Integrated light-emitting diode arrays for displays

• US 10,467,952 B2
• Filed: 10/12/2016
• Issued: 11/05/2019
• Est. Priority Date: 10/12/2016
• Status: Active Grant

• Current Assignee: Shaoher Pan
• Original Assignee: Shaoher Pan
• Inventors: Pan, Shaoher
• Primary Examiner(s): Lam, Vinh T
• Application Number:
  US15/291,330
• Publication Number:
  US 20180102085A1
• Time in Patent Office: 1,119 Days
• CPC Class Codes: G06F 2203/04103 Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
• CPC Class Codes: G09G 2300/0408 Integration of the drivers onto the display substrate
• CPC Class Codes: G09G 2300/0452 Details of colour pixel setup, e.g. pixel composed of a red, a blue and two green components
• CPC Class Codes: G09G 2300/08 Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
• CPC Class Codes: G09G 2300/0842 forming a memory circuit, e.g. a dynamic memory with one capacitor
• CPC Class Codes: G09G 2300/0857 Static memory circuit, e.g. flip-flop
• CPC Class Codes: G09G 2310/0267 Details of drivers for scan electrodes, other than drivers for liquid crystal, plasma or OLED displays
• CPC Class Codes: G09G 2310/027 Details of drivers for data electrodes, the drivers handling digital grey scale data, e.g. use of D/A converters
• CPC Class Codes: G09G 2310/0275 Details of drivers for data electrodes, other than drivers for liquid crystal, plasma or OLED displays, not related to handling digital grey scale data or to communication of data to the pixels by means of a current
• CPC Class Codes: G09G 2370/08 Details of image data interface between the display device controller and the data line driver circuit
• CPC Class Codes: G09G 3/2003 Display of colours specific for liquid crystal displays G09G3/3607
• CPC Class Codes: G09G 3/2096 Details of the interface to the display terminal specific for a flat panel suitable for both CRT and flat panel G09G5/006; specific for a CRT G09G1/167
• CPC Class Codes: G09G 3/22 using controlled light sources
• CPC Class Codes: G09G 3/32 semiconductive, e.g. using light-emitting diodes [LED]
• CPC Class Codes: G09G 3/3233 with pixel circuitry controlling the current through the light-emitting element
• CPC Class Codes: G09G 3/3291 in which the data driver supplies a variable data voltage for setting the current through, or the voltage across, the light-emitting elements
• CPC Class Codes: H01L 27/15 including semiconductor components having potential barriers, specially adapted for light emission
• CPC Class Codes: H01L 27/156 two-dimensional arrays
• CPC Class Codes: H01L 2933/0016 relating to electrodes
• CPC Class Codes: H01L 2933/0041 relating to wavelength conversion elements
• CPC Class Codes: H01L 2933/0066 : relating to arrangements for conducting electric current to or from the semiconductor body
• CPC Class Codes: H01L 33/06 : within the light emitting region, e.g. quantum confinement structure or tunnel barrier
• CPC Class Codes: H01L 33/30 : containing only elements of Group III and Group V of the Periodic Table
• CPC Class Codes: H01L 33/504 : Elements with two or more wavelength conversion materials
• CPC Class Codes: H01L 33/62 : Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls

Abstract

Integrated light-emitting diode (LED) arrays based devices or systems and methods of forming the integrated LED arrays based devices or systems are provided. In one aspect, an integrated active-matrix LED display includes a silicon substrate including a first side and a second side, an array of active-matrix LED pixels formed on the first side, each LED pixel including at least one LED and at least one non-volatile memory coupled to the at least one LED, display drivers formed on the first side and coupled to the LED pixels, integrated circuits formed on the second side, and conductive electrodes penetrating through the silicon substrate and coupling the display drivers to the integrated circuits. The integrated circuits transmit image/video data to the display drivers via the conductive electrodes, and the display drivers select particular LED pixels and control the particular LED pixels to emit light based on the image/video data.

