Method to produce chemical pattern in micro-fluidic structure

• US 10,486,153 B2
• Filed: 05/23/2017
• Issued: 11/26/2019
• Est. Priority Date: 09/27/2013
• Status: Active Grant

• Current Assignee: Illumina Incorporated
• Original Assignee: Illumina Incorporated
• Inventors: Tsai, Shang-Ying, Hung, Li-Min, Peng, Jung-Huei
• Primary Examiner(s): Sines, Brian J.
• Application Number:
  US15/603,128
• Publication Number:
  US 20170326548A1
• Time in Patent Office: 917 Days
• Field of Search: 264445, 156442, 422502, 422503, 422504, 422554
• CPC Class Codes: B01J 2219/00286 Reactor vessels with top and bottom openings
• CPC Class Codes: B01J 2219/00382 Stamping
• CPC Class Codes: B01J 2219/00637 by coating it with another layer
• CPC Class Codes: B01L 2200/12 Specific details about manufacturing devices
• CPC Class Codes: B01L 2300/0636 Integrated biosensor, microarrays
• CPC Class Codes: B01L 2300/0877 Flow chambers
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2300/0896 Nanoscaled
• CPC Class Codes: B01L 2300/12 Specific details about materials
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: B32B 2307/412 Transparent
• CPC Class Codes: B32B 37/30 Partial laminating
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites

Abstract

The present disclosure provides flow cells and methods of fabricating flow cells. The method includes combining three portions: a first substrate, a second substrate, and microfluidic channels between the first substrate and the second substrate having walls of a photoresist dry film. Through-holes for inlet and outlet are formed in the first substrate or the second substrate. Patterned capture sites are stamped on the first substrate and the second substrate by a nanoimprint lithography process. In other embodiments, parts of the patterned capture sites are selectively attached to a surface chemistry pattern formed of silicon oxide islands each disposed on an outcrop of a soft bottom layer.

Claims

1. A method of forming a flow cell, the method comprising:

transferring an adhesive promoter onto one or both of a first substrate and a second substrate according to a pattern, wherein one or both of the first substrate and the second substrate are transparent;

transferring a bio-medium onto the adhesive promoter to form a capture site pattern;

forming a polymer layer on one or both of the first substrate and the second substrate; and

polymer bonding the first substrate to the second substrate such that the polymer layer extends between a surface of the first substrate and a surface of the second substrate.

2. The method of claim 1, wherein said transferring the adhesive promoter onto one or both of the first substrate and the second substrate comprises stamping the adhesive promoter onto one or both of the first substrate and the second substrate.

3. The method of claim 1, wherein said transferring the bio-medium onto the adhesive promoter comprises stamping the bio-medium onto the adhesive promotor.

4. The method of claim 1, wherein the polymer layer is a patterned polymer layer, and wherein the patterned polymer layer defines microfluidic channels between the first and second substrate.

5. The method of claim 1, further comprising:

forming a through hole in the first or second substrate.

6. The method of claim 1, wherein the polymer layer is formed using a photoresist dry film.

7. The method of claim 1, further comprising baking the first substrate, the second substrate, or both at a temperature less than 100 degrees Celsius.

8. The method of claim 1, wherein:

one or both of the first substrate and the second substrate comprise a base substrate, a soft bottom layer on the base substrate, and a coated top layer on the soft bottom layer; and

said transferring the adhesive promoter onto one or both of the first substrate and the second substrate comprises;

punching an indentation through the coated top layer and into the soft bottom layer, and

exposing remaining portions of the coated top layer to the adhesive promotor, which reacts with and adheres to the remaining portions of the coated top layer.

9. The method of claim 8, wherein the soft bottom layer comprises a thermal plastic resin layer or a metal layer.

10. The method of claim 8, wherein the soft bottom layer comprises a metal layer that includes one or more of aluminum, copper, titanium, or an alloy thereof.

11. The method of claim 9, wherein the coated top layer comprises silicon oxide.

12. The method of claim 11, wherein a thickness of the soft bottom layer is in a range of 3 microns to 10 microns, and a thickness of the coated top layer is in a range of 1000 angstroms to 5000 angstroms.

13. The method of claim 9, wherein the soft bottom layer is deposited using a physical vapor deposition process, a chemical vapor deposition process, or a spin-on process.

14. The method of claim 9, wherein the coated top layer is a spin-on glass deposited using a spin-on process.

15. The method of claim 1, wherein:

said transferring the adhesive promoter onto one or both of a first substrate and a second substrate comprises transferring the adhesive promotor onto both the first substrate and the second substrate;

said transferring the bio-medium onto the adhesive promoter forms a first capture site pattern on the first substrate, and a second capture site pattern on the second substrate.

16. The method of claim 15, wherein said polymer bonding the first substrate to the second substrate is performed such that the plurality of first capture sites are aligned to the plurality of second capture sites.

17. The method of claim 1, wherein said polymer bonding the first substrate to the second substrate comprises UV-curing the polymer layer.

18. The method of claim 1, wherein the adhesive promotor is a silane-based adhesive promotor.

19. The method of claim 1, wherein the adhesive promotor comprises hexamethyldisilazane or 3-aminopropyl triethoxysilane.

20. The method of claim 1, wherein the bio-medium comprises agar or hydrogel.