Methods and systems for microelectronic packaging

• US 10,481,336 B2
• Filed: 08/17/2015
• Issued: 11/19/2019
• Est. Priority Date: 08/15/2014
• Status: Active Grant

• Current Assignee: AEPONYX inc., Université du Québec à Montréal
• Original Assignee: AEPONYX inc.
• Inventors: Menard, Francois, Nabki, Frederic, Menard, Michael, Berard, Martin
• Primary Examiner(s): Kianni, Kaveh C
• Application Number:
  US15/504,149
• Publication Number:
  US 20180299622A1
• Time in Patent Office: 1,555 Days
• Field of Search: 385 18
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 5/00 Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
• CPC Class Codes: G02B 2006/12061 Silicon
• CPC Class Codes: G02B 2006/12078 Gallium arsenide or alloys (GaAs, GaAlAs, GaAsP, GaInAs)
• CPC Class Codes: G02B 2006/12085 Integrated
• CPC Class Codes: G02B 2006/12104 Mirror; Reflectors or the like
• CPC Class Codes: G02B 2006/12107 Grating
• CPC Class Codes: G02B 2006/12121 Laser
• CPC Class Codes: G02B 2006/12145 Switch
• CPC Class Codes: G02B 6/00 Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
• CPC Class Codes: G02B 6/12004 Combinations of two or more optical elements
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305
• CPC Class Codes: G02B 6/124 Geodesic lenses or integrated gratings
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3596 With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
• CPC Class Codes: G02B 6/4214 the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device G02B6/4246 takes precedence

Abstract

Hybrid optical integration places very strict manufacturing tolerances and performance requirements upon the multiple elements to exploit passive alignment techniques as well as having additional processing requirements. Alternatively, active alignment and soldering/fixing where feasible is also complex and time consuming with 3, 4, or 6-axis control of each element. However, microelectromechanical (MEMS) systems can sense, control, and activate mechanical processes on the micro scale. Beneficially, therefore the inventors combine silicon MEMS based micro-actuators with silicon CMOS control and drive circuits in order to provide alignment of elements within a silicon optical circuit either with respect to each other or with other optical elements hybridly integrated such as compound semiconductor elements. Such inventive MEMS based circuits may be either maintained as active during deployment or powered off once the alignment has been “locked” through an attachment/retention/latching process.

Claims

1. A device comprising:

a substrate;

an optical waveguide structure comprising;

an optical waveguide formed upon a substrate;

a first suspended optical waveguide section coupled at a first end to the optical waveguide and at a second distal end to a first end of a non-suspended optical waveguide section;

the non-suspended optical waveguide section disposed upon an arm of a first microelectromechanical systems (MEMS) micro-positioner; and

a second suspended waveguide coupled at a first end to a second distal end of the non-suspended optical waveguide section;

the first MEMS micro-positioner comprising a first portion for providing motion of the arm coupled to a first end of the arm;

wherein

the optical waveguide structure is continuous from the first suspended optical waveguide section to the second suspended optical waveguide section.

2. The device according to claim 1, further comprising

a second MEMS micro-positioner comprising a first portion for providing a motion of the aim;

wherein

the first portion of the second MEMS micro-positioner is coupled to a second distal end of the arm;

the first MEMS micro-positioner and the second MEMS micro-positioner are disposed laterally on either side of the optical waveguide structure.

3. The device according to claim 2, wherein

the first MEMS micro-positioner, second MEMS micro-positioner and the arm are one set of linked actuators of a plurality of sets of linked actuators;

each arm within a set of linked actuators supports a non-suspended waveguide portion of a plurality of non-suspended waveguide portions; and

between each sequential pair of non-suspended waveguide portions are joined by a suspended waveguide portion.

4. The device according to claim 2, wherein

the first MEMS micro-positioner, second MEMS micro-positioner and the arm are one set of linked actuators of a plurality of sets of linked actuators each disposed at a predetermined location along the second portion of the optical waveguide structure;

each arm within a set of linked actuators supports a non-suspended waveguide portion of a plurality of non-suspended waveguide portions;

between each sequential pair of non-suspended waveguide portions are joined by a suspended waveguide portion; and

an anchor is disposed along a suspended waveguide portion disposed between a first set of linked actuators of the plurality of sets of linked actuators and another set of linked actuators of the plurality of sets of linked actuators.

5. The device according to claim 4, wherein

the anchor comprises:

a first post disposed to a first side of the suspended optical waveguide section between the sequential pair of non-suspended waveguide portions;

a second post disposed to a second other side of the suspended optical waveguide section between the sequential pair of non-suspended waveguide portions;

a first spring coupling the first post to the suspended optical waveguide section between the sequential pair of non-suspended waveguide portions; and

a second spring coupling the second post to the suspended optical waveguide section between the sequential pair of non-suspended waveguide portions.

6. The device according to claim 2, wherein

each of the first MEMS micro-positioner and the second MEMS micro-positioner provide rotary motion of the arm and each further comprise a linear MEMS actuator for selectively locking and unlocking the first MEMS micro-positioner or second MEMS micro-positioner with which they are associated in order to prevent and allow rotary motion respectively.

