Nondestructive sample imaging
First Claim
1. A system for imaging an integrated circuit (IC) sample, the system comprising:
- a sample holder configured to secure the IC sample;
an electron beam generator configured to produce an electron beam within a vacuum chamber;
an electron detector configured to measure electrons that have interacted with the IC sample;
a spectral X-ray detector configured to measure first X-rays resulting from the electron beam interacting with the IC sample and second X-rays transmitted through the IC sample, the second X-rays resulting from the electron beam interacting with a target that is positioned between the electron beam generator and the sample holder; and
a memory device configured to store data generated by the electron detector and the spectral X-ray detector.
1 Assignment
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Accused Products
Abstract
A system and method for imaging a sample having a complex structure (such as an integrated circuit) implements two modes of operation utilizing a common electron beam generator that produces an electron beam within a chamber. In the first mode, the electron beam interacts directly with the sample, and backscattered electrons, secondary electrons, and backward propagating fluorescent X-rays are measured. In the second mode, the electron beam interrogates the sample via X-rays generated by the electron beam within a target that is positioned between the electron beam generator and the sample. Transmitted X-rays are measured by a detector within the vacuum chamber. The sample is placed on a movable platform to precisely position the sample with respect to the electron beam. Interferometric and/or capacitive sensors are used to measure the position of the sample and movable platform to provide high accuracy metadata for performing high resolution three-dimensional sample reconstruction.
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Citations
26 Claims
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1. A system for imaging an integrated circuit (IC) sample, the system comprising:
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a sample holder configured to secure the IC sample; an electron beam generator configured to produce an electron beam within a vacuum chamber; an electron detector configured to measure electrons that have interacted with the IC sample; a spectral X-ray detector configured to measure first X-rays resulting from the electron beam interacting with the IC sample and second X-rays transmitted through the IC sample, the second X-rays resulting from the electron beam interacting with a target that is positioned between the electron beam generator and the sample holder; and a memory device configured to store data generated by the electron detector and the spectral X-ray detector. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A system for imaging a sample, the system comprising:
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a sample holder configured to secure the sample; an electron beam generator configured to produce an electron beam within a vacuum chamber; a first spectral X-ray detector, positioned adjacent to the electron beam generator, that is configured to measure first X-rays resulting from the electron beam interacting with the sample; a second spectral X-ray detector, spaced apart from the electron beam generator and the first spectral X-ray detector, that is configured to measure second X-rays resulting from the electron beam interacting with a target that is positioned between the electron beam generator and the sample holder; and a processor configured to receive data generated by the first spectral X-ray detector and the second spectral X-ray detector, and further configured to perform a three-dimensional reconstruction of the sample. - View Dependent Claims (14, 15, 16, 17, 18, 19)
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20. A method for imaging a sample comprising:
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directing an electron beam from an electron beam generator toward the sample and a target positioned between the sample and the electron beam generator; acquiring first data over a first area of the sample in a first mode of operation by measuring backscattered electrons by at least two electron detectors, the backscattered electrons resulting from the electron beam interacting with the sample; acquiring second data over a second area of the sample in a second mode of operation by photon counting of X-rays from the target using a spectral X-ray detector; performing an inversion on the first data and the second data; acquiring one or more model priors for the sample; and generating a reconstruction of the sample using the one or more model priors and the inverted first and second data. - View Dependent Claims (21, 22, 23, 24, 25, 26)
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Specification