Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target

• US 10,495,699 B2
• Filed: 07/19/2013
• Issued: 12/03/2019
• Est. Priority Date: 07/19/2013
• Status: Active Grant

• Current Assignee: Allegro Microsystems Incorporated (Sanken Electric Company Limited)
• Original Assignee: Allegro Microsystems Incorporated (Sanken Electric Company Limited)
• Inventors: Burdette, Eric, Taylor, William P.
• Primary Examiner(s): Rodak, Lee E
• Application Number:
  US13/946,417
• Publication Number:
  US 20150022193A1
• Time in Patent Office: 2,328 Days
• Field of Search: 32420711-20726, 324228-243, 324244-263, 324164, 338 32 H, 338 32 R, 338 32 S
• CPC Class Codes: G01N 27/72 by investigating magnetic variables
• CPC Class Codes: G01R 33/06 using galvano-magnetic devices
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00

Abstract

Methods and apparatus for detecting a magnetic field include a magnetic source configured to provide a magnetic field to induce an eddy current in a non-ferromagnetic target, and a magnetic field sensing element configured to detect the magnetic field as a result of the eddy current. The magnetic field provided by the magnetic source can be a static (i.e. DC) field or a changing (i.e. non-DC) field.

Claims

1. A magnetic field sensor comprising:

a substrate having first and second opposing surfaces;

a magnetic source configured to provide a magnetic field to induce an eddy current in a non-ferromagnetic rotating target having a body with an oblong, oval shape affecting the eddy current, wherein the magnetic source is a coil positioned so that the substrate is between the magnetic source and the target;

a magnetic field sensing element configured to detect the magnetic field provided by the magnetic source and a resulting magnetic field generated as a result of the eddy current and produce a signal representing a combination of the magnetic field provided by the magnetic source and the resulting magnetic field generated as a result of the eddy current; and

a circuit formed within the substrate and coupled to receive the signal and determine a position of the rotating target,

wherein the substrate is positioned so a plane defined by the first surface is substantially parallel to an axis of rotation of the rotating target; and

wherein a shortest distance between the magnetic field sensing element and the rotating target changes as a result of rotation of the oblong, oval shape of the body, and a strength of the eddy current and a strength of the resulting magnetic field changes in response to changes in the shortest distance between the magnetic field sensing element and the rotating target.

2. The magnetic field sensor of claim 1 wherein the magnetic field sensing element is a giant-magnetoresistance (GMR) element.

3. The magnetic field sensor of claim 2 wherein the GMR element comprises a plurality of GMR elements in a bridge configuration.

4. The magnetic field sensor of claim 1 wherein the magnetic field sensing element is a Hall Effect element.

5. The magnetic field sensor of claim 1 wherein the coil is energized with a changing current.

6. The magnetic field sensor of claim 1 wherein the magnetic field sensing element is configured to detect a direction of rotation of the rotating target based on a direction of the eddy current.

7. The magnetic field sensor of claim 1 wherein the circuit is configured to determine proximity of the rotating target to the magnetic field sensor.

8. The magnetic field sensor of claim 7 wherein the circuit is further configured to compare the signal to an expected value.

9. The magnetic field sensor of claim 7 wherein the signal represents a closer proximity of the target in response to detection of a stronger eddy current and a further proximity in response to detection of a weaker eddy current.

10. The magnetic field sensor of claim 1 wherein the magnetic source is configured to generate a static magnetic field and the eddy current is induced by the change in the shortest distance as the target rotates.

11. The magnetic field sensor of claim 1 wherein the magnetic source is configured to generate a changing magnetic field.

12. The magnetic field sensor of claim 1 wherein the body comprises at least one feature positioned at an outer circumference of the body, the feature comprising a material that has a conductivity that differs from a conductivity of the body.

13. The magnetic field sensor of claim 12 wherein the at least one feature is non-conductive or less conductive than the body.

14. A method of detecting a magnetic field comprising:

placing a substrate, which has a surface that supports one or more magnetic field sensing elements, on a first surface of a lead frame;

enclosing the substrate ad a coil in a non-conductive mold material, wherein the coil is adjacent to a second surface of the lead frame opposite the first surface of the lead frame;

placing the enclosed substrate and coil in proximity to a non-ferromagnetic rotating target so that a plane defined by the surface is substantially parallel to an axis of rotation of the non-ferromagnetic rotating target;

producing, by the coil, a magnetic field to induce an eddy current in the non-ferromagnetic rotating target;

causing fluctuations in the eddy current by features of the non-ferromagnetic rotating target passing through the magnetic field;

detecting, by the one or more magnetic field sensing elements, variations in a resulting magnetic field generated by the non-ferromagnetic rotating target; and

determining, by a processor, a position of the rotating target based on the resulting magnetic field;

wherein a shortest distance between the one or more magnetic field sensing elements and the target changes as a result of rotation of the target, and a strength of the eddy current and a strength of the resulting magnetic field detected by the one or more magnetic field sensing elements changes in response to changes in the shortest distance between the one or more magnetic field sensing elements and the target.

15. A magnetic field sensor comprising:

a lead frame having a first and second opposing surfaces;

a coil adjacent to the second surface of the lead frame and configured to provide a changing magnetic field in response to being energized with a changing current to induce an eddy current in a non-ferromagnetic rotating target;

a substrate having first and second opposing surfaces, the second surface of the substrate attached to the first surface of the lead frame and the first surface of the substrate supporting;

a magnetic field sensing element configured to detect the changing magnetic field provided by the coil and a resulting magnetic field generated as a result of the eddy current and produce a signal representing a combination of the changing magnetic field provided by the coil and the resulting magnetic field generated as a result of the eddy current; and

a circuit formed within the substrate and coupled to receive the signal and determine a position of the rotating target;

wherein the first surface of the substrate defines a plane that is substantially parallel to an axis of rotation of the non-ferromagnetic rotating target; and

wherein a shortest distance between the magnetic field sensing resin element and the target changes as a result of rotation of the target, and a strength of the eddy current and a strength of the resulting magnetic field detected by the magnetic field sensing element changes in response to changes in the shortest distance between the magnetic field sensing element and the target wherein the coil is positioned so that the substrate is between the coil and the target.

16. The magnetic field sensor of claim 15 further comprising a non-conductive mold material enclosing the substrate and a portion of the lead frame, wherein the non-conductive mold material has a protrusion concentric with respect to the coil.