Semiconductor light-emitting element having an aluminum nitride substrate
First Claim
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1. A semiconductor light-emitting element, comprising:
- a semiconductor layer formed on a first principal plane of an aluminum nitride substrate; and
an oxide film formed on a second principal plane located on an opposite side to the first principal plane of the aluminum nitride substrate, the oxide film being smaller in refractive index than the aluminum nitride substrate, wherein the oxide film is a layered structure made of a plurality of the oxide films including an amorphous oxide film and a crystalline oxide film, and wherein a thickness of the amorphous oxide film is equal to or larger than 10 nm and equal to or smaller than 3 μ
m, and a thickness of the crystalline oxide film is equal to or larger than 10 nm and equal to or smaller than 2 μ
m.
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Abstract
There are provided a setting process configured to set in a chamber an aluminum nitride substrate in which a semiconductor layer is formed on a first principal plane, and an oxide film forming process configured to heat an inside of the chamber with a water molecule (H2O) being introduced in the chamber and to form an oxide film including an amorphous oxide film and/or a crystalline oxide film on a second principal plane located on an opposite side to the first principal plane of the aluminum nitride substrate.
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8 Claims
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1. A semiconductor light-emitting element, comprising:
- a semiconductor layer formed on a first principal plane of an aluminum nitride substrate; and
an oxide film formed on a second principal plane located on an opposite side to the first principal plane of the aluminum nitride substrate, the oxide film being smaller in refractive index than the aluminum nitride substrate, wherein the oxide film is a layered structure made of a plurality of the oxide films including an amorphous oxide film and a crystalline oxide film, and wherein a thickness of the amorphous oxide film is equal to or larger than 10 nm and equal to or smaller than 3 μ
m, and a thickness of the crystalline oxide film is equal to or larger than 10 nm and equal to or smaller than 2 μ
m. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
- a semiconductor layer formed on a first principal plane of an aluminum nitride substrate; and
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