Claims

1. A device comprising:

a semiconductor substrate having a first side and a second side, the first and second sides being opposite sides of the semiconductor substrate;

an array of light-emitting pixels monolithically formed on the first side, each of the light-emitting pixels including at least one light-emitting element and at least one non-volatile memory coupled to the at least one light-emitting element, the at least one non-volatile memory including at least one transistor, the at least one light-emitting element comprising multiple layers epitaxially grown on a semiconductor surface of the semiconductor substrate on the first side;

control electronics formed on the second side; and

interconnects penetrating through the semiconductor substrate and conductively coupling the array of pixels on the first side to the control electronics on the second side, such that the pixels are controllable by the control electronics.

2. The device of claim 1, wherein the non-volatile memory includes at least two transistors.

3. The device of claim 1, further comprising scanning drivers and data drivers, wherein each pixel is coupled to one of the scanning drivers through at least one word line and to one of the data drivers through at least one bit line.

4. The device of claim 3, wherein the word lines and the bit lines are formed on the first side.

5. The device of claim 4, wherein the scanning drivers and the data drivers are formed on the first side and coupled to the control electronics through the interconnects.

6. The device of claim 5, wherein a number of the interconnects is smaller than a sum of a number of the scanning drivers and a number of the data drivers.

7. The device of claim 4, wherein the scanning drivers and the data drivers are formed on the second side and coupled to the word lines and the bit lines through the interconnects, and

wherein the scanning drivers and the data drivers are conductively coupled to the control electronics on the second side.

8. The device of claim 3, wherein the word lines and the bit lines are formed on the second side and coupled to the pixels through the interconnects, and

wherein the scanning drivers and the data drivers are formed on the second side and conductively coupled to the control electronics on the second side.

9. The device of claim 3, wherein each pixel includes at least three light-emitting elements operable to emit at least three different colors.

10. The device of claim 9, wherein each of the at least three light-emitting elements is coupled to a respective non-volatile memory in the pixel, and

wherein the respective non-volatile memory is coupled to the one of the scanning drivers through a respective word line and the one of the data drivers through a respective bit line.

11. The device of claim 9, wherein the at least three light-emitting elements comprise red, blue, and green light-emitting diodes (LEDs).

12. The device of claim 11, wherein the at least three light-emitting elements comprise a white LED.

13. The device of claim 9, wherein the at least three light-emitting elements comprise one or more quantum well layers formed by Group III-V compounds.

14. The device of claim 13, wherein the at least three light-emitting elements have the same quantum well layers configured to emit light with a first color, and

wherein at least one of the at least three light-emitting elements comprises a phosphor material or a quantum-dot material configured to emit a second light having a color different from the first color.

15. The device of claim 3, wherein the control electronics comprises a controller configured to transmit a data signal to one or more particular data drivers and one or more particular scanning drivers,

wherein the one or more particular scanning drivers are configured to select one or more light-emitting pixels through corresponding word lines, and

wherein the one or more particular data drivers are configured to transmit a power signal based on the data signal through corresponding bit lines to the selected light-emitting pixels such that the selected light-emitting pixels emit light based on the power signal.

16. The device of claim 15, wherein the control electronics comprises a processor configured to process an image for display, the data signal being based on a result of processing the image.

17. The device of claim 1, wherein the substrate is a silicon semiconductor substrate.

18. The device of claim 17, wherein the silicon substrate has a first surface having a (111) orientation on the first side and a second surface having a (111) orientation on the second side and opposite to the first surface, and

wherein the light-emitting pixels are formed on the first surface, and the control electronics are formed on the second surface.

19. The device of claim 17, wherein the silicon substrate has a first surface having a (111) orientation on the first side and a second surface having a (100) orientation on the second side, the first surface being not parallel to the second surface, and

wherein the light-emitting elements of the pixels are at least partially formed on the first surface, and the control electronics are formed on the second surface.

