Microelectromechanical gyroscope with compensation of quadrature signal components

• US 10,480,944 B2
• Filed: 09/18/2017
• Issued: 11/19/2019
• Est. Priority Date: 01/09/2013
• Status: Active Grant

• Current Assignee: STMicroelectronics International N.V. (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SRL (STMicroelectronics NV)
• Inventors: Donadel, Andrea, Magnoni, Davide, Garbarino, Marco
• Primary Examiner(s): Seo, Justin
• Assistant Examiner(s): Singer, David L
• Application Number:
  US15/707,707
• Publication Number:
  US 20180003504A1
• Time in Patent Office: 792 Days
• Field of Search: 7350402, 7350404, 7350412-50416, 324 7678- 7679
• CPC Class Codes: G01C 19/5726 Signal processing
• CPC Class Codes: G01C 19/5776 Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Abstract

A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.

Claims

1. A device, comprising:

a supporting body;

a sensing mass coupled to the supporting body and movable with respect to the supporting body according to a driving axis and a sensing axis;

a driving circuit that separately outputs a driving signal, a compensation conversion signal, and a reading conversion signal, the sensing mass receives the driving signal to maintain the sensing mass in oscillation according to the driving axis, the driving circuit including;

a phase-lock loop (PLL) circuit that generates a master clock signal and a quadrature clock signal, the quadrature clock signal being phase-shifted by 90°

with respect to the master clock signal;

a controller that generates a control signal based on the quadrature clock signal, the driving circuit configured to generate the driving signal based on the control signal;

an oscillator; and

a clock generator coupled to the PLL circuit and the oscillator, the clock generator configured to generate the compensation conversion signal and the reading conversion signal based on an output of the oscillator and the master clock signal;

a reading circuit coupled to the sensing mass, the reading circuit generates an internal transduction signal representative of a position of the sensing mass according to the sensing axis, receives the reading conversion signal, and generates an output signal representative of an angular speed of the supporting body based on the transduction signal and the reading conversion signal; and

a compensation circuit coupled to the reading circuit in a feedback loop, the compensation circuit receives the transduction signal and the compensation conversion signal, and generates a compensation signal based on the received transduction signal and the compensation conversion signal.

2. The device of claim 1, further comprising:

a driving mass elastically coupled to the supporting body, the sensing mass being coupled to the supporting body via the driving mass.

3. The device of claim 2, further comprising:

a pair of detection capacitors, each of the detection capacitors being coupled between the sensing mass and a respective input of the reading circuit.

4. The device of claim 3, further comprising:

a pair of first driving capacitors, each of the first driving capacitors being coupled between the driving mass and a respective input of the driving circuit; and

a pair of second driving capacitors, each of the second driving capacitors being coupled between the driving mass and a respective output of the driving circuit.

5. The device of claim 4 wherein the driving circuit includes an actuation stage having a variable gain configured to provide the driving signal at the output of the driving circuit.

6. The device of claim 5 wherein the controller controls the gain of the actuation stage based on signals provided to the driving circuit from the first driving capacitors.

7. The device of claim 6 wherein the controller controls the gain of the actuation stage based further on the quadrature clock signal.

8. The device of claim 1 wherein the reading circuit includes:

a reading amplifier having an input coupled to the sensing mass, the reading amplifier being configured to generate the transduction signal; and

a demodulator coupled to the clock generator and to an output of the reading amplifier, the demodulator being configured to demodulate the transduction signal based on the reading conversion signal.

9. The device of claim 8 wherein the compensation circuit includes:

a compensation demodulator coupled to the clock generator and to the output of the reading amplifier, the compensation demodulator being configured to demodulate the transduction signal based on the compensation conversion signal.

10. The device of claim 9 wherein the compensation circuit includes:

a low-pass filter coupled to an output of the compensation demodulator and configured to suppress signal components at twice the frequency of the driving frequency;

a control stage coupled to the low-pass filter; and

a compensation modulator coupled to the control stage and to the clock generator, the compensation modulator being configured to modulate an output of the control stage based on the compensation conversion signal.

