Inertial sensing systems and methods of manufacturing the same
First Claim
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1. An inertial sensing system, comprising:
- a substrate;
a gyroscope mechanically coupled to the substrate by an anchor, wherein the gyroscope is circular in shape and defines a central opening, and wherein the gyroscope comprises;
a plurality of gyroscope spring elements coupled to the anchor;
a gyroscope proof mass, wherein the gyroscope proof mass comprises a plurality of concentric rings operatively coupled to the plurality of gyroscope spring elements, and wherein the gyroscope proof mass encircles the plurality of gyroscope spring elements;
a plurality of gyroscope electrodes to sense an angular rate of the gyroscope proof mass;
an accelerometer positioned within the central opening, wherein the accelerometer comprises;
a plurality of accelerometer spring elements;
an accelerometer body portion coupled to the substrate through the plurality of accelerometer spring elements and not through the gyroscope proof mass; and
a plurality of accelerometer electrodes to sense an acceleration of the accelerometer body portion,wherein the gyroscope and the accelerometer are configured to be independently operable.
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Abstract
A gyroscope includes at least one anchor and a plurality of gyroscope spring elements coupled to the at least one anchor. The gyroscope also includes a plurality of concentric rings coupled to the plurality of gyroscope spring elements and configured to encircle the plurality of gyroscope spring elements. The gyroscope further includes an excitation/detection/tuning unit electrostatically coupled to the plurality of concentric rings.
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8 Claims
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1. An inertial sensing system, comprising:
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a substrate; a gyroscope mechanically coupled to the substrate by an anchor, wherein the gyroscope is circular in shape and defines a central opening, and wherein the gyroscope comprises; a plurality of gyroscope spring elements coupled to the anchor; a gyroscope proof mass, wherein the gyroscope proof mass comprises a plurality of concentric rings operatively coupled to the plurality of gyroscope spring elements, and wherein the gyroscope proof mass encircles the plurality of gyroscope spring elements; a plurality of gyroscope electrodes to sense an angular rate of the gyroscope proof mass; an accelerometer positioned within the central opening, wherein the accelerometer comprises; a plurality of accelerometer spring elements; an accelerometer body portion coupled to the substrate through the plurality of accelerometer spring elements and not through the gyroscope proof mass; and a plurality of accelerometer electrodes to sense an acceleration of the accelerometer body portion, wherein the gyroscope and the accelerometer are configured to be independently operable. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification