Method for fabricating semiconductor device

• US 10,497,810 B2
• Filed: 01/21/2019
• Issued: 12/03/2019
• Est. Priority Date: 04/07/2015
• Status: Active Grant

• Current Assignee: United Microelectronics Corporation
• Original Assignee: United Microelectronics Corporation
• Inventors: Feng, Li-Wei, Tsai, Shih-Hung, Lin, Chao-Hung, Hsu, Chih-Kai, Hung, Yu-Hsiang, Jenq, Jyh-Shyang
• Primary Examiner(s): Rahman, Moin M
• Application Number:
  US16/253,158
• Publication Number:
  US 20190157445A1
• Time in Patent Office: 316 Days
• Field of Search: 257 20, 257194, 257135-136, 257213-413, 257900, 257902-903, 438136, 438137, 438455-458, 438149-165, 438173, 438192, 438206, 438212, 438424, 438427, 438428, 438591
• CPC Class Codes: H01L 29/66795 with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
• CPC Class Codes: H01L 29/66803 with a step of doping the vertical sidewall, e.g. using tilted or multi-angled implants
• CPC Class Codes: H01L 29/785 having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET

Abstract

A method for fabricating semiconductor device includes the steps of: providing a substrate having a first region and a second region; forming a first fin-shaped structure on the first region and a second fin-shaped structure on the second region; forming a first spacer adjacent to the first fin-shaped structure and a second spacer adjacent to the second fin-shaped structure; and using the first spacer and the second spacer as mask to remove part of the substrate for forming a third fin-shaped structure on the first region and a fourth fin-shaped structure on the second region, in which the third fin-shaped structure includes a first top portion and a first bottom portion and the fourth fin-shaped structure includes a second top portion and a second bottom portion.

Claims

1. A method for fabricating semiconductor device, comprising:

providing a substrate having a first region and a second region;

forming a first fin-shaped structure on the first region and a second fin-shaped structure on the second region;

forming a first spacer adjacent to the first fin-shaped structure and a second spacer adjacent to the second fin-shaped structure;

using the first spacer and the second spacer as mask to remove part of the substrate for forming a third fin-shaped structure on the first region and a fourth fin-shaped structure on the second region, wherein the third fin-shaped structure comprises a first top portion and a first bottom portion and the fourth fin-shaped structure comprises a second top portion and a second bottom portion;

forming a first doped layer on the first fin-shaped structure and the second fin-shaped structure;

forming a first hard mask on the first doped layer;

removing the first hard mask and the first doped layer on the second region; and

forming a second doped layer on the first region and the second region.

2. The method of claim 1, wherein each of the first fin-shaped structure and the second fin-shaped structure comprises a mask layer thereon, the method comprises:

using the mask layer, the first spacer, and the second spacer to remove part of the substrate for forming the third fin-shaped structure on the first region and the fourth fin-shaped structure on the second region.

3. The method of claim 2, further comprising:

forming a first liner on the first bottom portion of the third fin-shaped structure and the second bottom portion of the fourth fin-shaped structure;

forming the first doped layer on the first liner;

forming the first hard mask on the first doped layer;

removing the first hard mask and the first doped layer on the second region;

forming the second doped layer on the first region and the second region; and

forming a second hard mask on the second doped layer.

4. The method of claim 3, further comprising performing an anneal process to drive dopants from the first doped layer and the second doped layer into the first bottom portion and the second bottom portion for forming a first doped region in the first bottom portion and a second doped region in the second bottom portion.