Semiconductor manufacturing device with embedded fluid conduits

• US 10,486,232 B2
• Filed: 04/21/2015
• Issued: 11/26/2019
• Est. Priority Date: 04/21/2015
• Status: Active Grant

• Current Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Original Assignee: Varian Semiconductor Equipment Associates Incorporated (Applied Materials Incorporated)
• Inventors: Abeshaus, Joshua M., Tye, Jordan B.
• Primary Examiner(s): Dunn, Colleen P
• Assistant Examiner(s): Jones, Jeremy C
• Application Number:
  US14/692,189
• Publication Number:
  US 20160311020A1
• Time in Patent Office: 1,680 Days
• CPC Class Codes: B22F 10/28 Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
• CPC Class Codes: B22F 2005/005 Article surface comprising protrusions
• CPC Class Codes: B33Y 10/00 Processes of additive manufacturing
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: H01J 2237/002 Cooling arrangements
• CPC Class Codes: H01J 2237/0041 Neutralising arrangements
• CPC Class Codes: H01J 2237/061 Construction
• CPC Class Codes: H01J 2237/2001 Maintaining constant desired temperature
• CPC Class Codes: H01J 37/3171 for ion implantation
• CPC Class Codes: Y02P 10/25 Process efficiency

Abstract

Provided herein are approaches for forming a conduit embedded within a component of a semiconductor manufacturing device (e.g., an ion implanter) using an additive manufacturing process (e.g., 3-D printing), wherein the conduit is configured to deliver a fluid throughout the component to provide heating, cooling, and gas distribution thereof. In one approach, the conduit includes a set of raised surface features formed on an inner surface of the conduit for varying fluid flow characteristics within the conduit. In another approach, the conduit may be formed in a helical configuration. In another approach, the conduit is formed with a polygonal cross section. In another approach, the component of the ion implanter includes at least one of an ion source, a plasma flood gun, a cooling plate, a platen, and/or an arc chamber base.

Claims

1. A method comprising:

forming a conduit embedded between an interior surface and an exterior surface of a sidewall of a tubular component of an ion source using an additive manufacturing process, wherein the additive manufacturing process includes forming the conduit and the component simultaneously by depositing a series of horizontal layers of a material stacked into a desired configuration of the component, wherein the conduit includes a set of raised features formed on an inner surface of the conduit, and wherein the conduit has a pentagonal cross-section defined by a bottom surface, a set of sidewalls, and a substantially triangular-shaped top portion; and

connecting the conduit with an inlet and outlet located within a base section of the tubular component, wherein the inlet, the outlet, and the conduit operate to deliver a cooling fluid through the tubular component.

2. The method of claim 1, the set of raised features extending into an interior area of the conduit.

3. The method of claim 1, the set of raised features including at least one of:

a plurality of protrusions, and a plurality of ridges.

4. The method of claim 1, further comprising forming the conduit in a helical configuration extending around an entire circumference of the sidewall of the tubular component.

5. The method of claim 1, further comprising forming the conduit embedded within the tubular component by one of:

an extrusion-based process, jetting, selective laser sintering, powder/binder jetting, electron-beam melting, and a stereolithographic process.

6. A method comprising forming a conduit between an interior surface and an exterior surface of a sidewall of a tubular component of an ion implanter using an additive manufacturing process, wherein the additive manufacturing process includes forming the conduit and the component simultaneously by depositing a series of horizontal layers of a material stacked into a desired configuration of the component, wherein the conduit includes a set of raised surface features formed on an inner surface of the conduit, wherein the set of raised surface features extends into an interior area of the conduit, wherein the conduit is formed in a helical configuration extending around an entire circumference of the sidewall of the tubular component, and wherein the conduit has a pentagonal cross-section defined by a bottom surface, a set of sidewalls, and a substantially triangular-shaped top portion.

7. The method of claim 6, the set of raised features including at least one of:

a plurality of protrusions, and a plurality of ridges.

8. The method of claim 6, the tubular component comprising an ion source.

9. The method of claim 6, further comprising forming the conduit embedded within the component by one of:

an extrusion-based process, jetting, selective laser sintering, powder/binder jetting, electron-beam melting, and a stereolithographic process.