7. The device according to claim 2, further comprising:

a first plurality of heaters disposed upon a substrate upon which the first MEMS micro-positioner is formed between the first MEMS micro-positioner and the non-suspended optical waveguide section and beneath the arm;

a second plurality of heaters disposed upon the substrate between the second MEMS micro-positioner and the non-suspended optical waveguide section and beneath the arm;

wherein

the first and second pluralities of heaters allow a material disposed between the first and second pluralities of heaters and the arm to be liquefied when the first and second pluralities of heaters are activated allowing motion of the arm and then solidified when the first and second pluralities of heaters are de-activated to prevent motion of the arm.

8. The device according to claim 2, wherein

the motion of the arm coupling the first MEMS micro-positioner and the second MEMS micro-positioner under action of the first electrostatic actuator and second electrostatic actuator is at least one of rotation and translation.

9. The device according to claim 1, wherein

the motion of the arm under the action of the first portion of the first MEMS micro-positioner is rotation.

10. The device according to claim 1, further comprising;

an anchor located disposed between the first portion of at a predetermined position with respect to an arm linking the first MEMS micro-positioner and the point at which the non-suspended optical waveguide section is supported by the arm.

11. The device according to claim 1, wherein the arm comprises:

a first portion coupled to the first portion of the first MEMS micro-positioner;

a second portion supporting the non-suspended optical waveguide section of the optical waveguide structure; and

a third portion disposed between the first portion and the second portion;

wherein the third portion acts a spring.

12. The device according to claim 1, further comprising:

a plurality of heaters formed upon a substrate upon which the first MEMS micro-positioner is formed and disposed beneath the arm;

wherein

the plurality of heaters allow a material disposed between the plurality of heaters and the arm to be liquefied when the plurality of heaters are activated allowing motion of the arm under the action of the first portion of the first MEMS micro-positioner and then solidified when the heaters are de-activated to prevent motion of the arm.

13. The device according to claim 1, wherein

the first MEMS micro-positioner is one of a pair of MEMS micro-positioners;

the second distal end of the second suspended waveguide is coupled to a first end of another non-suspended optical waveguide section disposed upon an arm of the MEMS micro-positioner of the pair of MEMS micro-positioners;

a second distal end of the another non-suspended optical waveguide section is coupled to a first end of another suspended optical waveguide section.

14. The device according to claim 1, wherein

the first MEMS micro-positioner comprises an electrostatic rotary actuator to move the non-suspended optical waveguide section and an electrostatic linear actuator for selectively locking and unlocking the first MEMS micro-positioner to prevent and allow rotary motion respectively.

15. The device according to claim 1, further comprising:

an actuator control electrode;

wherein

the arm comprises;

a first portion coupled to the first portion of the first MEMS micro-positioner;

a second portion supporting the non-suspended optical waveguide section of the optical waveguide structure; and

a third portion disposed between the first portion and the second portion;

wherein the third portion acts a spring; and

the actuator control electrode is disposed adjacent an end of the second portion of the arm distal to the end of the second portion of the arm coupled to the third portion of the arm; and

activation of the actuator control electrode results in either electrostatic attraction or electrostatic repulsion between the second portion of the arm and the actuator control electrode.

16. The device according to claim 1, further comprising:

a first actuator control electrode;

a second actuator control electrode;

wherein

the arm comprises;

a first portion coupled to the first portion of the first MEMS micro-positioner;

a second portion supporting the non-suspended optical waveguide section of the optical waveguide structure; and

a third portion disposed between the first portion and the second portion;

wherein the third portion acts a spring; and

the first actuator control electrode is disposed in a first position relative to an end of the second portion of the arm distal to the end of the second portion of the arm coupled to the third portion of the arm;

the second actuator control electrode is disposed in a second position relative to the end of the second portion of the arm distal to the end of the second portion of the arm coupled to the third portion of the arm;

activation of the first actuator control electrode results in either electrostatic attraction or electrostatic repulsion between the second portion of the arm and the actuator control electrode; and

activation of the second actuator control electrode results in either electrostatic attraction or electrostatic repulsion between the second portion of the arm and the actuator control electrode.

17. The device according to claim 1, wherein

the optical waveguide, the first suspended optical waveguide section, the non-suspended optical waveguide section, and the second suspended waveguide each comprise a plurality of optical waveguides.

18. The device according to claim 1, wherein

the first suspended optical waveguide section deforms under motion of the first MEMS micro-positioner such that a distance between end of the optical waveguide and the non-suspended optical waveguide section varies under the motion of the first MEMS micro-positioner.

19. The device according to claim 1, further comprising

a pivot coupled to the first suspended optical waveguide section between the optical waveguide and the non-suspended optical waveguide section.

20. The device according to claim 1, wherein

the optical waveguide comprises a first three-dimensional (3D) optical waveguide upon a carrier layer attached to the substrate;

the first suspended optical waveguide section comprises a second 3D optical waveguide comprising only the core;

the second suspended optical waveguide section comprises a third 3D optical waveguide comprising only the core; and

the non-suspended optical waveguide section comprises a fourth 3D optical waveguide upon the carrier layer;

wherein

the first 3D optical waveguide and the fourth 3D optical waveguide each comprises a core formed from a first predetermined material, an upper cladding formed from a second predetermined material and a lower cladding formed from a third predetermined material.