Spectral filter having controllable spectral bandwidth and resolution

• US 10,488,256 B2
• Filed: 05/25/2018
• Issued: 11/26/2019
• Est. Priority Date: 05/26/2017
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Scherer, Axel, Jeon, Taeyoon
• Primary Examiner(s): Nur, Abdullahi
• Application Number:
  US15/990,114
• Publication Number:
  US 20180340826A1
• Time in Patent Office: 550 Days
• CPC Class Codes: G01J 3/108 for measurement in the infrared range
• CPC Class Codes: G01J 3/1895 using fiber Bragg gratings or gratings integrated in a waveguide
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01J 3/2803 using photoelectric array detector
• CPC Class Codes: G01J 3/45 Interferometric spectrometry

Abstract

A Fabry-Perot cavity-based spectral notch filter is disclosed, where the filter is operative for providing an output optical signal whose spectral content is spatially dispersed along at least one direction, while also controlling the spectral position and spectral range of the output light. In some embodiments, the spectral filter is integrated with a detector arrays to realize a compact, high-resolution spectrometer that can rapidly acquire the absorption spectrum of a sample with high sensitivity.

Claims

1. An apparatus comprising a spectral filter that is operative for receiving a first light signal characterized by a first spectral range and providing a second light signal that is spectrally dispersed along a first direction, wherein the second light signal is characterized by a second spectral range within the first spectral range, and wherein the spectral filter includes:

a first mirror that is planar and partially transmissive for the first light signal;

a second mirror that is planar and partially transmissive for the first light signal, wherein the first mirror and second mirror define an optically resonant cavity having a cavity length that is controllable along the first direction; and

a first actuator that is configured to control a first separation between the first mirror and second mirror at a first location, wherein a first angle of the first mirror relative to the second mirror along the first direction is based on the first separation;

wherein the second spectral range has a first spectral width that is based on the first angle; and

wherein the spectral filter is configured such that, when the first light signal propagates along a second direction and the spectral filter is in its quiescent state, each of the first mirror and second mirror is oriented at a second angle relative to the second direction, and wherein the second angle is not equal to 90°

.

2. The apparatus of claim 1 wherein the spectral filter is operative for providing the second light signal such that it is also spectrally dispersed along a second direction that is orthogonal with the first direction, the second light signal being characterized by a third spectral range along the second direction, and wherein the spectral filter further includes a second actuator that is configured to control a second angle of the first mirror relative to the second mirror along the second direction, and further wherein the third spectral range has a second spectral width that is based on the second angle.

3. The apparatus of claim 1 further comprising a second actuator that is configured to control a second separation between the first mirror and second mirror at a second location, wherein the second separation defines one of the minimum wavelength and maximum wavelength of the second spectral range.

4. The apparatus of claim 1 wherein the second mirror is a Bragg mirror that comprises a plurality of layers of a first material, wherein each pair of adjacent layers of the plurality thereof is separated by an air gap.

5. The apparatus of claim 1 wherein the second spectral range includes at least a portion of the mid-infrared spectral range.

6. The apparatus of claim 1 further comprising a plurality of detectors that is configured to receive the second light signal from the spectral filter, wherein the spectral filter and plurality of detectors are arranged such that each detector of the plurality thereof receives a different wavelength signal of a plurality of wavelength signals that are characterized by different wavelengths within the second spectral range.

7. The apparatus of claim 6 further comprising:

a light source for providing the first light signal; and

a sample chamber for containing a sample;

wherein the light source, the spectral filter, and the sample chamber are dimensioned and arranged such that the plurality of detectors receives the plurality of wavelength signals after the plurality of wavelength signals have passed through the sample chamber.

8. The apparatus of claim 7 wherein the sample chamber is located between the first mirror and second mirror.

9. An apparatus comprising a spectral filter that is operative for receiving a first light signal characterized by a first spectral range and providing a second light signal that is spectrally dispersed along a first direction, wherein the second light signal is characterized by a second spectral range within the first spectral range, and wherein the spectral filter includes:

a first mirror that is planar and partially reflective for the first light signal;

a second mirror that is planar and partially reflective for the first light signal, wherein the second mirror is moveable with respect to the first mirror, and wherein the second mirror is parallel with the first mirror when the spectral filter is in its quiescent state; and

a first actuator that is configured to control a first angle between the first mirror and the second mirror along a first direction, wherein the second spectral range has a first spectral width that is based on the first angle;

wherein the spectral filter is configured such that, when the first light signal propagates along a second direction and the spectral filter is in its quiescent state, each of the first mirror and second mirror is oriented at a second angle relative to the second direction, and wherein the second angle is not equal to 90°

.

10. The apparatus of claim 9 wherein the spectral filter further includes a second actuator that is configured to control one of the minimum wavelength and maximum wavelength of the second spectral range.

11. The apparatus of claim 10 wherein the first actuator is configured to control a first separation between the first mirror and second mirror at a first location, the first angle being based on the first separation, and wherein the second actuator is configured to control a second separation between the first mirror and second mirror at a second location, the one of the minimum wavelength and maximum wavelength of the second spectral range being based on the second separation.

12. The apparatus of claim 9 wherein the second mirror is a Bragg mirror that comprises a plurality of layers of a first material, wherein each pair of adjacent layers of the plurality thereof is separated by an air gap.

13. The apparatus of claim 9 wherein the second spectral range includes at least a portion of the mid-infrared spectral range.

14. The apparatus of claim 9 further comprising a plurality of detectors that is configured to receive the second light signal from the spectral filter, wherein the spectral filter and plurality of detectors are arranged such that each detector of the plurality thereof receives a different wavelength signal of a plurality of wavelength signals that are characterized by different wavelengths within the second spectral range.