20. The device of claim 19, wherein the first side comprises an array of trenches defining a plurality of sub-surfaces each having a (111) orientation, the sub-surfaces including the first surface and being not parallel to the second surface, and

wherein the light-emitting elements of the pixels are at least partially formed on the sub-surfaces of the trenches.

21. The device of claim 19, wherein the silicon substrate has a third surface having a (100) orientation on the first side and parallel to the second surface, and

wherein the non-volatile memories of the pixels are formed on the third surface.

22. The device of claim 1, further comprising a protective layer covering the array of light-emitting pixels on the first side and coupled to the non-volatile memories in the light-emitting pixels,

wherein the protective layer and the non-volatile memories form a touch screen position sensor operable to generate an electrical change in response to a touch on a spot of the protective layer.

23. The device of claim 22, wherein the control electronics comprises a touch screen signal processor coupled to the non-volatile memories through the interconnects.

24. The device of claim 1, wherein the control electronics comprises one or more digital signal processors including at least one of:

a digital signal analyzer, a digital processor, an image processor, a volatile memory, a non-volatile memory, or a touch screen processor.

25. The device of claim 1, wherein the control electronics comprises one or more analog signal processors including at least one of:

a light signal sensor, an electrical signal sensor, a sound signal sensor, a sound signal processor, an analog signal amplifier, an analog to digital converter (ADC), a digital to analog converter (DAC), or a touch screen signal processor.

26. An integrated active-matrix light-emitting diode (LED) pixel display, comprising:

a silicon semiconductor substrate having a first side and a second side, the first and second sides being opposite sides of the silicon semiconductor substrate;

an array of active-matrix LED pixels monolithically formed on the first side, each LED pixel including at least one LED and at least one non-volatile memory coupled to the at least one LED, the at least one non-volatile memory including at least one transistor, the at least one LED comprising multiple layers epitaxially grown on a single crystal silicon semiconductor surface of the silicon semiconductor substrate on the first side;

a plurality of display drivers formed on the first side and coupled to the LED pixels;

one or more integrated circuits formed on the second side; and

a plurality of conductive electrodes penetrating through the silicon semiconductor substrate and coupling the display drivers on the first side to the one or more integrated circuits on the second side,

wherein the one or more integrated circuits are operable to transmit image or video data to the display drivers via the conductive electrodes, and the display drivers are operable to select one or more particular LED pixels and control the particular LED pixels to emit light based on the image or video data.

27. The integrated active-matrix LED display of claim 26, wherein the plurality of display drivers comprise scanning drivers and data drivers formed on the first side, and

wherein each of the LED pixels is coupled to one of the scanning drivers through at least one word line and to one of the data drivers through at least one bit line, the word lines and the bit lines being formed on the first side.

28. The integrated active-matrix LED display of claim 27, wherein the one or more integrated circuits comprise a controller configured to transmit the image or video data to one or more particular data drivers and one or more particular scanning drivers,

wherein the one or more particular scanning drivers are configured to select one or more LED pixels through corresponding word lines, and

wherein the one or more particular data drivers are configured to transmit a power signal based on the data signal through corresponding bit lines to the selected LED pixels such that the selected LED pixels emit light based on the power signal.

29. The integrated active-matrix LED display of claim 26, wherein a number of the plurality of conductive electrodes is no more than a number of the plurality of display drivers.

30. The integrated active-matrix LED display of claim 26, wherein the silicon semiconductor substrate comprises:

a first surface along a (111) crystalline plane direction on the first side, the array of active-matrix LED pixels and the display drivers being formed on the first surface; and

a second surface along the (111) crystalline plane direction on the second side, the second surface being opposite to the first surface, the one or more integrated circuits being formed on the second surface.

31. The integrated active-matrix LED display of claim 26, wherein the silicon semiconductor substrate including a first surface along a (111) crystalline plane direction on the first side, the light-emitting elements of the pixels being at least partially formed on the first surface;

a second surface along a (100) crystalline plane direction on the first side, the non-volatile memories of the pixels and the display drivers being formed on the second surface; and

a third surface along the (100) crystalline plane direction on the second side, the one or more integrated circuits being formed on the third surface.

