Stretchable electronic systems with fluid containment

• US 10,497,633 B2
• Filed: 03/15/2013
• Issued: 12/03/2019
• Est. Priority Date: 02/06/2013
• Status: Active Grant

• Current Assignee: Board of Trustees of The University of Illinois
• Original Assignee: Board of Trustees of The University of Illinois
• Inventors: Rogers, John A., Xu, Sheng, Fan, Jonathan A., Jia, Lin
• Primary Examiner(s): Cullen, Sean P
• Application Number:
  US13/835,284
• Publication Number:
  US 20140220422A1
• Time in Patent Office: 2,454 Days
• Field of Search: 429124, 429163, 438117, 257687
• CPC Class Codes: H01L 2224/16225 the item being non-metallic, e.g. insulating substrate with or without metallisation
• CPC Class Codes: H01L 23/08 the material being an electrical insulator, e.g. glass
• CPC Class Codes: H01L 23/18 Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
• CPC Class Codes: H01L 23/22 liquid at the normal operating temperature of the device
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/12032 Schottky diode
• CPC Class Codes: H01L 2924/12041 LED
• CPC Class Codes: H01L 2924/12042 LASER
• CPC Class Codes: H01L 2924/12043 Photo diode
• CPC Class Codes: H01M 6/40 Printed batteries , e.g. thin film batteries
• CPC Class Codes: H05K 1/0272 Adaptations for fluid transport, e.g. channels, holes
• CPC Class Codes: H05K 1/0283 Stretchable printed circuits
• CPC Class Codes: H05K 2201/09263 Meander
• CPC Class Codes: H05K 2201/10037 Printed or non-printed battery

Abstract

The present invention provides electronic systems, including device arrays, comprising functional device(s) and/or device component(s) at least partially enclosed via one or more fluid containment chambers, such that the device(s) and/or device component(s) are at least partially, and optionally entirely, immersed in a containment fluid. Useful containment fluids for use in fluid containment chambers of electronic devices of the invention include lubricants, electrolytes and/or electronically resistive fluids. In some embodiments, for example, electronic systems of the invention comprise one or more electronic devices and/or device components provided in free-standing and/or tethered configurations that decouple forces originating upon deformation, stretching or compression of a supporting substrate from the free standing or tethered device or device component.

Claims

1. An electronic system comprising:

i. a substrate,

wherein said substrate has a Young'"'"'s modulus selected from the range of 1 kPa to 100 MPa,

wherein said substrate is a flexible substrate or a stretchable substrate;

ii. an electronic device or device component supported by said substrate;

wherein said electronic device or device component is free standing or tethered to said substrate;

iii. a fluid containment chamber at least partially enclosing said electronic device or device component;

wherein said fluid containment chamber is an elastomer at least partially filled with a containment fluid and

wherein at least 50% of the volume of said fluid containment chamber is occupied by said containment fluid,

wherein said containment fluid has a viscosity greater than or equal to 0.1 cP and less than or equal to 10,000 cP at 298 K after the electronic system is fabricated; and

iv. one or more stretchable electrical interconnects in electrical contact with said electronic device or device component,

wherein the electronic device or device component in a free-standing or tethered configuration mechanically isolates forces originating upon deformation, stretching or compression of the flexible or stretchable substrate from the electronic device or device component to decrease a strain exerted on the electronic device or device component by a factor of at least 4 to 1000 times compared to an equivalent device or device component directly bonded to said substrate.

2. The system of claim 1, wherein said containment fluid is in physical contact with said electronic device or device component.

3. The system of claim 1, wherein said electronic device or device component is entirely immersed in said containment fluid.

4. The system of claim 1, wherein said containment fluid is a lubricant.

5. The system of claim 1, wherein said containment fluid is an electrolyte.

6. The system of claim 1,

wherein said containment fluid has an ionic conductivity greater than or equal to 0.001 S cm⁻

1.

7. The system of claim 1, wherein said containment fluid has a vapor pressure less than or equal to 760 Torr at 298 K.

8. The system of claim 1, wherein said containment fluid is a liquid, colloid, or gel or gas.

9. The system of claim 1, wherein said containment fluid is a material selected from the group consisting of a prepolymer, a solvent, a nonaqueous electrolyte, a silicone, a natural oil, a synthetic oil, a polyolefin and a fluorocarbon.

10. The system of claim 1, wherein said substrate is a polymer substrate.

11. The system of claim 1, wherein said substrate comprises one or more materials selected from the group consisting of an elastomer, PDMS, silicone rubber, and a silicone.

