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Method for manufacturing light guide elements

  • US 10,503,071 B2
  • Filed: 10/26/2017
  • Issued: 12/10/2019
  • Est. Priority Date: 10/26/2017
  • Status: Active Grant
First Claim
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1. A method comprising:

  • depositing a photoresist material on a substrate;

    overlaying a first mask on the photoresist material, wherein the first mask defines a first feature;

    causing a light source to illuminate the photoresist material through the first mask during a first exposure, wherein the light source is positioned at a first angle, wherein the first angle comprises a non-normal angle with respect to a plane parallel to the substrate;

    developing the photoresist material so as to retain an elongate portion of the photoresist material on the substrate, wherein a first end of the elongate portion comprises an angled portion, and wherein the angled portion is sloped at an angle with respect to a long axis of the elongate portion;

    overlaying a second mask on the developed photoresist material, wherein the second mask defines a second feature corresponding to the angled portion; and

    depositing a reflective material through the second mask onto the angled portion.

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