after the second reference light is transmitted through the light-transmissive film on the surface of the substrate;

the second power sensor is disposed on the transmission path of the transmitted light.

9. The detection system of claim 6, wherein a reflective film is disposed on the surface of the substrate,

the test light is a reflected light generated after the second reference light is reflected by the reflective film on the surface of the substrate;

the second power sensor is located on the transmission path of the reflected light.

10. The detection system of claim 6, wherein a reflective film is disposed on the surface of the substrate,

the test light is a transmitted light generated after the second reference light incidents on the surface of the substrate and is reflected by the reflective film on the surface of the substrate and then passes through the emitter;

the second power sensor is disposed on the transmission path of the transmitted light.

11. The detection system of claim 1, wherein a sum of optical path lengths of the second reference light and the test light is equal to an optical path length of the first reference light.

12. The detection system of claim 1, wherein the substrate is a substrate to be cleaned and disposed in a cleaning device.

13. The detection system of claim 1, wherein the substrate is a substrate to be deposited and disposed in a deposition device.

14. A manufacturing device comprising the detection system of claim 1.

15. The manufacturing device of claim 14, wherein the manufacturing device is a cleaning device.

16. The manufacturing device of claim 14, wherein the manufacturing device is a deposition device.

17. A detection method for detecting a substrate, comprising:

providing a first reference light and a second reference light, the second reference light is modulated by the substrate to generate a test light;

obtaining and comparing a power measured in watts of the first reference light and a power measured in watts of the test light so as to determine whether a foreign matter is present on a surface of the substrate,

wherein the second reference light entering the substrate from the surface of the substrate leaves the substrate from an outer surface that is comprised by the substrate and is opposite to the surface of the substrate, and then is received by the controller unit.

18. The detection method of claim 17, further comprising:

giving an alert when determining that the foreign matter is present on the surface of the substrate.

19. The detection method of claim 18, further comprising:

comparing the power measured in watts of the first reference light and the power measured in watts of the test light to obtain a test ratio, and giving an alert when the test ratio is larger than a predetermined value and determining that the foreign matter is present on the surface of the substrate.