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System and method for compensation of illumination beam misalignment

  • US 10,495,579 B2
  • Filed: 04/03/2017
  • Issued: 12/03/2019
  • Est. Priority Date: 05/02/2016
  • Status: Active Grant
First Claim
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1. A system comprising:

  • a beam steering assembly configured to adjust an incident beam to form a corrected beam;

    a beam monitoring assembly optically coupled to the beam steering assembly, the beam monitoring assembly configured to generate monitoring data for the corrected beam, wherein the monitoring data includes one or more offset parameters of the corrected beam, wherein the beam monitoring assembly comprises;

    a leak mirror configured to;

    receive the corrected beam from the beam steering assembly;

    reflect a first portion of the corrected beam; and

    transmit a second portion of the corrected beam; and

    a beam splitter configured to;

    receive the second portion of the corrected beam transmitted by the leak mirror;

    transmit a third portion of the corrected beam through at least a first optical element to a first imaging device; and

    reflect a fourth portion of the corrected beam through at least a second optical element to a second imaging device,wherein the third portion of the corrected beam and the fourth portion of the corrected beam are formed from the second portion of the corrected beam; and

    a controller communicatively coupled to the beam monitoring assembly and the beam steering assembly, wherein the controller includes one or more processors configured to execute a set of program instructions stored in memory, wherein the program instructions are configured to cause the one or more processors to;

    store one or more zero parameters of the corrected beam;

    calculate at least one difference between the one or more zero parameters and the one or more offset parameters of the corrected beam;

    determine one or more beam position adjustments of the incident beam based on the at least one difference between the one or more zero parameters and the one or more offset parameters of the corrected beam; and

    direct the beam steering assembly, via one or more motor drivers, to actuate one or more motors to adjust the incident beam to form the corrected beam.

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