11. The device of claim 10 wherein the compensation circuit includes a capacitive coupling stage coupled between an output of the compensation modulator and the input of the reading amplifier.

12. A system, comprising:

a microprocessor; and

a microelectromechanical gyroscope coupled to the microprocessor, the gyroscope including;

a supporting body;

a sensing mass coupled to the supporting body and movable with respect to the supporting body according to a driving axis and a sensing axis;

a driving circuit that drives the sensing mass by a driving signal to maintain the sensing mass in oscillation according to the driving axis, the driving circuit outputs a compensation conversion signal and a reading conversion signal, each of the driving signal, the compensation conversion signal, and the reading conversion signal are separate signals output by the driving circuit, the driving circuit including;

a phase-lock loop (PLL) circuit that generates a master clock signal and a quadrature clock signal, the quadrature clock signal being phase-shifted by 90°

with respect to the master clock signal;

a controller that generates a control signal based on the quadrature clock signal, the driving circuit configured to generate the driving signal based on the control signal;

an oscillator; and

a clock generator coupled to the PLL circuit and the oscillator, the clock generator configured to generate the compensation conversion signal and the reading conversion signal based on an output of the oscillator and the master dock signal;

a reading circuit coupled to the sensing mass, the reading circuit generates an internal transduction signal representative of a position of the sensing mass according to the sensing axis, receives the reading conversion signal, and generates an output signal representative of an angular speed of the supporting body based on the transduction signal and the reading conversion signal; and

a compensation circuit coupled to the reading circuit in a feedback loop, the compensation circuit receives the transduction signal and the compensation conversion signal, and generates a compensation signal based on the received transduction signal and the compensation conversion signal.

13. The system of claim 12 wherein the microprocessor and the microelectromechanical gyroscope are incorporated in at least one of:

a portable computer, a cellphone, a messaging device, a digital music player, a personal digital assistant, a digital camera, a gaming console, or a satellite navigation device.

14. The system of claim 12 wherein the gyroscope further includes a driving mass elastically coupled to the supporting body, the sensing mass being coupled to the supporting body via the driving mass.

15. The system of claim 12 wherein the driving circuit includes an actuation stage having a variable gain configured to output the driving signal, and the controller is configured to control the gain of the actuation stage.

16. A method, comprising:

generating, by a driving circuit, a driving signal;

driving a sensing mass by the driving signal to maintain the sensing mass in oscillation according to a driving axis with a driving frequency, the sensing mass being coupled to a supporting body and movable with respect to the supporting body according to a driving axis and a sensing axis;

generating by a phase-lock loop (PLL) of the driving circuit a master clock signal and a quadrature clock signal that is phase-shifted by 90°

with respect to the master clock signal;

generating, by a controller of the driving circuit, a control signal based on the quadrature clock signal, the generating the driving signal including generating, by the driving circuit, the driving signal based on the control signal;

generating, by a clock generator of the driving circuit, a compensation conversion signal and a reading conversion signal based on an output of an oscillator of the driving circuit and the master clock signal, each of the driving signal, the compensation conversion signal, and the reading conversion signal being separate signals output by the driving circuit;

generating, by a reading circuit coupled to the sensing mass, a transduction signal representative of a position of the sensing mass according to the sensing axis; and

generating, by a compensation circuit, a compensation signal based on the transduction signal and the compensation conversion signal.

17. The method of claim 16, further comprising:

generating, by the reading circuit, an output signal representative of an angular speed of the supporting body based on the transduction signal and the reading conversion signal.

18. The method of claim 17 wherein generating the output signal includes demodulating the transduction signal based on the reading conversion signal.

19. The method of claim 16 wherein generating the compensation signal includes:

extracting an error signal representative of quadrature components in the transduction signal by demodulating the transduction signal based on the compensation conversion signal and suppressing, by a low-pass filter, signal components at twice the frequency of the driving frequency.

20. The method of claim 19 wherein generating the compensation signal further includes:

generating, by a control stage, a demodulated compensation signal based on the error signal; and

modulating the demodulated compensation signal based on the compensation conversion signal.