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Method of laser irradiation, laser irradiation apparatus, and method of manufacturing a semiconductor device

  • US 10,488,671 B2
  • Filed: 03/05/2018
  • Issued: 11/26/2019
  • Est. Priority Date: 08/27/2001
  • Status: Expired due to Term
First Claim
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1. A laser irradiation apparatus, comprising:

  • a laser;

    a first cylindrical lens array for dividing a laser beam emitted from the laser into a plurality of laser beams in a first direction perpendicular to an optical axis of the laser beam;

    a cylindrical lens for superposing into one the plurality of laser beams which are divided in the first direction;

    a second cylindrical lens array for dividing the laser beam into a plurality of laser beams in a second direction perpendicular to both the optical axis and the first direction; and

    a toroidal lens or a crossed cylindrical lens for setting a convergent position of the laser beam superposed in the first direction on an irradiation surface and superposing into one the plurality of laser beams which are divided in the second direction on the irradiation surface.

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