32. The integrated active-matrix LED display of claim 26, wherein each of the pixels includes at least three light-emitting elements operable to emit at least three different colors,

wherein the at least three light-emitting elements comprise same quantum well layers formed by Group III-V compounds and configured to emit light with a first color, and

wherein at least one of the at least three light-emitting elements comprises a phosphor material or a quantum-dot material configured to emit a second light different from the first color.

33. A method of forming integrated light-emitting pixel arrays for display, comprising:

preparing a semiconductor substrate that has a first side and a second side, the first and second sides being opposite sides of the semiconductor substrate;

monolithically forming light-emitting pixel arrays on the first side, each pixel comprising at least one light-emitting element and at least one non-volatile memory coupled to the at least one light-emitting element, the at least one non-volatile memory including at least one transistor, the at least one light-emitting element comprising multiple layers epitaxially grown on a semiconductor surface of the semiconductor substrate on the first side;

forming conductive interconnects through the semiconductor substrate; and

forming one or more integrated circuits on the second side, the interconnects conductively coupling the one or more integrated circuits to the light-emitting pixels such that the light-emitting pixels are operable by the one or more integrated circuits.

34. The method of claim 33, further comprising:

forming scanning drivers and data drivers on the first side; and

forming word lines and bit lines on the first side, such that each pixel is coupled to one of the scanning drivers through at least one word line and to one of the data drivers through at least one bit line,

wherein the scanning drivers and the data drivers are coupled to the one or more integrated circuits through the interconnects.

35. The method of claim 33, further comprising:

forming scanning drivers and data drivers on the second side, wherein the scanning drivers and the data drivers are conductively coupled to the one or more integrated circuits on the second side; and

forming word lines and bit lines on the second side, wherein the pixels are coupled to the word lines and bit lines through the interconnects, such that each pixel is coupled to one of the scanning drivers through at least one word line and to one of the data drivers through at least one bit line.

36. The method of claim 33, wherein the formed light-emitting elements are configured to emit light with a first color,

the method further comprising:

patterning by photoresist the first side to select particular light-emitting elements;

depositing a phosphor film or a quantum-dot film on the selected light-emitting elements; and

removing the photoresist to form light-emitting elements for emitting light with a second color different from the first color.

37. The method of claim 33, wherein the substrate is a (111) silicon semiconductor substrate having a first surface on the first side and a second surface on the second side and opposite to the first surface, and

wherein the light-emitting elements and the non-volatile memories are formed on the first surface, and the one or more integrated circuits are formed on the second surface.

38. The method of claim 33, wherein the substrate is a (100) silicon semiconductor substrate having a first surface along a (100) crystalline plane direction on the first side and a second surface along the (100) crystalline plane direction on the second side, the second surface being parallel to the first surface,

wherein preparing a substrate comprises etching the first side of the substrate to form a third surface having along a (111) crystalline plane, the third surface being not parallel to the first surface.

39. The method of claim 38, wherein forming light-emitting pixel arrays on the first side comprises:

forming the light-emitting elements of the pixels on the third surface; and

forming the non-volatile memories on the first surface, and

wherein forming one or more integrated circuits on the second side comprises;

forming the one or more integrated circuits on the second surface.

40. The method of claim 33, wherein forming light-emitting pixel arrays on the first side comprises:

forming light-emitting diodes (LEDs) including one or more quantum well layers including Group III-V compounds.

41. A method of displaying an image on an integrated display system formed on a semiconductor substrate, the method comprising:

receiving an instruction to display an image on the display system;

analyzing, by a controller of the display system, the image to obtain image data, the controller being formed on a first side of the semiconductor substrate;

transmitting, by the controller, the image data to one or more display drivers formed on a second side of the semiconductor substrate via conductive interconnects penetrating through the semiconductor substrate, the first and second sides being opposite sides of the semiconductor substrate;

selecting, by the display drivers, one or more light-emitting pixels of an array of light-emitting pixels monolithically formed on the second side of the semiconductor substrate, each of the light-emitting pixels comprising at least one light-emitting element that includes multiple layers epitaxially grown on a semiconductor surface of the semiconductor substrate on the second side; and

controlling, by the display drivers, the selected light-emitting pixels to emit light corresponding to the image data to display the image.

