Memory device and semiconductor device

• US 10,497,419 B2
• Filed: 03/17/2017
• Issued: 12/03/2019
• Est. Priority Date: 01/26/2011
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Yamazaki, Shunpei, Koyama, Jun
• Primary Examiner(s): Norman, James G
• Application Number:
  US15/462,077
• Publication Number:
  US 20170256301A1
• Time in Patent Office: 991 Days
• Field of Search: None
• CPC Class Codes: G11C 11/404 with one charge-transfer gate, e.g. MOS transistor, per cell
• CPC Class Codes: G11C 11/4085 Word line control circuits, e.g. word line drivers, - boosters, - pull-up, - pull-down, - precharge
• CPC Class Codes: H01L 21/84 the substrate being other than a semiconductor body, e.g. being an insulating body
• CPC Class Codes: H01L 27/0688 Integrated circuits having a three-dimensional layout
• CPC Class Codes: H01L 27/1207 combined with devices in contact with the semiconductor body, i.e. bulk/SOI hybrid circuits
• CPC Class Codes: H01L 28/60 Electrodes
• CPC Class Codes: H10B 12/03 Making the capacitor or connections thereto
• CPC Class Codes: H10B 12/05 Making the transistor
• CPC Class Codes: H10B 12/488 Word lines
• CPC Class Codes: H10B 12/50 Peripheral circuit region structures
• CPC Class Codes: Y02D 10/00 Energy efficient computing, e.g. low power processors, power management or thermal management

Abstract

To provide a memory device which operates at high speed or a memory device in which the frequency of refresh operations is reduced. In a cell array, a potential is supplied from a driver circuit to a wiring connected to a memory cell. The cell array is provided over the driver circuit. Each of memory cells included in the cell array includes a switching element, and a capacitor in which supply, holding, and discharge of electric charge are controlled by the switching element. Further, a channel formation region of the transistor used as the switching element includes a semiconductor whose band gap is wider than that of silicon and whose intrinsic carrier density is lower than that of silicon.

Claims

1. A semiconductor device comprising:

a circuit portion;

an insulating film over the circuit portion; and

a cell array over the insulating film, the cell array comprising;

a plurality of first cells positioned in a first region;

a plurality of second cells positioned in a second region;

a plurality of third cells positioned in a third region;

a plurality of fourth cells positioned in a fourth region;

a plurality of first wirings; and

a plurality of second wirings,

wherein one of the plurality of first cells comprises a transistor,

wherein one of the plurality of first wirings is electrically connected to a gate of the transistor,

wherein one of the plurality of second wirings is electrically connected to one of a source and a drain of the transistor,

wherein the cell array comprises a region overlapping with the circuit portion,

wherein the one of the plurality of first wirings is electrically connected to the circuit portion through one of a plurality of first contact holes,

wherein the one of the plurality of second wirings is electrically connected to the circuit portion through one of a plurality of second contact holes,

wherein the one of the plurality of first wirings comprises a region extending along a first direction,

wherein the one of the plurality of second wirings comprises a region extending along a second direction,

wherein the second direction crosses the first direction,

wherein the plurality of first contact holes are between the first region and the second region, and between the third region and the fourth region,

wherein the plurality of second contact holes are between the first region and the third region, and between the second region and the fourth region,

wherein the plurality of first contact holes are arranged along the second direction, and

wherein the plurality of second contact holes are arranged along the first direction.

2. The semiconductor device according to claim 1,

wherein the transistor comprises an oxide semiconductor film comprising a channel formation region.

3. The semiconductor device according to claim 2, wherein the oxide semiconductor film comprises indium and zinc.

4. The semiconductor device according to claim 2, wherein a hydrogen concentration in the oxide semiconductor film is 1×

10¹⁹/cm³ or less.

5. A semiconductor device comprising:

a circuit portion;

an insulating film over the circuit portion; and

a cell array over the insulating film, the cell array comprising;

a plurality of first cells positioned in a first region;

a plurality of second cells positioned in a second region;

a plurality of third cells positioned in a third region;

a plurality of fourth cells positioned in a fourth region;

a plurality of first wirings; and

a plurality of second wirings,

wherein one of the plurality of first cells comprises a transistor,

wherein one of the plurality of first wirings is electrically connected to a gate of the transistor,

wherein one of the plurality of second wirings is electrically connected to one of a source and a drain of the transistor,

wherein the cell array comprises a region overlapping with the circuit portion,

wherein the one of the plurality of first wirings is electrically connected to the circuit portion through one of the plurality of first contact holes,

wherein the one of the plurality of second wirings is electrically connected to the circuit portion through one of the plurality of second contact holes,

wherein the one of the plurality of first wirings comprises a region extending along a first direction,

wherein the one of the plurality of second wirings comprises a region extending along a second direction,

wherein the second direction crosses the first direction,

wherein the plurality of first contact holes are between the first region and the second region, and between the third region and the fourth region,

wherein the plurality of second contact holes are between the first region and the third region, and between the second region and the fourth region,

wherein the plurality of first contact holes are arranged along the second direction, and

wherein the plurality of second contact holes are arranged along the first direction.

6. The semiconductor device according to claim 5,

wherein the transistor comprises an oxide semiconductor film comprising a channel formation region.

7. The semiconductor device according to claim 6, wherein the oxide semiconductor film comprises indium and zinc.

8. The semiconductor device according to claim 6, wherein a hydrogen concentration in the oxide semiconductor film is 1×

10¹⁹/cm³ or less.

9. A semiconductor device comprising:

a circuit portion;

an insulating film over the circuit portion; and

a cell array over the insulating film, the cell array comprising;

a first cell comprising a first transistor;

a second cell comprising a second transistor;

a first wiring;

a second wiring; and

a third wiring,

wherein the first wiring is electrically connected to a gate of the first transistor,

wherein the second wiring is electrically connected to a gate of the second transistor,

wherein the third wiring is electrically connected to one of a source and a drain of the first transistor,

wherein the third wiring is electrically connected to one of a source and a drain of the second transistor,

wherein the cell array comprises a region overlapping with the circuit portion,

wherein a first contact hole, a second contact hole and a third contact hole are provided in the insulating film,

wherein the first wiring is electrically connected to the circuit portion through the first contact hole,

wherein the second wiring is electrically connected to the circuit portion through the second contact hole,

wherein the third wiring is electrically connected to the circuit portion through the third contact hole,

wherein the first wiring comprises a region extending along a first direction,

wherein the second wiring comprises a region extending along the first direction,

wherein the third wiring comprises a region extending along a second direction,

wherein the second direction crosses the first direction, and

wherein the first contact hole and the second contact hole are arranged along the second direction.

10. The semiconductor device according to claim 9,

wherein each of the first transistor and the second transistor comprises an oxide semiconductor film comprising a channel formation region.

11. The semiconductor device according to claim 10, wherein the oxide semiconductor film comprises indium and zinc.

12. The semiconductor device according to claim 10, wherein a hydrogen concentration in the oxide semiconductor film is 1×

10¹⁹/cm³ or less.