×

Micro-device having a plurality of mobile elements arranged in a plurality of embedded cavities

  • US 10,472,227 B2
  • Filed: 03/12/2018
  • Issued: 11/12/2019
  • Est. Priority Date: 03/16/2017
  • Status: Active Grant
First Claim
Patent Images

1. A micro-device comprising at least:

  • a substrate,a stationary element rigidly connected to the substrate,a first mobile element suspended from the stationary element by first retention elements and configured to move with respect to the stationary element,a second mobile element suspended from the first mobile element by at least second retention elements and configured to move with respect to the first mobile element and the stationary element,a first cavity, formed by at least one wall of the stationary element, completely surrounding the first mobile element,a second cavity, formed by at least one wall of the first mobile element, completely surrounding the second mobile element, wherein the second cavity is insulated from the first cavity, and the first cavity surrounds the second cavity.

View all claims
  • 2 Assignments
Timeline View
Assignment View
    ×
    ×