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Systems and methods for internal surface conditioning assessment in plasma processing equipment

  • US 10,490,418 B2
  • Filed: 04/19/2018
  • Issued: 11/26/2019
  • Est. Priority Date: 10/14/2014
  • Status: Active Grant
First Claim
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1. A method of assessing surface conditioning of one or more internal surfaces of a plasma processing system, the method comprising:

  • introducing one or more plasma source gases within a plasma generation cavity of the plasma processing system, the plasma generation cavity being bounded at least in part by the one or more internal surfaces;

    applying power across electrodes of the plasma processing system to ignite a plasma with the plasma source gases within the plasma generation cavity;

    capturing optical emissions from the plasma with an optical probe that is disposed adjacent the plasma generation cavity and is oriented such that the captured optical emissions are not affected by interaction of the plasma with a workpiece; and

    monitoring one or more emission peaks of the captured optical emissions to assess the surface conditioning of the one or more internal surfaces.

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