42. An integrated light-emitting diode (LED) display device, comprising:

a silicon substrate having a first side and a second side, the first and second sides being opposite sides of the silicon substrate;

an array of light-emitting pixels monolithically formed on the first side, each pixel including at least one light-emitting diode (LED) and at least one non-volatile memory, the at least one non-volatile memory comprising at least one transistor, the at least one LED comprising multiple layers epitaxially grown on a silicon surface of the silicon substrate on the first side;

a plurality of scanning drivers and a plurality of data drivers formed on the first side, wherein each pixel is coupled to a corresponding scanning driver through at least one word line and to a corresponding data driver through at least one data line, the word lines and the data lines being conductive metal lines;

one or more digital signal processors and one or more analog signal processors formed on the second side; and

a plurality of conductive electrodes penetrating through the silicon substrate and between the first side and the second side, the conductive electrodes coupling the plurality of scanning drivers and the plurality of data drivers on the first side to the digital signal processors on the second side to form the integrated LED display device.

43. The integrated LED display device of claim 42, configured to display static or dynamic images or videos with multiple colors.

44. The integrated LED display device of claim 42, wherein each pixel comprises at least an III-V compound based LED operable to emitting a blue color.

45. The integrated LED display device of claim 42, wherein each pixel comprises at least one secondary light emitting material configured to change a primary color emitted by the LED in the pixel, and

wherein the secondary light emitting material comprises at least one of a different color phosphor material or a different size quantum dot material.

46. The integrated LED display device of claim 42, wherein each pixel include at least three LEDs for emitting three primary colors, and where the three primary colors comprise red, blue, and green.

47. The integrated LED display device of claim 42, wherein each non-volatile memory comprises at least two transistors.

48. The integrated LED display device of claim 42, wherein an emitting surface of the LEDs is not parallel to a surface of the silicon substrate.

49. The integrated LED display device of claim 42, wherein the digital signal processors comprise at least one of:

a digital signal analyzer, a digital processor, an image processor, a volatile memory, a non-volatile memory, or a touch screen signal processor.

50. The integrated LED display device of claim 42, wherein the analog signal processors comprise at least one of:

a light signal sensor, an electrical signal sensor, a sound signal sensor, a sound signal processor, an analog signal amplifier, an analog to digital converter (ADC), a digital to analog converter (DAC), or a touch screen signal processor, or any other associated electronic components.

51. The integrated LED display device of claim 42, further comprising a transparent protective layer on the first side and configured to cover the light-emitting pixels,

wherein the transparent protective layer and the non-volatile memories underneath in the light-emitting pixels form a touch screen position sensor.

52. A method of monolithically fabricating an integrate LED pixel display device, comprising:

forming an array of single crystal silicon surfaces parallel to a (111) crystalline plane on a first side of a silicon substrate, the single crystal silicon surfaces being substantially parallel to each other;

epitaxially growing an array of non-organic LEDs on the array of single crystal silicon surfaces of the silicon substrate on the first side;

forming, for each LED pixel, at least one non-volatile memory adjacent to each of the LEDs in the LED pixel and on the first side of the silicon substrate, the at least one non-volatile memory comprising at least one transistor;

forming a plurality of row scanning drivers and a plurality of column data drivers on the first side of the silicon substrate;

forming row metal connection lines and column metal connection lines on the first side of the silicon substrate, wherein each of the LEDs is connected to a corresponding non-volatile memory that is connected to one of the scanning drivers through at least one row metal connection line and to one of the data drivers through at least one column line;

forming conductive electrodes connecting the first side and a second side of the silicon substrate;

forming control electronics on the second side of the silicon substrate; and

forming an array of secondary light emitting elements on surfaces of the formed LEDs by using different color phosphor materials or different size quantum dots materials.

