Ion-ion plasma atomic layer etch process and reactor

• US 10,475,626 B2
• Filed: 03/17/2015
• Issued: 11/12/2019
• Est. Priority Date: 03/17/2015
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Collins, Kenneth S., Ramaswamy, Kartik, Carducci, James D., Rauf, Shahid, Dorf, Leonid, Yang, Yang
• Primary Examiner(s): MacArthur, Sylvia
• Assistant Examiner(s): Crowell, Michelle
• Application Number:
  US14/660,531
• Publication Number:
  US 20160276134A1
• Time in Patent Office: 1,701 Days
• Field of Search: 118723 ER
• CPC Class Codes: H01J 37/3233 using charged particles
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32422 Arrangement for selecting ions or species in the plasma
• CPC Class Codes: H01J 37/3255 Material
• CPC Class Codes: H01L 21/67213 comprising at least one ion or electron beam chamber coating by ion implantation C23C; ion or electron beam tubes H01J37/00
• CPC Class Codes: H01L 2224/85017 Electron beam cleaning

Abstract

A reactor with an overhead electron beam source is capable of generating an ion-ion plasma for performing an atomic layer etch process.

Claims

1. An electron beam plasma reactor comprising:

(1) an upper plasma chamber comprising;

a side wall,

a top electrode support,

a top electrode thermally coupled to said top electrode support and having a top electrode surface,

an RF source power generator coupled to said top electrode or to said top electrode support or to an interior of said upper plasma chamber, wherein the RF source power generator is configured to apply power that generates a plasma in the upper plasma chamber causes ion bombardment of an interior surface of the top electrode such that secondary electrons are emitted by the top electrode to form an electron beam having an electron beam direction substantially perpendicular to the interior surface of the top electrode,

a first gas distributor to supply a first gas to the upper plasma chamber,

a grid filter facing said top electrode surface; and

(2) a lower plasma chamber, said grid filter separating said upper plasma chamber from said lower plasma chamber, the grid filter configured such that at least a portion of the electron beam propagates through the grid filter and into the lower plasma chamber, the grid filter comprising a plurality of openings, and wherein the openings are configured to prevent flow through the grid filter of at least a portion of electrons and plasma ion from the plasma in the upper plasma chamber such that the openings preferentially pass secondary electrons from the electron beam in comparison to electrons and plasma ion from the plasma in the upper plasma chamber, said lower plasma chamber comprising;

a vacuum chamber body surrounding a processing region, and

a workpiece support pedestal comprising an electrically insulated electrostatic chuck;

a second gas distributor to supply a second electronegative process gas to the lower plasma chamber,

wherein the RF source power generator is configured to apply power and the openings are configured to pass a portion of the electron beam such that the secondary electrons impinge the electronegative process gas in the lower plasma chamber to form a plasma in the lower plasma chamber that has a lower electron temperature than the plasma in the upper plasma chamber and provides an electronegative ion-ion plasma.

2. The plasma reactor of claim 1 further comprising a bias voltage generator coupled to workpiece support pedestal.

3. The plasma reactor of claim 1 wherein said top electrode comprises one of silicon, carbon, silicon carbide, silicon oxide, aluminum oxide, yttrium oxide, zirconium oxide.

4. The plasma reactor of claim 1 wherein said RF source power generator comprises a first RF power generator having a first frequency and a second RF power generator having a second frequency.

5. The plasma reactor of claim 1 further comprising a folded resonator coupled between said RF source power generator and said top electrode.

6. The plasma reactor of claim 1 wherein said grid filter comprises first and second grids facing one another, said plasma reactor further comprising an acceleration voltage source connected to one of said first and second grids.

7. The plasma reactor of claim 1 further comprising:

a window in said side wall;

a coil antenna around said window; and

an RF generator coupled to said coil antenna.

8. The plasma reactor of claim 1, wherein the first gas is a substantially inert gas.

9. The plasma reactor of claim 1, wherein the first gas distributor comprises a gas injector extending through the side wall.

10. The plasma reactor of claim 9, wherein the top electrode is not configured for gas distribution.

11. The plasma reactor of claim 1, wherein the top electrode support includes an electrically insulated electrostatic chuck, and comprising a D.C chucking voltage source coupled to said electrically insulated electrostatic chuck.

12. The plasma reactor of claim 1, comprising a first thermal control apparatus coupled to said top electrode support, wherein the first thermal control apparatus comprises a first plurality of passages in the top electrode support and a first circulation supply coupled to the first plurality of passages and that provides a heat sink for the top electrode support, and a second thermal control apparatus coupled to said workpiece support pedestal, and having a workpiece support surface facing said grid filter, wherein the second thermal control apparatus comprises a second plurality of passages in the workpiece support pedestal and a second circulation supply coupled to the second plurality of passages that provides a heat sink for the workpiece support pedestal.

13. The plasma reactor of claim 1, comprising a first magnet adjacent said upper chamber and a second magnet adjacent said lower chamber, said first and second magnets each having a magnetic field direction parallel to the electron beam direction of said electron beam plasma reactor.

14. The plasma reactor of claim 13, wherein the first magnet is a permanent magnet or an electromagnet.