Damage-free self-limiting through-substrate laser ablation

• US 10,486,268 B2
• Filed: 02/18/2017
• Issued: 11/26/2019
• Est. Priority Date: 11/07/2014
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Doany, Fuad E., Narayan, Chandrasekhar
• Primary Examiner(s): Tucker, Philip C
• Assistant Examiner(s): Harm, Nickolas R
• Application Number:
  US15/436,775
• Publication Number:
  US 20170157712A1
• Time in Patent Office: 1,011 Days
• Field of Search: 156712, 156753, 428620, 428623, 428626, 428632, 428702
• CPC Class Codes: B23K 2103/42 Plastics B23K2103/16 takes precedence
• CPC Class Codes: B23K 2103/50 Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
• CPC Class Codes: B23K 26/0622 by shaping pulses
• CPC Class Codes: B23K 26/0652 comprising prisms
• CPC Class Codes: B23K 26/082 Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
• CPC Class Codes: B23K 26/0869 Devices involving movement of the laser head in at least one axial direction
• CPC Class Codes: B23K 26/18 using absorbing layers on the workpiece, e.g. for marking or protecting purposes
• CPC Class Codes: B23K 26/352 for surface treatment
• CPC Class Codes: B23K 26/402 involving non-metallic material, e.g. isolators
• CPC Class Codes: B32B 17/06 comprising glass as the main or only constituent of a layer, next to another layer of a specific material
• CPC Class Codes: B32B 2255/24 Organic non-macromolecular coating
• CPC Class Codes: B32B 2307/40 having particular optical properties light or UV resistant B32B2307/71
• CPC Class Codes: B32B 2457/20 Displays, e.g. liquid crystal displays, plasma displays
• CPC Class Codes: B32B 38/10 Removing layers, or parts of layers, mechanically or chemically
• CPC Class Codes: B32B 43/006 Delaminating
• CPC Class Codes: B32B 7/06 permitting easy separation
• CPC Class Codes: C09J 2301/502 process for debonding adherents
• CPC Class Codes: C09J 2479/08 polyimide
• CPC Class Codes: C09J 5/00 Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
• CPC Class Codes: H01L 21/02002 Preparing wafers
• CPC Class Codes: H01L 21/268 : using electromagnetic radiation, e.g. laser radiation
• CPC Class Codes: H01L 21/6835 : using temporarily an auxiliary support
• CPC Class Codes: H01L 2221/68381 : Details of chemical or physical process used for separating the auxiliary support from a device or wafer
• CPC Class Codes: Y10T 156/1158 : Electromagnetic radiation applied to work for delamination [e.g., microwave, uv, ir, etc.]
• CPC Class Codes: Y10T 156/1917 : Electromagnetic radiation delaminating means [e.g., microwave, uv, ir, etc.]

Abstract

A first substrate, bonded to a second substrate by a material, is provided. The first substrate is transparent to at least some wavelengths of electromagnetic radiation. The first substrate is irradiated with the electromagnetic radiation to which the first substrate is transparent, such that the electromagnetic radiation impinges on the material causing a decomposition thereof at a location at an interface between the first substrate and the material. The decomposition results in, at the location, an interface of the first substrate and an atmosphere of the decomposition. The atmosphere of the decomposition has an optical property resulting in ceasing the decomposition of the material.

Claims

1. A product comprising:

a first substrate that is transparent to at least a first wavelength of electromagnetic radiation;

a second substrate that is bonded to a bottom surface of the first substrate; and

a material that is disposed between and bonds the second substrate and the first substrate, and that defines an interface plane with the first substrate;

wherein upon exposure to electromagnetic radiation of the first wavelength at an intensity greater than a threshold that is a photochemical property of the material, the material decomposes to form an atmosphere of decomposition adjacent to the interface plane;

wherein the first substrate and the material have optical properties that cause transmission of the electromagnetic radiation of the first wavelength from the first substrate into the material when the electromagnetic radiation of the first wavelength impinges on the material at a laser incidence angle from the normal of the interface plane;

wherein the first substrate and the atmosphere of decomposition have optical properties that cause total internal reflection of the electromagnetic radiation of the first wavelength when the electromagnetic radiation of the first wavelength impinges on the atmosphere of decomposition at the laser incidence angle from the normal of the interface plane;

wherein at least a portion of a top surface of the first substrate is angled relative to the bottom surface of the first substrate such that the electromagnetic radiation of the first wavelength, impinging on the top surface of the first substrate at a chosen angle from normal to the top surface of the first substrate, impinges on the interface plane at the laser incidence angle from the normal of the interface plane, resulting in transmission of the electromagnetic radiation of the first wavelength through the interface plane between the first substrate and the material and resulting in total internal reflection of the electromagnetic radiation of the first wavelength from the interface plane between the first substrate and the atmosphere of decomposition.

