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Inertia measurement module and triaxial accelerometer

  • US 10,473,686 B2
  • Filed: 07/23/2015
  • Issued: 11/12/2019
  • Est. Priority Date: 12/25/2014
  • Status: Active Grant
First Claim
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1. A triaxial accelerometer, comprising:

  • two structurally symmetric inertial measurement modules; and

    a connecting beam for connecting mass blocks in the two inertial measurement modules,wherein each one of the two inertial measurement modules comprises;

    a substrate;

    a first pole piece, as a lower electrode, located on the substrate;

    a mass block suspended above the substrate, an upper electrode for forming a Z-axis detection capacitor with the first pole piece being arranged on the mass block; and

    elastic beams configured to connect the substrate with the mass block, wherein the elastic beams comprise a first elastic beam located in the X-axis direction and a second elastic beam located in the Y-axis direction and cross-connected with the first elastic beam;

    two ends of the second elastic beam are connected with anchor points on the substrate and two ends of the first elastic beam are connected with the mass block, or the two ends of the first elastic beam are connected with the anchor points on the substrate and the two ends of the second elastic beam are connected with the mass block;

    the center(s) of the first elastic beam and/or the second elastic beam are/is deviated from the gravity center of the mass block,wherein the mass block is further provided with a first movable electrode and a second movable electrode in the Y-axis and X-axis directions, respectively; and

    the substrate is provided with a first fixed electrode configured to form a Y-axis detection capacitor with the first movable electrode, and a second fixed electrode configured to form an X-axis detection capacitor with the second movable electrode,wherein the connecting beam comprises transverse beams located in the X-axis direction, and longitudinal beams located in the Y-axis direction;

    one end of the longitudinal beam is connected with the corresponding transverse beam, and the other end thereof is connected with the side wall of the corresponding mass block;

    and the longitudinal beams and the second elastic beams are in the same straight line, andwherein the first elastic beam is located on the center line in the X-axis direction of the mass block, and the second elastic beam is deviated from the center line in the Y-axis direction of the mass block.

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