Polymer pen lithography

• US 10,474,029 B2
• Filed: 01/25/2019
• Issued: 11/12/2019
• Est. Priority Date: 04/25/2008
• Status: Active Grant

• Current Assignee: Northwestern University
• Original Assignee: Northwestern University
• Inventors: Mirkin, Chad A., Huo, Fengwei, Zheng, Zijian, Zheng, Gengfeng
• Primary Examiner(s): Simmons, Jennifer E
• Application Number:
  US16/257,143
• Publication Number:
  US 20190265587A1
• Time in Patent Office: 291 Days
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: Y10S 977/856 including etching/cutting
• CPC Class Codes: Y10S 977/874 Probe tip array
• CPC Class Codes: Y10S 977/878 Shape/taper
• CPC Class Codes: Y10S 977/887 Nanoimprint lithography, i.e. nanostamp
• CPC Class Codes: Y10S 977/888 Shaping or removal of materials, e.g. etching
• CPC Class Codes: Y10S 977/902 Specified use of nanostructure

Abstract

The disclosure relates to methods of printing indicia on a substrate using a tip array comprised of elastomeric, compressible polymers. The tip array can be prepared using conventional photolithographic methods and can be tailored to have any desired number and/or arrangement of tips. Numerous copies (e.g., greater than 15,000, or greater than 11 million) of a pattern can be made in a parallel fashion in as little as 40 minutes.

Claims

1. A tip array comprising a plurality of tips fixed to a common substrate layer, the tips and common substrate layer formed from an elastomeric polymer, the elastomeric polymer of the tips comprising a thermoplastic polymer, a silicone polymer, or an epoxy polymer, each tip having a radius of curvature of less than about 1 μ

m, and the plurality of tips, common substrate, and rigid support together are at least transparent.

2. The tip array of claim 1, wherein each tip has a radius of curvature of less than about 0.5 μ

m.

3. The tip array of claim 2, wherein each tip has a radius of curvature of less than about 100 nm.

4. The tip array of claim 1, wherein the tips are arranged in a regular periodic pattern.

5. The tip array of claim 1, wherein the tips are identically-shaped.

6. The tip array of claim 1, wherein the tips are pyramidal.

7. The tip array of claim 1, wherein the thickness of the common substrate layer is about 50 μ

m to about 100 μ

m.

8. The tip array of claim 1, wherein the common substrate layer and tips have a combined thickness of less than about 200 μ

m.

9. The tip array of claim 8, wherein the combined thickness is less than about 150 μ

m.

10. The tip array of claim 9, wherein the combined thickness is about 100 μ

m.

11. The tip array of claim 1, wherein the elastomeric polymer comprises a silicone polymer.

12. The tip array of claim 1, wherein the elastomeric polymer is modified by exposure to oxygen plasma.

13. The tip array of claim 1, wherein the elastomeric polymer is modified by exposure to an oxidizer.

14. The tip array of claim 1, wherein the elastomeric polymer comprises polyethylene, polystyrene, polybutadiene, polyurethane, polyisoprene, polyacrylic rubber, fluorosilicone rubber, or a fluoroelastomer.