2. A product comprising:

a first substrate that is transparent to at least a first wavelength of electromagnetic radiation;

a second substrate that is bonded to a bottom surface of the first substrate;

a material that is disposed between and bonds the second substrate and the first substrate; and

a prism that is optically coupled to the first substrate;

wherein upon exposure to electromagnetic radiation of the first wavelength at an intensity greater than a threshold that is a photochemical property of the material, the material decomposes to form an atmosphere of decomposition;

wherein one of the prism or the first substrate defines an interface plane where the one of the prism or the first substrate directly contacts the material;

wherein the one of the prism or the first substrate and the material have optical properties that cause transmission of the electromagnetic radiation of the first wavelength into the material when the electromagnetic radiation of the first wavelength impinges on the material at a laser incidence angle from the normal of the interface plane;

wherein the first substrate and the atmosphere of decomposition have optical properties that cause total internal reflection of the electromagnetic radiation of the first wavelength in the first substrate when the electromagnetic radiation of the first wavelength impinges on the atmosphere of decomposition at the laser incidence angle from the normal of the interface plane;

wherein the prism includes a surface that is angled relative to the bottom surface of the first substrate such that the electromagnetic radiation of the first wavelength, impinging on the prism at a chosen angle, impinges on the interface plane at the laser incidence angle from the normal of the interface plane, resulting in transmission of the electromagnetic radiation of the first wavelength through the interface plane between the first substrate and the material and resulting in total internal reflection of the electromagnetic radiation of the first wavelength from the interface plane between the first substrate and the atmosphere of decomposition.

3. The product as claimed in claim 2 further comprising an array of prisms optically coupled to the first substrate, wherein the array of prisms is index-matched to the first substrate.

4. The product as claimed in claim 3 wherein the array of prisms is disposed on a top surface of the first substrate.

5. The product as claimed in claim 3 wherein the array of prisms is integral with the first substrate.

6. An apparatus comprising:

a first substrate that is transparent to at least a first wavelength of electromagnetic radiation;

a second substrate that is bonded to a bottom surface of the first substrate;

a material disposed between and bonding the second substrate and the first substrate;

a prism that is optically coupled to the first substrate and disposed at one of a top surface or a bottom surface of the first substrate; and

a laser that is arranged to emit electromagnetic radiation of the first wavelength toward the first substrate at a chosen angle relative to the normal of the other of the top surface or the bottom surface of the first substrate;

wherein upon exposure to electromagnetic radiation of the first wavelength at a intensity greater than a given threshold that is a photochemical property of the material, the material decomposes to form an atmosphere of decomposition;

wherein one of the prism or the first substrate defines an interface plane where the one of the prism or the first substrate directly contacts the material;

wherein the one of the prism or the first substrate and the material have optical properties that cause transmission of the electromagnetic radiation of the first wavelength into the material when the electromagnetic radiation of the first wavelength impinges on the material at a laser incidence angle from the normal of the interface plane;

wherein the one of the prism or the first substrate and the atmosphere of decomposition have optical properties that cause total internal reflection of the electromagnetic radiation of the first wavelength in the first substrate when the electromagnetic radiation of the first wavelength impinges on the atmosphere of decomposition at the laser incidence angle from the normal of the interface plane;

wherein the prism includes a surface that is angled relative to the other of the top surface or the bottom surface of the first substrate such that refraction of the electromagnetic radiation of the first wavelength by the prism and the first substrate causes the electromagnetic radiation of the first wavelength, which impinges upon the prism or the first substrate at the chosen angle, to impinge on the atmosphere of decomposition at the laser incidence angle from the normal of the interface plane, resulting in transmission of the electromagnetic radiation of the first wavelength through the interface plane between the first substrate and the material and resulting in total internal reflection of the electromagnetic radiation of the first wavelength from the interface plane between the first substrate and the atmosphere of decomposition.

7. The apparatus as claimed in claim 6 wherein the prism is one of an array of prisms optically coupled to the first substrate, wherein the array of prisms is index-matched to the first substrate.

8. The apparatus as claimed in claim 7 wherein the prism is disposed at the bottom surface of the first substrate and the chosen angle is less than the laser incidence angle.

9. The apparatus as claimed in claim 6 wherein the prism is disposed at the top surface of the first substrate and the chosen angle is greater than the laser incidence angle.

10. The apparatus as claimed in claim 6 wherein the first substrate comprises at least one of a glass and a fused silica material transparent to at least one of visible and near-ultraviolet wavelengths of the electromagnetic radiation.

11. The apparatus as claimed in claim 6 wherein the first substrate comprises a semiconductor wafer transparent to infrared wavelengths of the electromagnetic radiation.

12. The apparatus as claimed in claim 6 wherein the material comprises a polyimide polymer.

13. The apparatus as claimed in claim 6 wherein the second substrate comprises one of a semiconductor substrate and a glass substrate for a flat panel display.