High aspect-ratio low noise multi-axis accelerometers

• US 10,495,663 B2
• Filed: 02/18/2017
• Issued: 12/03/2019
• Est. Priority Date: 02/19/2016
• Status: Active Grant

• Current Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Original Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Inventors: Najafi, Khalil, Tang, Yemin
• Primary Examiner(s): Roberts, Herbert K
• Application Number:
  US15/436,774
• Publication Number:
  US 20180113146A1
• Time in Patent Office: 1,018 Days
• CPC Class Codes: G01P 15/0894 by non-contact electron transfer, i.e. electron tunneling
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/135 by making use of contacts which are actuated by a movable inertial mass

Abstract

The design and fabrication of a multi-axis capacitive accelerometer is presented with sub-μg resolution based on CMOS-compatible fabrication technology that can provide large proof-mass, high-aspect ratio and a large sense electrode area within a smaller footprint that previous accelerometers. In some instances, the device footprint can be reduced by placing the sense electrodes near the top or bottom of the transducer structure such that motion of the transducer causes size of the sense gap to vary in a direction that is parallel with longitudinal axis of the support beam for the transducer structure. An extra mass can also be added to the top of the transducer structure to increase sensitivity.

Claims

1. A transducer with a high aspect ratio, comprising:

a substrate;

a transducer structure mounted on a top surface of the substrate and extending upwardly from the top surface of the substrate, wherein the transducer structure is comprised of a cantilever beam integrally formed with a proof-mass, wherein the proof-mass extends from a top of the cantilever beam downwardly along one or more side surfaces of the cantilever beam towards the top surface of the substrate;

one or more sensing electrodes mounted to the top surface of the substrate and spatially separated from the transducer structure, wherein the one or more sensing electrodes are configured to measure a change in a gap formed between the one or more electrodes and the transducer structure, such that motion of the transducer structure causes a size of the gap to vary in a direction that is parallel with a longitudinal axis of the cantilever beam; and

one or more additional electrodes extending upwardly from the top surface of the substrate and arranged around a periphery of the transducer structure.

2. The transducer of claim 1 wherein the gap is formed between a bottom surface of the proof-mass facing the top surface of the substrate and the top surface of the substrate.

3. The transducer of claim 2 wherein a dimension of the gap between the bottom surface of the proof-mass and the top surface of the substrate is less than one micron.

4. The transducer of claim 3 wherein the transducer structure is comprised of silicon and a conductive material is deposited onto the bottom surface of the proof-mass.

5. The transducer of claim 3 wherein the one or more additional electrodes are spatially separated from the transducer structure by a channel that extends along an entire height of the transducer structure.

6. The transducer of claim 5 wherein a width of the channel proximate to a top of the transducer structure differs from a width of the channel proximate to a bottom of the transducer structure.

7. The transducer of claim 1 further comprising an extra mass deposited onto a top surface of the transducer structure, where material comprising the extra mass has a higher density than material comprising the transducer structure.

8. A transducer with a high aspect ratio, comprising:

a substrate;

a transducer structure mounted on a top surface of the substrate and extending upwardly from the top surface of the substrate, wherein the transducer structure is comprised of a support beam;

one or more stationary electrodes extending upwardly from the top surface of the substrate and arranged around a periphery of the transducer structure, wherein the one or more stationary electrodes are spatially separated from the transducer structure by a channel that extends along an entire height of the transducer structure; and

one or more sensing electrodes formed on a top surface of the transducer structure, where the one or more sensing electrodes extend radially outward from the transducer structure and overhang at least a portion of a top surface of the one or more stationary electrodes, thereby defining a gap between the one or more sensing electrodes and the top surface of the one or more stationary electrodes.

9. The transducer of claim 8 wherein the transducer structure further includes a proof-mass integrally formed with the support beam, wherein the proof-mass extends from a top of the support beam downwardly along one or more side surfaces of the support beam towards the top surface of the substrate.

10. The transducer of claim 9 wherein a dimension of the channel between the transducer structure and the one or more stationary electrodes is substantially constant.

11. The transducer of claim 10 wherein the dimension of the gap between the one or more sensing electrodes and the top surface of the one or more stationary electrodes is less than one micron.

12. The transducer of claim 11 further comprising an extra mass deposited onto the top surface of the transducer structure, where material comprising the extra mass has a higher density than material comprising the transducer structure.

13. The transducer of claim 9 wherein the transducer structure and the one or more stationary electrodes are formed using deep reactive ion etching.

14. A transducer with a high aspect ratio, comprising:

a substrate;

a transducer structure mounted on a top surface of the substrate and extending upwardly from the top surface of the substrate, wherein the transducer structure is comprised of a support beam;

one or more stationary electrodes extending upwardly from the top surface of the substrate and arranged around periphery of the transducer structure, wherein the one or more stationary electrodes are spatially separated from the transducer structure by a channel that extends along an entire height of the transducer structure; and

one or more sensing electrodes formed on a top surface of the one or more stationary electrodes, where the one or more sensing electrodes extend radially inward from the one or more stationary electrodes and overhang at least a portion of a top surface of the transducer structure, thereby defining a gap between the one or more sensing electrodes and the top surface of the transducer structure.

15. A transducer with a high aspect ratio, comprising:

a substrate;

a transducer structure mounted on a top surface of the substrate and extending upwardly from the top surface of the substrate, wherein the transducer structure is comprised of a support beam integrally formed with a proof-mass;

one or more stationary electrodes extending upwardly from the top surface of the substrate and arranged around periphery of the transducer structure, wherein the one or more stationary electrodes are spatially separated from the transducer structure by a channel that extends along an entire height of the transducer structure, such that a width of the channel proximate to a top of the transducer structure differs from a width of the channel proximate to a bottom of the transducer structure; and

an extra mass deposited on the top surface of the transducer structure, where material comprising the extra mass has a higher density than material comprising the transducer structure.

16. The transducer of claim 15 wherein the extra mass has a height dimension extending upward from the top surface of the transducer structure along an axis that is parallel with a longitudinal axis of the support beam.

17. The transducer of claim 15 wherein the extra mass is further defined as a metal electroplated onto the top surface of the transducer structure.

18. The transducer of claim 15 wherein the extra mass is further defined as a wire.

19. The transducer of claim 15 wherein the channel has a narrow section and a wider section, such that a dimension of the channel between the transducer structure and the one or more stationary electrodes in the narrow section is less than the wider section.