Self directed metrology and pattern classification
First Claim
1. A system configured to determine one or more parameters of a process to be performed on a specimen, comprising:
- a measurement subsystem comprising at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy; and
one or more computer subsystems configured for;
determining an area of a defect detected on the specimen;
correlating the area of the defect with information for a design for the specimen;
determining a spatial relationship between the area of the defect and the information for the design based on results of said correlating; and
automatically generating a region of interest, in which one or more measurements are performed for the specimen, based on the spatial relationship, wherein the one or more measurements are performed in the region of interest by the measurement subsystem during a process performed on the specimen by the measurement subsystem.
1 Assignment
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Accused Products
Abstract
Methods and systems for determining parameter(s) of a process to be performed on a specimen are provided. One system includes one or more computer subsystems configured for determining an area of a defect detected on a specimen. The computer subsystem(s) are also configured for correlating the area of the defect with information for a design for the specimen and determining a spatial relationship between the area of the defect and the information for the design based on results of the correlating. In addition, the computer subsystem(s) are configured for automatically generating a region of interest to be measured during a process performed for the specimen with a measurement subsystem based on the spatial relationship.
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Citations
37 Claims
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1. A system configured to determine one or more parameters of a process to be performed on a specimen, comprising:
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a measurement subsystem comprising at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy; and one or more computer subsystems configured for; determining an area of a defect detected on the specimen; correlating the area of the defect with information for a design for the specimen; determining a spatial relationship between the area of the defect and the information for the design based on results of said correlating; and automatically generating a region of interest, in which one or more measurements are performed for the specimen, based on the spatial relationship, wherein the one or more measurements are performed in the region of interest by the measurement subsystem during a process performed on the specimen by the measurement subsystem. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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36. A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for determining one or more parameters of a process to be performed on a specimen, wherein the computer-implemented method comprises:
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determining an area of a defect detected on the specimen; correlating the area of the defect with information for a design for the specimen; determining a spatial relationship between the area of the defect and the information for the design based on results of said correlating; and automatically generating a region of interest, in which one or more measurements are performed for the specimen, based on the spatial relationship, wherein the one or more measurements are performed in the region of interest by a measurement subsystem during a process performed on the specimen by the measurement subsystem, wherein the measurement subsystem comprises at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy.
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37. A computer-implemented method for determining one or more parameters of a process to be performed on a specimen, comprising:
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determining an area of a defect detected on the specimen; correlating the area of the defect with information for a design for the specimen; determining a spatial relationship between the area of the defect and the information for the design based on results of said correlating; and automatically generating a region of interest, in which one or more measurements are performed for the specimen, based on the spatial relationship, wherein the one or more measurements are performed in the region of interest by a measurement subsystem during a process performed on the specimen by the measurement subsystem, wherein the measurement subsystem comprises at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to the specimen, wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy, and wherein said determining the area, said correlating, said determining the spatial relationship, and said automatically generating are performed by one or more computer systems.
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Specification