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Multi-axis positioning device

  • US 10,481,102 B2
  • Filed: 08/02/2018
  • Issued: 11/19/2019
  • Est. Priority Date: 07/03/2014
  • Status: Active Grant
First Claim
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1. A multi-axis positioning system, comprising:

  • a translation stage configured to provide displacement in two dimensions between a base and an upper stage of the translation stage;

    a bottom plate rotatably coupled to the translation stage such that an axis of rotation of the bottom plate in a θ

    rotation direction is perpendicular to a plane defined by the two dimensions of displacement of the translation stage;

    at least one bottom plate motor operatively coupled between the bottom plate and the translation stage, the at least one bottom plate motor being configured to rotate the bottom plate assembly in the θ

    rotation direction relative to the translation stage;

    a top plate operatively coupled to the bottom plate with at least three Z axis motors disposed and operatively coupled between corresponding outer portions of the bottom plate and respective outer portions of the top plate and which are configured to generate displacement between the respective outer portions of the bottom plate and top plate in a Z axis direction substantially parallel to the axis of rotation of the bottom plate;

    a chuck configured to releasably secure a specimen secured to the top plate;

    at least three Z axis position sensors which are disposed and operatively coupled between the upper stage of the translation stage and the top plate and which are configured to measure relative displacement in the Z axis direction between the upper stage and the top plate;

    at least three θ

    position sensors which are operatively coupled between the upper stage of the translation stage and the top plate and which are configured to measure relative angular displacement in the θ

    rotation direction between the upper stage and the top plate; and

    a controller which is operatively coupled to the Z axis motors, the at least one bottom plate motor, the Z axis position sensors and the θ

    position sensors and which is configured to control actuation of the Z axis motors and at least one bottom plate motor.

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