Microphone package
First Claim
Patent Images
1. A sensor comprising:
- a substrate;
a cover, a part of the cover including a magnetic body;
a film provided between the substrate and the cover, a first cavity being provided between the film and the cover; and
an element provided on the film between the substrate and the cover, the element including a first magnetic layer, a second magnetic layer, and a non-magnetic layer provided between the first magnetic layer and the second magnetic layer.
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Abstract
According to one embodiment, a microphone package includes: a pressure sensing element including a film and a device; and a cover. The film generates strain in response to pressure. The device includes: a first electrode; a second electrode; and a first magnetic layer. The first magnetic layer is provided between the first electrode and the second electrode and has a first magnetization. The cover includes: an upper portion; and a side portion. The side portion is magnetic and provided depending on the first magnetization and the second magnetization.
28 Citations
14 Claims
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1. A sensor comprising:
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a substrate; a cover, a part of the cover including a magnetic body; a film provided between the substrate and the cover, a first cavity being provided between the film and the cover; and an element provided on the film between the substrate and the cover, the element including a first magnetic layer, a second magnetic layer, and a non-magnetic layer provided between the first magnetic layer and the second magnetic layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 12)
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8. A sensor comprising:
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a substrate; a cover, a part of the cover including a magnetic body; a film provided between the substrate and the cover, a cavity being provided between the film and the substrate; and an element provided on the film between the substrate and the cover, the element including a first magnetic layer, a second magnetic layer, and a non-magnetic layer provided between the first magnetic layer and the second magnetic layer. - View Dependent Claims (9, 13)
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10. A sensor comprising:
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a substrate; a cover, a part of the cover including a magnetic body; a film provided between the substrate and the cover, the film being deformable; and an element provided on the film between the substrate and the cover, the element including a first magnetic layer, a second magnetic layer, and a non-magnetic layer provided between the first magnetic layer and the second magnetic layer. - View Dependent Claims (11, 14)
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Specification