53. A device comprising:

a semiconductor substrate having a first side and a second side, the first and second sides being opposite sides of the semiconductor substrate;

an array of light-emitting pixels monolithically formed on the first side, each pixel including at least one light-emitting element that includes multiple layers epitaxially grown on a semiconductor surface of the semiconductor substrate on the first side;

one or more display drivers formed on the first side and coupled to the array of light-emitting pixels;

control electronics formed on the second side; and

interconnects penetrating through the semiconductor substrate and conductively coupling the control electronics on the second side to the one or more display drivers on the first side, the interconnects comprising conductive materials filled in through-holes of the semiconductor substrate and insulated from inner surfaces of the through-holes with isolation materials different from a material of the semiconductor substrate.

54. The device of claim 53, wherein the display drivers comprise scanning drivers and data drivers, and

wherein each pixel is coupled to one of the scanning drivers through at least one word line and to one of the data drivers through at least one bit line, and the word lines and the bit lines are formed on the first side.

55. The device of claim 54, wherein the control electronics comprises a controller configured to transmit a data signal to one or more particular data drivers and one or more particular scanning drivers,

wherein the one or more particular scanning drivers are configured to select one or more light-emitting pixels through corresponding word lines, and

wherein the one or more particular data drivers are configured to transmit a power signal based on the data signal through corresponding bit lines to the selected light-emitting pixels such that the selected light-emitting pixels emit light based on the power signal.

56. The device of claim 55, wherein the control electronics comprises a processor configured to process an image for display, the data signal being based on a result of processing the image.

57. The device of claim 53, wherein each pixel includes at least three light-emitting elements operable to emit at least three different colors.

58. The device of claim 57, wherein the at least three light-emitting elements comprise red, blue, and green light-emitting diodes (LEDs).

59. The device of claim 57, wherein the at least three light-emitting elements comprise a white LED.

60. The device of claim 57, wherein the at least three light-emitting elements comprise one or more quantum well layers formed by Group III-V compounds.

61. The device of claim 60, wherein the at least three light-emitting elements have the same quantum well layers configured to emit light with a first color, and

wherein at least one of the at least three light-emitting elements comprises a phosphor material or a quantum-dot material configured to emit a second light having a color different from the first color.

62. The device of claim 53, wherein the substrate is a silicon semiconductor substrate.

63. The device of claim 62, wherein the silicon substrate has a first surface having a (111) orientation on the first side and a second surface having a (111) orientation on the second side and opposite to the first surface, and

wherein the light-emitting pixels and the display drivers are formed on the first surface, and the control electronics are formed on the second surface.

64. The device of claim 62, wherein the silicon substrate has a first surface having a (111) orientation on the first side and a second surface having a (100) orientation on the second side, the first surface being not parallel to the second surface, and

wherein the light-emitting elements of the pixels are at least partially formed on the first surface, and the control electronics are formed on the second surface.

65. The device of claim 64, wherein the first side comprises an array of trenches defining a plurality of sub-surfaces each having a (111) orientation, the sub-surfaces including the first surface and being not parallel to the second surface, and

wherein the light-emitting elements of the pixels are at least partially formed on the sub-surfaces of the trenches.

66. The device of claim 64, wherein the silicon substrate has a third surface having a (100) orientation on the first side and parallel to the second surface, and

wherein the display drivers are formed on the third surface.

67. The device of claim 53, wherein the control electronics comprises:

one or more digital signal processors including at least one of;

a digital signal analyzer, a digital processor, an image processor, a volatile memory, a non-volatile memory, or a touch screen processor; and

one or more analog signal processors including at least one of;

a light signal sensor, an electrical signal sensor, a sound signal sensor, a sound signal processor, an analog signal amplifier, an analog to digital converter (ADC), a digital to analog converter (DAC), or a touch screen signal processor.