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Sensor and sensor package

  • US 10,473,685 B2
  • Filed: 02/28/2017
  • Issued: 11/12/2019
  • Est. Priority Date: 09/21/2016
  • Status: Active Grant
First Claim
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1. A sensor, comprising:

  • a first support portion;

    a first movable portion extending in a first extension direction and being connected to the first support portion;

    a first piezoelectric element fixed to the first movable portion, the first piezoelectric element including a first electrode, a second electrode provided between the first electrode and the first movable portion, and a first piezoelectric layer provided between the first electrode and the second electrode; and

    a first magnetic element fixed to the first movable portion, the first magnetic element including a first magnetic layer, a second magnetic layer, and a first intermediate layer provided between the first magnetic layer and the second magnetic layer,wherein a length in the first extension direction of the first piezoelectric element is longer than a length in the first extension direction of the first magnetic element.

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