Waveguide routing configurations and methods

• US 10,473,858 B1
• Filed: 02/08/2019
• Issued: 11/12/2019
• Est. Priority Date: 02/08/2019
• Status: Active Grant

• Current Assignee: II-VI Delaware, Inc. (Coherent Corp.)
• Original Assignee: Finisar Corporation (II-VI Incorporated)
• Inventors: Mahgerefteh, Daniel, Luo, Ying, Lin, Shiyun, Lee, Jin-Hyoung
• Primary Examiner(s): Stahl, Michael
• Application Number:
  US16/271,471
• Time in Patent Office: 277 Days
• Field of Search: None
• CPC Class Codes: G02B 2006/12061 Silicon
• CPC Class Codes: G02B 2006/1209 Multimode
• CPC Class Codes: G02B 2006/12119 Bend
• CPC Class Codes: G02B 2006/12152 Mode converter
• CPC Class Codes: G02B 6/1223 high refractive index type, i.e. high-contrast waveguides
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305
• CPC Class Codes: G02B 6/125 Bends, branchings or intersections
• CPC Class Codes: G02B 6/14 Mode converters

Abstract

An optical waveguide may include a silicon portion and a silicon nitride portion positioned over the silicon portion. The silicon portion may include a taper that decreases a width of the silicon portion. The optical waveguide may include a transition between a loaded single mode or multimode waveguide to a single mode waveguide. The silicon nitride portion may confine optical signals traveling through the optical waveguide in the silicon portion.

Claims

1. An optical waveguide comprising:

a silicon portion including a taper that decreases a width of the silicon portion;

a silicon nitride portion positioned over the silicon portion; and

a bend positioned proximate the taper, wherein the taper changes optical signals traveling through the optical waveguide from multimode to single mode to permit the optical signals to be routed through the bend.

2. The optical waveguide of claim 1, wherein the silicon nitride portion confines optical signals traveling through the optical waveguide in the silicon portion.

3. The optical waveguide of claim 1, wherein the silicon nitride portion extends along a length of the taper and includes a width that stays substantially the same along the length of the taper.

4. The optical waveguide of claim 1, wherein the silicon portion includes a first width on a first side of the taper, and a second width on a second side of the taper opposite the first side, and the second width is smaller than a width of the silicon nitride portion.

5. The optical waveguide of claim 1, wherein the taper transitions the optical waveguide between a loaded single mode or multimode waveguide to a single mode waveguide.

6. The optical waveguide of claim 1, wherein the optical waveguide transitions between a loaded single mode or multimode waveguide to a single mode waveguide.

7. The optical waveguide of claim 1, wherein the silicon portion and the silicon nitride portion are spaced apart from one another such that an optical mode in the silicon portion is confined laterally by the silicon nitride portion.

8. The optical waveguide of claim 1, wherein the silicon portion and the silicon nitride portion are spaced apart from one another.

9. The optical waveguide of claim 1, wherein the silicon portion and the silicon nitride portion extend substantially the same length of the optical waveguide.

10. The optical waveguide of claim 1, the taper comprising a length that is sufficiently long enough to substantially avoid loss of optical signals travelling through the taper.

11. The optical waveguide of claim 1, wherein the silicon portion and the silicon nitride portion extend through the bend.

13. The optical waveguide of claim 1, further comprising a buried oxide portion, wherein the silicon nitride portion and the silicon portion are positioned in the buried oxide portion.

12. An optical waveguide comprising:

a silicon portion including a taper that decreases a width of the silicon portion;

a silicon nitride portion positioned over the silicon portion; and

a bend, wherein the silicon portion and the silicon nitride portion extend through the bend, and the taper decreases a width of the silicon portion prior to the bend.

14. An optical waveguide comprising:

a transition between a loaded single mode or multimode waveguide to a single mode waveguide, the transition comprising;

a silicon portion;

a silicon nitride portion positioned over the silicon portion; and

a taper decreasing a width of the silicon portion;

a bend positioned proximate the taper, wherein the taper changes optical signals traveling through the optical waveguide from multimode to single mode to permit the optical signals to be routed through the bend.

15. The optical waveguide of claim 14, wherein the bend changes the direction of the optical waveguide.

16. The optical waveguide of claim 14, further comprising a second transition between a single mode waveguide to a loaded single mode or multimode waveguide.

17. The optical waveguide of claim 16, the second transition comprising:

a second silicon portion;

a second silicon nitride portion positioned over the second silicon portion; and

a second taper increasing a width of the second silicon portion.

18. The optical waveguide of claim 14, wherein the silicon nitride portion confines optical signals traveling through the optical waveguide in the silicon portion.

19. The optical waveguide of claim 14, wherein the silicon nitride portion extends along a length of the taper and includes a width that stays substantially the same along the length of the taper, and the length of the taper is sufficiently long to substantially avoid loss of optical signals travelling through the taper.