12. The system of claim 1, wherein said substrate has a thickness selected from the range of 100 microns to 100 mm.

13. The system of claim 1, wherein said fluid containment chamber comprises a material selected from the group consisting of PDMS, silicone rubber, and a silicone.

14. The system of claim 1, wherein said fluid containment chamber has a height selected from the range of 10 μ

m to 10 cm.

15. The system of claim 1, wherein at least 0.1% of the volume of said fluid containment chamber is occupied by said electronic device or device component.

16. The system of claim 1, wherein said free standing or tethered electronic device or device component at least partially decouples motion or deformation of said substrate from said electronic device or device component.

17. The system of claim 1, wherein said free standing or tethered electronic device or device component at least partially decouples forces generated by elongation, compression or deformation of said substrate from said electronic device or device component.

18. The system of claim 1, wherein said electronic device or device component comprises a single crystalline inorganic semiconductor structure.

19. The system of claim 1, wherein said electronic device or device component comprises a single crystalline inorganic semiconductor structure operationally connected to at least one additional device component or structure selected from the group consisting of a conducting structure, a dielectric structure, an electrode, a cathode, an anode, and an additional semiconductor structure.

20. The system of claim 1, wherein said electronic device or device component has a thickness selected from the range of 10 nanometers to about 100 microns, a width selected from the range of 100 nanometers to about 1 millimeter and a length selected from the range of 1 micron to about 1 millimeter.

21. The system of claim 1, wherein said system further comprises one or more additional electronic devices or device components at least partially enclosed by said fluid containment chamber or at least partially enclosed by one or more additional fluid containment chambers.

22. The system of claim 1, wherein said electronic device or device component is a free standing or tethered fully formed integrated circuit.

23. The system of claim 1, wherein said electronic device or device component comprises a transistor, an electrochemical cell, a fuel cell, an integrated circuit, a solar cell, a laser, a light emitting diode, a nanoelectromechanical device, a microelectromechanical device, a photodiode, a P-N junction, a sensor, a memory device, a complementary logic circuit or an array of any of these.

24. The system of claim 1, wherein said fluid containment chamber comprises a material that is not permeable to said containment fluid.

25. The system of claim 24, wherein said one or more electrical interconnects establish electrical contact between said electronic device or device component and one or more additional electronic devices or device components.

26. The system of claim 25, wherein said electronic device or device component, said one or more additional electronic devices or device components and said one or more electrical interconnects are provided in an island bridge geometry, wherein said electronic devices or device components comprise said islands and wherein said electrical interconnects comprise said bridges.

27. The system of claim 1, wherein said one or more stretchable electrical interconnects are configured to provide elasticity, bendability, or both of said electronic system.

28. The system of claim 27, wherein at least a portion of said one or more stretchable electrical interconnects has a bent, buckled, folded, curved or serpentine geometry.

29. The system of claim 27, wherein at least a portion of said one or more stretchable electrical interconnects has a geometry that is in plane, out of plane, or both in plane and out of plane, relative to a plane defined by a supporting surface of said substrate.

30. The system of claim 29, wherein said supporting surface is curved.

31. The system of claim 29, wherein said supporting surface is substantially flat.

32. The system of claim 29, wherein at least a portion of said one or more electrical interconnects has an in plane serpentine geometry.

33. The system of claim 27, wherein said at least a portion of said one or more stretchable electrical interconnects comprises a plurality of electrically conductive structures each independently having a primary unit cell shape comprising a plurality of spatially offset and opposing segments, wherein said conductive structures are connected in a sequence characterized by a secondary shape, comprising at least one pair of spatially offset and opposing regions formed from said sequence of electrically conductive structures;

wherein said sequence of conductive structures is capable of undergoing deformation thereby providing stretchability of said stretchable electrical interconnects.

34. The system of claim 33, wherein said at least a portion of said one or more electrical interconnects comprising said sequence of electrically conductive structures provides an overall self-similar geometry for said stretchable electrical interconnect.

35. The system of claim 33, wherein said sequence of electrically conductive structures is further characterized by a tertiary shape comprising at least one pair of spatially offset and opposing regions formed from a repeating series of said electrically conductive structures comprising said secondary shape.

36. The system of claim 33, wherein said sequence of conductive structures comprises a monolithic structure.

37. The system of claim 33, wherein said sequence of conductive structures comprises a wire.

38. The system of claim 33, wherein said primary unit cell shape comprises convex and concave regions.

39. The system of claim 33, wherein said unit cell is a serpentine shape.

40. The system of claim 27, wherein at least one of said electrical interconnects electrically connects said device component comprising a first rigid device island with a second device component comprising a second rigid device island.