15. The apparatus of claim 14 further comprising:

a light source for providing the first light signal; and

a sample chamber for containing a sample;

wherein the light source, the spectral filter, and the sample chamber are dimensioned and arranged such that the plurality of detectors receives the plurality of wavelength signals after the plurality of wavelength signals have passed through the sample chamber.

16. The apparatus of claim 15 wherein the sample chamber is located between the first mirror and second mirror.

17. A method comprising:

(1) receiving a first light signal at a spectral filter that is characterized by a first spectral range, wherein the spectral filter includes;

(i) a first mirror that is planar and partially transmissive for the first light signal; and

(ii) a second mirror that is planar and partially transmissive for the first light signal, wherein the second mirror has a first angle relative to the first mirror along a first direction, and wherein the first angle is controllable;

wherein the first and second mirror define an optically resonant cavity having a cavity length that is a first linear function of position along the first direction;

wherein the first light signal is received along a second direction, and wherein, when the spectral filter is in its quiescent state, each of the first and second mirrors is oriented at a second angle relative to the second direction, and further wherein the second angle is not equal to 90°

;

(2) controlling the first angle such that it has a first magnitude; and

(3) providing a second light signal from the spectral filter such that it is spectrally dispersed along the first direction, the second light signal being characterized by a second spectral range that is within the first spectral range, the second spectral range having a first spectral width that is based on the first magnitude.

18. The method of claim 17 further comprising (4) controlling a first separation between the first and second mirrors at a first location such that the first separation has a second magnitude, wherein one of the maximum wavelength and minimum wavelength of the second spectral range is based on the second magnitude.

19. The method of claim 17 further comprising (4) providing the spectral filter such that at least one of the first mirror and second mirror is a Bragg mirror that includes a plurality of layers of a first material, wherein each pair of adjacent layers of the plurality thereof is separated by an air gap.

20. The method of claim 17 wherein the second spectral range includes at least a portion of the mid-infrared spectral range.

21. The method of claim 17 further comprising:

(4) receiving the second light signal at a plurality of detectors arranged along the first direction such that each detector of the plurality thereof receives a different wavelength signal of a first plurality of wavelength signals that are characterized by different wavelengths within the second spectral range; and

(5) providing a first plurality of output signals, wherein each output signal of the first plurality thereof is based on the magnitude of a different wavelength signal of the first plurality thereof.

22. The method of claim 21 further comprising:

(6) providing a sample such that it is located between a light source and the plurality of detectors, wherein the light source is operative for providing the first light signal, and wherein the second light signal is received at the plurality of detectors after the second light signal has passed through a sample; and

(7) determining property of the sample based on the plurality of output signals.

23. The method of claim 22 wherein the sample is provided such that it is located between the first mirror and second mirror.

24. The method of claim 17 further comprising:

(4) controlling the first angle such that it has a second magnitude; and

(5) providing a third light signal from the spectral filter such that it is spectrally dispersed along the first direction, the third light signal being characterized by a third spectral range that is within the first spectral range, and the third spectral range having a second spectral width that is based on the second magnitude, wherein the first spectral width and second spectral width are different.

25. The method of claim 24 further comprising:

(6) receiving the second light signal at a plurality of detectors arranged along the first direction such that each detector of the plurality thereof receives a different wavelength signal of a first plurality of wavelength signals that are characterized by different wavelengths within the second spectral range;

(7) providing a first plurality of output signals, wherein each output signal of the first plurality thereof is based on the magnitude of a different wavelength signal of the first plurality thereof;

(8) receiving the third light signal at the plurality of detectors such that each detector of the plurality thereof receives a different wavelength signal of a second plurality of wavelength signals that are characterized by different wavelengths within the third spectral range, wherein the first plurality of wavelength signals and second plurality of wavelength signals have different spectral resolutions; and

(9) providing a second plurality of output signals, wherein each output signal of the second plurality thereof is based on the magnitude of a different wavelength signal of the second plurality thereof.

26. The method of claim 17 further comprising:

(4) controlling a first separation between the first and second mirrors at a first location such that the first separation has a second magnitude, wherein one of a first maximum wavelength and first minimum wavelength of the second spectral range is based on the second magnitude;

(5) receiving the second light signal at a plurality of detectors arranged along the first direction such that each detector of the plurality thereof receives a different wavelength signal of a first plurality of wavelength signals that are characterized by different wavelengths within the second spectral range; and

(6) providing a first plurality of output signals, wherein each output signal of the first plurality thereof is based on the magnitude of a different wavelength signal of the first plurality thereof.

27. The method of claim 26 further comprising:

(7) controlling the first separation such that it has a third magnitude;

(8) providing a third light signal from the spectral filter such that it is spectrally dispersed along the first direction, the third light signal being characterized by a third spectral range that is within the first spectral range, wherein one of a second maximum wavelength and second minimum wavelength of the third spectral range is based on the third magnitude;

receiving the third light signal at the plurality of detectors such that each detector of the plurality thereof receives a different wavelength signal of a second plurality of wavelength signals that are characterized by different wavelengths within a third spectral range; and

(9) providing a second plurality of output signals, wherein each output signal of the second plurality thereof is based on the magnitude of a different wavelength signal of the second plurality thereof.

28. The method of claim 27 further comprising (10) controlling the first angle such that it has a fourth magnitude, wherein the third spectral range has a second spectral width that is based on the fourth magnitude, and wherein the first plurality of wavelength signals and second plurality of wavelength signals have different spectral resolutions.