41. The system of claim 40, further comprising an array of said device components comprising rigid device islands, wherein said one or more electrical interconnects electrically connect adjacent rigid device islands.

42. The system of claim 41, further comprising a plurality of said device components, wherein each of said rigid device islands corresponds to one of said device components.

43. The system of claim 1, wherein said electronic device or device component is a free standing structure supported by or in physical contact with said substrate.

44. The system of claim 43, wherein said free standing structure undergoes an associative interaction with said substrate or an intermediate structure provided between said substrate and said free standing structure;

wherein said associative interaction is a dipole —

dipole interaction or a Van der Waals interaction.

45. The system of claim 1, wherein said electronic device or device component comprises a single crystalline semiconductor electronic device.

46. The system of claim 45, wherein said single crystalline semiconductor electronic device or device component comprises one or more electronic devices selected from the group consisting of a transistor, an electrochemical cell, a fuel cell, an integrated circuit, a solar cell, a laser, a light emitting diode, a nanoelectromechanical device, a microelectromechanical device, a photodiode, a P-N junction, a sensor, a memory device, an integrated circuit and a complementary logic circuit.

47. The system of claim 1, wherein said electronic device or device component is a tethered structure supported by one or more relief features of said substrate or one or more relief features supported by said substrate.

48. The system of claim 47, wherein said one or more relief features comprise one or more pedestals.

49. The system of claim 47, wherein said one or more relief features comprise an array of at least 10 pedestals.

50. The system of claim 47, wherein said tethered structure is bonded to said one or more relief features.

51. The system of claim 47, wherein said one or more relief features comprise an elastomer, PDMS, silicone rubber, or a silicone.

52. The system of claim 47, wherein each of said one or more relief structures independently extend a length selected over the range of 100 nm to 1 mm and independently have one or more cross sectional physical dimensions selected over the range of 100 nm to 1 mm.

53. The system of claim 1, wherein said electronic device or device component is provided on a receiving surface of said substrate or on an intermediate structure provided between said substrate and said electronic device or device component.

54. The system of claim 53, wherein said fluid containment chamber comprises one or more enclosing structures positioned to surround an exterior portion of said electronic device or device component.

55. The system of claim 54, wherein said one or more enclosing structures of said fluid containment chamber are operationally coupled to said receiving surface or an intermediate structure provided between said receiving surface and said one or more enclosing structures.

56. The system of claim 54, wherein said one or more enclosing structures of said fluid containment chamber are not in physical contact with said electronic device or device component.

57. The system of claim 54, wherein said enclosing structures comprise one or more chamber walls or barrier structures each positioned at least 10 microns from a side of the electronic device or device component.

58. The system of claim 54, wherein at least a portion of said enclosing structures of said fluid containment chamber is laminated to said substrate or an intermediate structure provided between said substrate and said enclosing structure.

59. The system of claim 54, wherein said enclosing structures of said fluid containment chamber have a Young'"'"'s modulus selected from the range of 1 kPa to 1 GPa.

60. The system of claim 54, wherein said fluid containment chamber further comprises one or more recessed features provided in said substrate partially surrounding said electronic device or device component, wherein said one or more enclosing structures are provided to enclose said recessed features.

61. The system of claim 60, wherein said recessed features of said fluid containment chamber comprise one or more chamber walls or barrier structures each positioned at least 10 microns from a side of said electronic device or device component.

62. An array of electronically interconnected systems of claim 1.

63. A method of making an electronic system comprising:

providing a substrate,

wherein said substrate has a Young'"'"'s modulus selected from the range of kPa to 100 MPa,

wherein said substrate is a flexible substrate or a stretchable substrate;

providing an electronic device or device component that is free standing or tethered to said substrate in a fluid containment chamber on said substrate such that said fluid containment chamber at least partially encloses said electronic device or device component;

wherein said fluid containment chamber is an elastomer and

wherein at least 50% of the volume of said fluid containment chamber is occupied by a containment fluid;

providing one or more stretchable interconnects in electrical contact with said electronic device or device component, and

at least partially filling said fluid containment chamber with said containment fluid,

wherein said containment fluid has a viscosity greater than or equal to 0.1 cP and less than or equal to 10,000 cP at 298 K after the electronic system is fabricated;

wherein the electronic device or device component in a free-standing or tethered configuration mechanically isolates forces originating upon deformation, stretching or compression of the flexible or stretchable substrate from the electronic device or device component to decrease a strain exerted on the electronic device or device component by a factor of at least 4 to 1000 times compared to an equivalent device or device component directly bonded to said substrate.